Alloy microstructure formation for chamber components

1 . A chamber component comprising:

a body comprising a plurality of aluminum alloy compositions;

wherein a first portion of the body comprises a first aluminum alloy composition having a first grain size;

wherein a second portion of the body comprises a second aluminum alloy composition having a second grain size; and

wherein the first grain size of the first aluminum alloy composition is greater than the second grain size of the second aluminum alloy composition,

wherein a surface of the chamber component comprises an oxidation layer, wherein the oxidation layer comprises aluminum and magnesium in combination with at least one of boron (B), carbon (C), titanium (Ti), or a combination thereof.

2 . The chamber component of claim 1 , wherein the oxidation layer is on the second portion of the body.

3 . The chamber component of claim 1 , wherein the oxidation layer comprises aluminum, magnesium, boron and carbon.

4 . The chamber component of claim 1 , wherein the oxidation layer comprises aluminum, magnesium, and titanium.

5 . The chamber component of claim 1 , wherein the oxidation layer is magnesium rich including about 0.5 wt % to about 5 wt %, based on total weight of the oxidation layer.

6 . The chamber component of claim 1 , wherein the first portion of the body comprises a first layer of the chamber component having a thickness of about 10 μm to about 5 mm, and the second portion of the body comprises a second layer of the chamber component.

7 . The chamber component of claim 6 , wherein the second layer has a thickness of about 5 nm to about 5 mm.

8 . The chamber component of claim 1 , wherein the second portion of the body is on top of the first portion of the body.

9 . The chamber component of claim 1 , wherein the first grain size is in a range of about 1 μm to about 100 μm and the second grain size is in a range of about 0.5 nm to about 20 μm.

10 . The chamber component of claim 1 , wherein the second portion has conformal oxidation for corrosion resistance.

11 . A method comprising:

printing a first portion of a chamber component for a process chamber using a three dimensional printer, wherein the first portion of the chamber component comprises a first aluminum alloy composition having a first grain size of about 1 μm to about 100 μm;

printing a second portion of the chamber component using the three dimensional printer, wherein the second portion of the chamber comprises a second aluminum alloy composition having a second grain size of about 0.5 nm to about 20 μm,

wherein the first grain size of the first aluminum alloy composition is greater than the second grain size of the second aluminum alloy composition; and

printing an oxidation layer on the second portion of the chamber component, wherein the oxidation layer comprises aluminum and magnesium in combination with at least one of boron (B), carbon (C), titanium (Ti), or a combination thereof.

12 . The method of claim 11 , further comprising treating the chamber component.

13 . The method of claim 12 , wherein the treating occurs after printing the second portion.

14 . The method of claim 12 , wherein the treating comprises a thermal treatment, a high isosteric pressing treatment, or an annealing treatment.

15 . The method of claim 11 , wherein the oxidation layer has higher bonding energy to the first portion of the chamber component.

16 . The method of claim 11 , comprising preparing a powder comprising a plurality of particles and a coating on the plurality of particles, wherein the coating comprises at least one of nanoparticles or a sol-gel, wherein the powder is used to print the one or more first layers of the chamber component.