Liquid discharge head substrate, liquid discharge head, liquid discharge apparatus, and manufacturing method of liquid discharge head substrate
A liquid discharge head substrate including liquid discharge elements arranged on a substrate along a first direction, opening portions provided in the substrate along the first direction, first wiring patterns passing between corresponding opening portions adjacent to each other and connected to corresponding liquid discharge elements, and second wiring patterns arranged along the first direction, is provided. The liquid discharge head substrate includes a connected region extending in a second direction crossing the first direction. In the connected region, each of the plurality of second wiring patterns has a wide portion which is thicker than a peripheral portion which is arranged in a peripheral region adjacent to the connected region, and the wide portions are arranged along the second direction.
1 . A liquid discharge head substrate comprising:
a substrate;
a plurality of liquid discharge elements arranged on the substrate along a first direction;
a plurality of opening portions provided in the substrate along the first direction;
a plurality of first wiring patterns passing between corresponding opening portions adjacent to each other among the plurality of opening portions and connected to corresponding liquid discharge elements among the plurality of liquid discharge elements; and
a plurality of second wiring patterns arranged along the first direction,
wherein the liquid discharge head substrate includes a connected region arranged between first wiring patterns adjacent to each other among the plurality of first wiring patterns and extending in a second direction crossing the first direction,
in the connected region, each of the plurality of second wiring patterns has a wide portion which is thicker than a peripheral portion which is arranged in a peripheral region adjacent to the connected region, and
the wide portions are arranged along the second direction.
2 . The substrate according to claim 1 , wherein one opening portion of the plurality of opening portions is arranged between the first wiring patterns adjacent to each other.
3 . The substrate according to claim 2 , wherein the connected region passes through a region formed by an opening portion between the first wiring patterns adjacent to each other among the plurality of opening portions and a portion between the opening portion and one wiring pattern of the first wiring patterns.
4 . The substrate according to claim 2 , wherein the plurality of first wiring patterns include a third wiring pattern arranged closest to one side in the first direction with respect to a center of the connected region in the first direction, and a fourth wiring pattern arranged closest to the other side in the first direction with respect to the center, and
letting DA be a distance from the center to the third wiring pattern, DB be a distance from the center to the fourth wiring pattern, D be a difference between the distance DA and the distance DB, and P be a pitch to arrange the plurality of liquid discharge elements along the first direction, a relationship given by D≤P holds.
5 . The substrate according to claim 1 , wherein the connected region passes through an opening portion among the plurality of opening portions.
6 . The substrate according to claim 1 , wherein at least a part of the plurality of first wiring patterns are arranged in the same wiring layer as the plurality of wide portions.
7 . The substrate according to claim 1 , wherein the plurality of wide portions are arranged in a wiring layer closest to the substrate.
8 . The substrate according to claim 1 , further comprising an insulating film between the substrate and the plurality of first wiring patterns, and
the insulating film is arranged to surround the plurality of opening portions and has a step difference in the second direction in the connected region.
9 . The substrate according to claim 1 , wherein each of the plurality of opening portions is a liquid recovery port configured to recover the liquid supplied to the plurality of liquid discharge elements,
the liquid discharge head substrate further comprises a plurality of liquid supply ports provided in the substrate along the first direction to supply the liquid to the plurality of liquid discharge elements, and
the plurality of liquid discharge elements are arranged between the plurality of opening portions and the plurality of liquid supply ports.
10 . The substrate according to claim 1 , wherein each of the plurality of opening portions is a liquid supply port configured to supply the liquid to the plurality of liquid discharge elements,
the liquid discharge head substrate further comprises a plurality of liquid recovery ports provided in the substrate along the first direction to recover the liquid supplied to the plurality of liquid discharge elements, and
the plurality of liquid discharge elements are arranged between the plurality of opening portions and the plurality of liquid recovery ports.
11 . The substrate according to claim 1 , further comprising a driving element configured to control each of the plurality of liquid discharge elements,
wherein each of the plurality of liquid discharge elements is connected to the driving element via a corresponding first wiring pattern among the plurality of first wiring patterns.
12 . The substrate according to claim 11 , further comprising a control circuit configured to control an operation of the driving element,
wherein the driving element and the control circuit are not arranged in the connected region.
13 . The substrate according to claim 1 , wherein a length of the substrate in the first direction exceeds 26 mm.
14 . A liquid discharge head comprising:
the liquid discharge head substrate according to claim 1 ; and
an orifice in which discharge of a liquid is controlled by the liquid discharge head substrate.
15 . A liquid discharge apparatus comprising:
the liquid discharge head according to claim 14 ; and
a unit configured to supply a driving signal for causing the liquid discharge head to discharge a liquid.