Deposition method
A method of selectively depositing a material on a substrate with a first and second surface, the first surface being different than the second surface. The depositing of the material on the substrate comprises: supplying a bulk precursor comprising metal atoms, halogen atoms and at least one additional atom not being a metal or halogen atom to the substrate; and supplying a reactant to the substrate. The bulk precursor and the reactant have a reaction with the first surface relative to the second surface to form more material on the first surface than on the second surface.
1 . A method of selectively depositing a metal on a substrate, the method comprising:
providing a substrate comprising a gap with a first surface at a bottom of the gap and a second surface at a top of the gap, the first surface being different than the second surface;
depositing the metal on the substrate by repeating the steps of:
supplying a bulk precursor comprising a transition metal atom, a halogen atom, and at least one chalcogen atom; and
supplying a reactant to the substrate, whereby the bulk precursor and the reactant have a reaction with the first surface relative to the second surface to form more material on the first surface than on the second surface to thereby fill the gap with the metal, and wherein the reactant comprises a silane.
2 . The method according to claim 1 , wherein the bulk precursor and the reactant have a reaction with the first surface relative to the second surface to form more than 5 times more material on the first surface than on the second surface.
3 . The method according to claim 1 , wherein the bulk precursor consists of one or more of the metal atoms, one or more of the halogen atoms, and the at least one chalcogen atom.
4 . The method according to claim 1 , wherein the transition metal atom is molybdenum.
5 . The method according to claim 1 , wherein the halogen atom is chloride.
6 . The method according to claim 1 , wherein the first surface comprises cobalt tungsten phosphide, titanium nitride, tantalum nitride, or aluminum.
7 . The method according to claim 1 , wherein the at least one chalcogen atom comprises oxygen.
8 . The method according to claim 1 , further comprising supplying a preparation precursor to the substrate, wherein the preparation precursor comprises the metal atom and/or the halogen atoms to clean the first surface.
9 . The method according to claim 1 , wherein the silane comprises silane (SiH 4 ), disilane (Si 2 H 6 ) or trisilane (Si 3 H 8 ) hydrogen atoms.
10 . A method of selectively depositing a transition metal on a substrate, the method comprising:
providing a substrate with a gap having a bottom comprising a first surface and a top comprising a second surface, the first surface being different than the second surface;
supplying a preparation precursor to the substrate; and
depositing the transition metal on the substrate by:
supplying a bulk precursor comprising a transition metal atom, a halogen atom, and at least one additional atom not being a metal or halogen atom; and
supplying a reactant to the substrate, whereby the bulk precursor and the reactant have a reaction with the first surface relative to the second surface to form more material on the first surface than on the second surface to thereby fill the gap with the transition metal, and
wherein the preparation precursor and the bulk precursor are different.
11 . The method according to claim 10 , wherein the first surface comprises a metal.
12 . The method according to claim 11 , wherein the metal comprises a transition metal.
13 . The method according to claim 12 , wherein the transition metal is selected form the group of titanium (Ti), tantalum (Ta), manganese (Mn), tungsten (W), Ruthenium (Ru), Cobalt (Co), and Cupper (Cu).
14 . The method according to claim 12 , wherein the first surface comprises a transition metal nitride.
15 . The method according to claim 10 , wherein the second surface comprises an oxide, nitride, or combination thereof.
16 . The method according to claim 10 , wherein the second surface is selected from the group of AlO x , SiO x , SiN, HfO 2 , ZrO 2 and SiON.
17 . The method according to claim 10 , wherein the second surface is a dielectric surface.
18 . The method according to claim 10 , wherein the preparation precursor comprises a transition metal and a halogen.
19 . The method according to claim 10 , wherein the bulk precursor and the preparation precursor comprise the same halogen.
20 . A method of selectively depositing a transition metal on a substrate, the method comprising:
providing a substrate with a gap having a bottom comprising a first surface and a top comprising a second surface, the first surface being different than the second surface;
pulsing a preparation precursor into a reaction chamber to remove contamination from the first surface; and
depositing the transition metal on the substrate by:
supplying a bulk precursor comprising a transition metal atom, a halogen atom, and at least one additional atom not being a metal or halogen atom; and
supplying a reactant to the substrate, whereby the bulk precursor and the reactant have a reaction with the first surface relative to the second surface to form more material on the first surface than on the second surface to thereby fill the gap with the transition metal.