Method for producing a mirror of a lithography system
A method for producing a mirror of a lithography system includes providing first and second mirror parts. Cooling channels having elongate cooling channel openings in the region of a first connecting surface of the first mirror part are formed in the first mirror part, and/or cooling channels having elongate cooling channel openings in the region of a second connecting surface of the second mirror part are formed in the second mirror part. The method also includes bringing together the first and second mirror parts so that initially a partial region of the first connecting surface and a partial region of the second connecting surface come into contact and form a common contact surface. The common contact surface is enlarged by continuing to bring the first and second mirror parts together in a direction along the longitudinal extents of the cooling channel openings.
1 . A method, comprising:
providing first and second mirror parts, the first mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a first connecting surface of the first mirror part, and/or the second mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a second connecting surface of the second mirror part;
bringing together the first and second mirror parts so that initially a partial region of the first connecting surface and a partial region of the second connecting surface come into contact and form a common contact surface; and
enlarging the common contact surface by continuing to bring the first and second mirror parts together in a direction along longitudinal extents of the cooling channel openings,
wherein:
the method forms a mirror comprising an optical surface;
the first mirror part further comprises auxiliary channels comprising elongate auxiliary channel openings in the region of the first connecting surface;
the cooling channels of the first and/or second mirror part are beneath the optical surface of the mirror; and
the auxiliary channels of the first mirror part are not beneath the optical surface of the mirror.
2 . The method of claim 1 , wherein the first mirror part comprises cooling channels comprising elongate cooling channel openings in the region of the first connecting surface.
3 . The method of claim 2 , wherein the second mirror part comprises cooling channels comprising elongate cooling channel openings in the region of the second connecting surface.
4 . The method of claim 1 , wherein the cooling channel openings are parallel to one another.
5 . The method of claim 1 , wherein each cooling channel opening extends radially outwardly in a direction from a central location of at least one surface selected from the group consisting of the first connecting surface and the second connecting surface.
6 . The method of claim 1 , wherein there is a clear spacing between adjacent cooling channel openings, and the clear spacing is not more than 15 mm.
7 . The method of claim 1 , wherein:
the second mirror part further comprises auxiliary channels comprising elongate auxiliary channel openings in the region of the second connecting surface; and
the auxiliary channels of the second mirror part are not beneath the optical surface of the mirror.
8 . The method of claim 7 , wherein:
the first mirror part comprises cooling channels comprising elongate cooling channel openings in the region of the first connecting surface; and
the second mirror part comprises cooling channels comprising elongate cooling channel openings in the region of the second connecting surface.
9 . The method of claim 8 , wherein the cooling channel openings are parallel to one another.
10 . The method of claim 8 , wherein each cooling channel opening extends radially outwardly in a direction from a central location of at least one surface selected from the group consisting of the first connecting surface and the second connecting surface.
11 . The method of claim 1 , wherein the first connecting surface has a curvature.
12 . The method of claim 11 , wherein the second connecting surface has a curvature.
13 . The method of claim 1 , wherein the first connecting surface has a first curvature, the first curvature has different mean radii of curvature for different azimuthal angles, and the first curvature is non-rotationally symmetric.
14 . The method of claim 13 , wherein the second connecting surface has a second curvature, the second curvature has different mean radii of curvature for different azimuthal angles, and the second curvature is non-rotationally symmetric.
15 . The method of claim 1 , further comprising forming an optical surface on a surface of the second mirror part that lies opposite to the second connecting surface.
16 . The method of claim 1 , wherein:
the first mirror part comprises cooling channels comprising elongate cooling channel openings in the region of the first connecting surface;
the auxiliary channels of the first mirror part are fluidically separated from the cooling channels of the first mirror part;
the second mirror part comprises cooling channels comprising elongate cooling channel openings in the region of the second connecting surface;
the second mirror part further comprises auxiliary channels comprising elongate auxiliary channel openings in the region of the second connecting surface; and
the auxiliary channels of the second mirror part are fluidically separated from the cooling channels of the second mirror part.
17 . A method, comprising:
providing first and second mirror parts, the first mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a first connecting surface of the first mirror part, and/or the second mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a second connecting surface of the second mirror part;
bringing together the first and second mirror parts so that initially a partial region of the first connecting surface and a partial region of the second connecting surface come into contact and form a common contact surface; and
enlarging the common contact surface by continuing to bring the first and second mirror parts together in a direction along longitudinal extents of the cooling channel openings,
wherein:
the first connecting surface has a curvature;
the second connecting surface has a curvature; and
the method further comprises continuing to bring the first and second mirror parts together along a direction in which at least one surface selected from the group consisting of the first connecting surface and the second connecting surface has a mean radius of curvature with the smallest absolute value.
18 . A method, comprising:
providing first and second mirror parts, the first mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a first connecting surface of the first mirror part, and/or the second mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a second connecting surface of the second mirror part;
bringing together the first and second mirror parts so that initially a partial region of the first connecting surface and a partial region of the second connecting surface come into contact and form a common contact surface; and
enlarging the common contact surface by continuing to bring the first and second mirror parts together in a direction along longitudinal extents of the cooling channel openings,
wherein the first connecting surface has a first curvature, the first curvature has different mean radii of curvature for different azimuthal angles, and the first curvature is non-rotationally symmetric.
19 . A method, comprising:
providing first and second mirror parts, the first mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a first connecting surface of the first mirror part, and/or the second mirror part comprising cooling channels comprising elongate cooling channel openings in a region of a second connecting surface of the second mirror part;
bringing together the first and second mirror parts so that initially a partial region of the first connecting surface and a partial region of the second connecting surface come into contact and form a common contact surface; and
enlarging the common contact surface by continuing to bring the first and second mirror parts together in a direction along longitudinal extents of the cooling channel openings,
wherein:
the first mirror part further comprises auxiliary channels comprising elongate auxiliary channel openings in the region of the first connecting surface; and
the auxiliary channels of the first mirror part are fluidically separated from the cooling channels of the first and/or second mirror part.
20 . The method of claim 19 , wherein:
the second mirror part further comprises auxiliary channels comprising elongate auxiliary channel openings in the region of the second connecting surface; and
the auxiliary channels of the second mirror part are fluidically separated from the cooling channels of the first and/or second mirror part.