IP Library › Granted Patent US 12674229
Granted Patent B2
US 12674229 · App. 18/221,909 · Granted Jul 7, 2026

Metal mask

Inventors: Chi-Wei Lin (Hsinchu County, TW); Chi-Wei Lin (Hsinchu County, TW)
Assignee: DARWIN PRECISIONS CORPORATION
C23C14/042C23C14/24
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Quick Facts
Patent No.
US 12674229
App. No.
18/221,909
Granted
Jul 7, 2026
Kind
B2
Abstract

A metal mask includes a metal body and a plurality of through-holes. The metal body has a first surface and a second surface, and the plurality of through-holes penetrate the metal body and respectively have openings on the first surface and the second surface, where each of the through-holes has a first opening, a second opening, and a third opening. The first opening is formed on the first surface; the second opening is formed on the second surface and is smaller than the first opening; the third opening is located within the through-hole and between the first opening and the second opening, and the third opening is smaller than the second opening. Each of the through-holes further has a first length and a second length, and the first length is greater than the second length.

Claims (19)

1 . A metal mask, comprising:

a metal body having a first surface and a second surface; and a plurality of regions; wherein each of the regions comprises a plurality of through-holes penetrating the metal body and respectively having openings on the first surface and the second surface, wherein each of the through-holes has:

a first opening formed on the first surface; wherein the plurality of through-holes are spaced a first spacing between adjacent first openings on the first surface;

a second opening formed on the second surface and smaller than the first opening; wherein the plurality of through-holes are spaced a second spacing between adjacent second openings on the second surface; and

a third opening located within the through-hole and between the first opening and the second opening, the third opening being smaller than the second opening;

wherein each of the through-holes further has a first length and a second length, the first length is greater than the second length, and the plurality of through-holes are spaced in a direction of the second length; wherein the third opening of each of the through-holes has a first aperture in a direction of the first length and a second aperture in the direction of the second length, and a length of the second spacing is not less than a length of the second aperture.

2 . The metal mask according to claim 1 , wherein a length of the first aperture is at least three times the length of the second aperture.

3 . The metal mask according to claim 2 , wherein the first spacing and the second spacing are not zero.

4 . The metal mask according to claim 1 , wherein the metal body has a thickness in a penetration direction of the plurality of through-holes, and the thickness is not more than 50 μm; the second aperture of each of the through-holes is not greater than 80 μm.

5 . A metal mask according to claim 4 , wherein the thickness of the metal body is not less than 15 μm and the second aperture of each of the through-holes is not less than 15 μm.

6 . An evaporation jig, comprising:

a metal mask, comprising:

a metal body having a first surface and a second surface; and a plurality of regions; wherein each of the regions comprises a plurality of through-holes penetrating the metal body and respectively having openings on the first surface and the second surface, wherein each of the through-holes has:

a first opening formed on the first surface; wherein the plurality of through-holes are spaced a first spacing between adjacent first openings on the first surface;

a second opening formed on the second surface and smaller than the first opening; wherein the plurality of through-holes are spaced a second spacing between adjacent second openings on the second surface; and

a third opening located within the through-hole and between the first opening and the second opening, the third opening being smaller than the second opening;

wherein each of the through-holes further has a first length and a second length, the first length is greater than the second length, and the plurality of through-holes are spaced in a direction of the second length; wherein the third opening of each of the through-holes has a first aperture in a direction of the first length and a second aperture in the direction of the second length, and a length of the second spacing is not less than a length of the second aperture; and a frame comprising a first frame wall and a second frame wall, and the first frame wall and the second frame wall being located on opposite sides of the frame; wherein the metal mask has a first end and a second end in the direction of the first length, and the first end of the metal mask is connected to the first frame wall, and the second end is connected to the second frame wall to be fixed to the frame.

7 . An evaporation jig according to claim 6 , wherein the metal mask is further fixed to the frame and has a tension, and a direction of the tension is parallel to the direction of the first length.

8 . An evaporation jig according to claim 6 , wherein the metal mask further comprises a plurality of evaporation areas, each of the evaporation areas has the plurality of through-holes, and the evaporation areas are spaced apart in the direction of the first length.