Thermocompression device and method of manufacturing display device using same
According to an embodiment, a thermocompression device for thermally compressing a semiconductor light emitting element array onto a wiring board may comprise: a lower head that supports the wiring board; an upper head that moves a donor including the semiconductor light emitting element array, and presses the semiconductor light emitting element array against a first region of the wiring board; a heating unit that heats at least one among the lower head and the upper head; a suction groove provided along an edge of the first region on the upper surface of the lower head; and a suctioning unit that communicates with the suction groove to suction the wiring board.
1 . A thermocompression device for thermally compressing a semiconductor light emitting element array to a wiring substrate, the thermocompression device comprising:
a lower head for supporting the wiring substrate;
an upper head for compressing the semiconductor light emitting element array to a first area of the wiring substrate using a donor having the semiconductor light emitting element array;
a heater for heating at least one of the lower head and the upper head;
a suction groove defined in an upper surface of the lower head along an edge of the first area; and
a suction portion in communication with the suction groove and configured to hold the wiring substrate by suction.
2 . The thermocompression device of claim 1 , wherein the suction portion is configured to hold the wiring substrate by suction while the semiconductor light emitting element array is thermally compressed to the first area.
3 . The thermocompression device of claim 2 , wherein the suction portion controls an intensity of holding the wiring substrate by suction in response to at least one of a heating temperature and a heating time of the heater and a compression pressure of the upper head.
4 . The thermocompression device of claim 1 , wherein the suction groove is defined to be spaced apart from the first area by a preset distance.
5 . The thermocompression device of claim 4 , wherein the suction groove is spaced apart from the first area by a distance of 3 times or more and 15 times or less of a pixel pitch of the semiconductor light emitting element array.
6 . The thermocompression device of claim 4 , wherein the first area corresponds to a rectangular area,
wherein the suction groove includes a straight section formed along the edge of the first area and a curvature section formed to surround a vertex of the first area.
7 . The thermocompression device of claim 1 , wherein the suction groove is located between pixels of the semiconductor light emitting element array thermally compressed to the wiring substrate.
8 . The thermocompression device of claim 7 , wherein the suction groove has a width smaller than a width of a pixel pitch of the semiconductor light emitting element array.
9 . The thermocompression device of claim 1 , wherein the suction groove includes a plurality of holes in communication with the suction portion.
10 . The thermocompression device of claim 9 , wherein the suction groove includes the plurality of holes at an equal distance.
11 . The thermocompression device of claim 1 , further comprising a roller assembly for moving the wiring substrate in a plane on the upper surface of the lower head.
12 . The thermocompression device of claim 11 , wherein the roller assembly moves the wiring substrate in the plane on the upper surface of the lower head such that a second area adjacent to the first area and having the same area size as the first area is defined to surround the suction groove.
13 . The thermocompression device of claim 1 , further comprising a sensing portion for sensing alignment of the wiring substrate with the suction groove.
14 . The thermocompression device of claim 1 , further comprising laser lift off (LLO) equipment for removing the donor from the semiconductor light emitting element array while the semiconductor light emitting element array is thermally compressed to the first area.
15 . A thermocompression device for thermally compressing a semiconductor light emitting element array to a wiring substrate, the thermocompression device comprising:
a first head for supporting the wiring substrate;
a second head for compressing the semiconductor light emitting element array to a first area of the wiring substrate using a donor having the semiconductor light emitting element array;
a heater for heating at least one of the first head and the second head;
a suction groove defined in an upper surface of the first head along an edge spaced apart from the first area; and
a suction portion in communication with the suction groove configured to hold the wiring substrate on the upper surface of the first head by sucking air.
16 . The thermocompression device of claim 15 , wherein the suction groove is defined to be spaced apart from an edge of the first area by a preset distance.
17 . The thermocompression device of claim 15 , wherein the suction groove is spaced apart from the first area by a distance of 3 times or more and 15 times or less of a pixel pitch of the semiconductor light emitting element array.
18 . The thermocompression device of claim 15 , wherein the suction groove includes a straight section formed along the edge of the first area and a curvature section formed to surround a vertex of the first area.
19 . The thermocompression device of claim 15 , wherein the suction groove includes a plurality of holes in communication with the suction portion.
20 . The thermocompression device of claim 15 , further comprising a roller assembly for moving the wiring substrate in a plane on the upper surface of the first head.