Micro-electro-mechanical device
View Patent ↗A micro-electromechanical device includes a frame; a proof mass connected to the frame through a first mechanical link which allows pivoting of the proof mass to relative to the frame about a first axis of rotation parallel to a mean plane of the frame; and a lever for detecting pivoting of the mass, connected to the proof mass through a second mechanical link allowing rotation of the lever relative to the proof mass about a second axis. The second link includes two walls connecting perpendicularly to each other, one to the lever and the other to the proof mass, one of the walls being parallel to the second axis of rotation.
1 . A microelectromechanical device comprising:
a first frame,
a first proof mass, connected to the first frame through a first mechanical link which allows pivoting of the first proof mass to relative to the first frame about a first axis of rotation parallel to a mean plane of the first frame, and
a lever for detecting pivoting of the first proof mass, connected to the first proof mass through a second mechanical link allowing rotation of the lever relative to the first proof mass about a second axis parallel to the first axis,
wherein the second mechanical link comprises:
a first wall, perpendicular or substantially perpendicular to the second axis of rotation, and
a second wall, perpendicular to the mean plane of the frame and in parallel or substantially in parallel to the second axis of rotation,
the first wall and the second wall connecting to each other perpendicularly or substantially perpendicularly, the first wall connecting to the lever and the second wall connecting to the first proof mass,
wherein the device further comprises:
a second frame,
a second proof mass, connected to the second frame through a first additional link which allows pivoting of the second proof mass relative to the second frame about a first additional axis of rotation, parallel to the first axis of rotation, and wherein the second proof mass is also connected to the detection lever through a second additional link allowing rotation of the lever relative to the second proof mass about a second additional axis of rotation parallel to the first axis of rotation,
the lever being connected on one side to the first proof mass and on the other side to the second proof mass.
2 . The device according to claim 1 , wherein the first wall and the second wall are connected to each other to form a T.
3 . The device according to claim 1 , wherein:
the first wall extends:
from a first end, connected to the lever,
to a second end, also connected to the lever, and wherein
the second wall extends:
from a first end, through which the second wall connects to the first wall, in a median zone of the first wall, between the first end and the second end of the first wall,
to a second end through which the second wall connects to the proof mass.
4 . The device according to claim 3 , wherein the first end of the first wall connects to the lever via a connecting wall, which extends from this first end of the first wall to the lever, in parallel or substantially in parallel to the second wall.
5 . The device according to claim 4 , wherein the second end of the first wall is connected to the lever by means of another connecting wall which extends from this second end to the lever, in parallel or substantially in parallel to the second wall.
6 . The device according to claim 1 , wherein the first wall connects to the lever, and the second wall connects to the proof mass, and wherein the first wall is connected to the proof mass only through said second wall.
7 . The device according to claim 1 , wherein the second mechanical link further comprises:
a first additional wall, perpendicular or substantially perpendicular to the second axis of rotation, and
a second additional wall, in parallel or substantially in parallel to the second axis of rotation,
the first additional wall and the second additional wall connecting perpendicularly or substantially perpendicularly to each other, the first additional wall connecting to the lever and the first additional wall connecting to the proof mass.
8 . The device according to claim 1 , wherein the first wall has, along a direction parallel to the lever, a length greater than twenty times a width that the first wall has along a direction perpendicular to the lever.
9 . The device according to claim 1 , wherein the second wall has, in parallel to the second axis of rotation, a length greater than twenty times a width that the second wall has in a direction perpendicular to the second axis of rotation.
10 . The device according to claim 1 , further comprising a support and wherein the first frame and the second frame are capable of being translationally guided relative to the support along an axis of displacement which is parallel to a mean plane of the first frame and which is perpendicular to the first axis of rotation.
11 . The device according to claim 10 , further comprising an electromechanical actuation system configured to impose oscillation to each of the first and second frames along said axis of displacement, the displacement of the first frame relative to the support and the displacement of the second frame relative to the support having a same amplitude and directions opposite to each other.