Direct manufacturing method for ceramics component with complex structure based on laser 3D printing and ceramic component with complex structure

1 . A direct manufacturing method for ceramics component with complex structure based on laser 3D printing, comprising:

S1, obtaining a three-dimensional model of a complex component to be fabricated, and devising a laser scanning path;

S2, placing a substrate in a gas-phase reactor chamber, followed by vacuuming and aerating vapor mixture of gas-phase precursors and carrier gas into the gas-phase reactor chamber;

S3, preheating the substrate to a specified temperature, turning on a laser and a thermal imager, the thermal imager controlling laser power in real time by generating a two-dimensional temperature map of a laser spot to realize temperature control a printing process;

S4, setting a distance between a flat-field focusing lens and the substrate and a laser scanning speed, wherein a deflection angle of a galvanometer is adjusted to control the laser spot to be deflected to each of scanning points on the laser scanning path in turn, so as to thermally decompose the gas-phase precursor and generate one of ceramic sheets on the substrate;

S5, after stacking the one of the ceramic sheets, controlling the substrate to lower a height corresponding to a thickness of the ceramic sheet, and then stacking a next one of the ceramic sheets repeatedly, until completing a fabrication of the ceramic component,

wherein in the S2, a pressure after vacuuming is below 10 Pa, and a pressure in the vacuum reactor chamber after aerating the vapor mixture ranges from 0.4 to 10 kPa,

wherein in the S2, a volume ratio of the gas phase precursor to the carrier gas in the vapor mixture is 1:(1 to 100),

wherein in the S4, the scanning speed of the laser is between 80 and 150 μm/s to decompose the gas-phase precursor and to avoid localized thicken of the ceramic sheet, and the distance between the flat field focusing lens and the substrate is between 30 and 45 cm.

2 . The direct manufacturing method as claimed in claim 1 , wherein in the S1, the three-dimensional model is saved in STL format, then slice the three-dimensional model through slicing software and save a file.

3 . The direct manufacturing method as claimed in according to claim 1 , wherein in the S2, the gas-phase precursor is selected from either a single one or a combination of methyltrichlorosilane, tetramethylsilane, silicon tetrachloride, ammonia, hexamethyldisilane, and trimethylamine borane.

4 . The direct manufacturing method as claimed in according to claim 1 , wherein in the S2, the carrier gas is selected from hydrogen or argon.

5 . The direct manufacturing method as claimed in according to claim 1 , wherein in the S3, the specified temperature of preheating the substrate is 200 to 400° C. cooler than a reaction temperature of the gas-phase precursor.

6 . The direct manufacturing method as claimed in according to claim 1 , wherein in the S4, a diameter of the laser spot is between 100 and 200 μm.

7 . A ceramic component with complex structure, manufactured by the direct manufacturing method for ceramics component with complex structure based on laser 3D printing as claimed in claim 1 .