Light detection element
A light detection element includes a substrate on which a plurality of light reception units is arranged in pixel units, and a filter formed over a plurality of adjacent pixels on the substrate, the filter that cuts visible light and transmits infrared light.
1 . A light detection element, comprising:
a substrate including a plurality of light reception units arranged as pixel units, wherein the plurality of light reception units includes:
an effective pixel region in which effective pixels that detect infrared (IR) light are arranged;
a dummy pixel region in which dummy pixels are arranged provided on an outside of the effective pixel region; and
a light-shielded pixel region in which light-shielded pixels are arranged on an outside of the dummy pixel region,
wherein the dummy pixel region and the light-shielded pixel region are provided adjacent to at least one side of an outer periphery of the effective pixel region;
a metal film formed on a light-incident surface of the substrate including the light-shielded pixel region; and
an IR pass filter formed on the effective pixel region and the dummy pixel region, wherein the IR pass filter cuts visible light and transmits IR light.
2 . The light detection element according to claim 1 , further comprising a light-shielding organic film formed on at least a light-incident surface of the metal film, wherein the IR pass filter is further formed on the light-shielding organic film.
3 . The light detection element according to claim 2 , wherein the light-shielding organic film having the IR pass filter formed thereon is further formed on a portion of the light-incident surface of the substrate other than the effective pixel region, the dummy pixel region, and the light-shielded pixel region.
4 . The light detection element according to claim 3 , wherein the IR pass filter is further formed on at least a part of another portion of the light-incident surface of the substrate other than the portion of the light-incident surface on which the light-shielding organic film is formed.
5 . The light detection element according to claim 1 , further comprising a light-shielding organic film, wherein the IR pass filter is further formed on the metal film, and wherein the light-shielding organic film is formed on a light-incident surface of the IR pass filter opposite at least the light-incident surface of the metal film covering the light-shielded pixel region.
6 . The light detection element according to claim 5 , wherein the IR pass filter having the light-shielding organic film formed thereon is further formed on a portion of the light-incident surface of the substrate other than the effective pixel region, the dummy pixel region, and the light-shielded pixel region.
7 . The light detection element according to claim 6 , wherein the IR pass filter without having the light-shielding organic film formed thereon is further formed on at least a part of another portion of the light-incident surface of the substrate other than the portion of the light-incident surface of the substrate opposite the light-incident surface of the IR pass filter on which the light-shielding organic film is formed.
8 . The light detection element according to claim 1 , further comprising a microlens extending from a light-incident surface of the IR pass filter, wherein the microlens condenses light on the light reception units, and wherein the microlens is formed integrally with and of a same material as the IR pass filter.
9 . The light detection element according to claim 1 , wherein a part of the effective pixels of the effective pixel region is devoid of the IR pass filter being formed thereon.
10 . The light detection element according to claim 1 , further comprising: a light-shielding organic film formed on an outside of the effective pixel region, wherein the light-shielding organic film cuts IR light.
11 . The light detection element according to claim 10 , wherein the light-shielding organic film further cuts the visible light.
12 . The light detection element according to claim 11 , wherein the light-shielding organic film includes an organic resin composition in which a color material that cuts the visible light is dispersed in an organic resin.
13 . The light detection element according to claim 1 , further comprising a plurality of separation walls extending as a lattice between the effective pixels and the dummy pixels from the light-incident surface of the substrate at least partly into the IR pass filter.
14 . The light detection element according to claim 13 , wherein the plurality of separation walls extend from the light-incident surface of the substrate by an extent less than or equal to a thickness of the IR pass filter.
15 . The light detection element according to claim 13 , wherein each separation wall of the plurality of separation walls is formed of an organic resin portion and a metal film portion, wherein the metal film portion is positioned proximate to the light-incident surface of the substrate, and wherein the organic resin portion is stacked on the metal film portion.
16 . The light detection element according to claim 15 , wherein a refractive index of the organic resin portion is less than or equal to 1.6.
17 . The light detection element according to claim 13 , wherein the plurality of separation walls further extend from the light-incident surface of the substrate into the substrate to an extant less than or equal to a thickness of the substrate.
18 . A light detection element, comprising:
a substrate including a plurality of light reception units arranged as pixel units each having a photodiode, wherein the plurality of light reception units includes:
an effective pixel region in which effective pixels that detect infrared (IR) light are arranged;
a dummy pixel region in which dummy pixels are arranged provided on an outside of the effective pixel region; and
a light-shielded pixel region in which light-shielded pixels are arranged on an outside of the dummy pixel region,
wherein the dummy pixel region and the light-shielded pixel region are provided adjacent to a plurality of sides of an outer periphery of the effective pixel region;
a film formed on a light-incident surface of the substrate including the light-shielded pixel region; and
an IR pass filter formed on at least the effective pixel region and the dummy pixel region, wherein the IR pass filter cuts visible light and transmits IR light.
19 . The light detection element according to claim 18 , wherein a composition of IR pass filter includes an organic resin composition including a plurality of organic pigments having a high light-shielding property in a visible light region of red, green, and blue, and a low visible light-shielding property in an IR region, and wherein the organic resin composition of the IR pass filter further includes a near-IR absorbing dye.
20 . The light detection element according to claim 18 , further comprising a plurality of separation walls extending from the light-incident surface of the substrate at least partially into the IR pass filter, wherein the plurality of separation walls further extends from the light-incident surface of the substrate into the substrate between photodiodes of the effective pixels and the dummy pixels.