Method of manufacturing semiconductor package using double adhesive layers
First and second layers of different adhesive materials are laminated to a carrier such that the second adhesive layer is attached to the carrier. The first adhesive layer is cured first. A semiconductor die is then placed on the cured first adhesive layer. An encapsulant layer is formed over at least a portion of the cured first adhesive layer while encapsulating the first semiconductor die. The second adhesive layer is cured after which the carrier is separated from the cured second adhesive layer.
1 . A method of manufacturing a semiconductor package, the method comprising:
laminating an adhesive sheet comprising first and second adhesive layers, to a carrier, wherein the second adhesive layer being coupled to the carrier;
curing the first adhesive layer to produce a cured first adhesive layer;
arranging a first semiconductor die on the cured first adhesive layer;
forming an encapsulant layer on a portion of the first cured first adhesive layer, while encapsulating the first semiconductor die;
curing the second adhesive layer to produce a cured second adhesive layer; and
separating the carrier from the cured second adhesive layer, wherein the cured second adhesive layer has an adhesive strength less than an adhesive strength of the second adhesive layer before curing, while the second adhesive layer curing.
2 . The method of claim 1 ,
wherein the first adhesive layer comprises a thermosetting adhesive, and
wherein the second adhesive layer comprises a photocurable adhesive.
3 . The method of claim 2 , wherein the first adhesive layer further comprises a filler.
4 . The method of claim 3 , wherein the first adhesive layer further comprises a colorant.
5 . The method of claim 2 , wherein the second adhesive layer further comprises a filler.
6 . The method of claim 5 , wherein the second adhesive layer further comprises a colorant.
7 . The method of claim 2 , wherein the step of curing the first adhesive layer comprises heating the thermosetting adhesive and the photocurable adhesive.
8 . The method of claim 2 , wherein the step of curing the second adhesive layer comprises irradiating light for curing to the photocurable adhesive.
9 . The method of claim 8 , wherein the light for curing comprises ultraviolet (UV).
10 . The method of claim 1 , further comprising forming redistribution layers electrically connected to the first semiconductor die over the encapsulant layer.
11 . The method of claim 10 , further comprising forming outer terminals electrically connected to the redistribution layers.
12 . The method of claim 1 , further comprising forming a vertical connector, which is connected to the first semiconductor die before forming the encapsulant layer.
13 . The method of claim 12 , wherein the vertical connector is formed as a bonding wire that has one end coupled to the first semiconductor die and extends substantially vertically from the one end.
14 . The method of claim 12 , wherein the encapsulant layer is formed to substantially encapsulate the vertical connector.
15 . The method of claim 1 , further comprising stacking a second semiconductor die over the first semiconductor die before forming the encapsulant layer.
16 . The method of claim 15 , wherein the second semiconductor die is stacked over the first semiconductor die with a first off-set, a portion of the second semiconductor die protruding from the first semiconductor die in a first direction.
17 . The method of claim 16 , further comprising stacking a third semiconductor die over the second semiconductor die with a second off-set, a portion of the third semiconductor die protruding from the second semiconductor die in a second direction opposite to the first direction.
18 . The method of claim 17 , wherein the first semiconductor die is attached to the cured first adhesive layer by a third adhesive layer.
19 . A method of manufacturing a semiconductor package, the method comprising:
forming first and second adhesive layers on a carrier;
first curing the first adhesive layer to produce a cured first adhesive layer;
arranging a first semiconductor die on the cured first adhesive layer;
forming an encapsulant layer on a portion of the cured first adhesive layer while encapsulating the first semiconductor die;
curing the second adhesive layer to produce a cured second adhesive layer; and separating the carrier from the cured second adhesive layer, wherein the cured second adhesive layer has an adhesive strength less than an adhesive strength of the second adhesive layer before curing, while the second adhesive layer curing.