Methods for selectively separating samples from substrate
Provided is a method for selectively separating samples from a substrate. The method includes: providing a substrate mounted with samples; selecting one or more desired target areas from areas of a layer of the samples; patterning an energy source so as to correspond to the target areas; and extracting energy from the patterned energy source, applying the extracted energy to the target areas such that target samples corresponding to the target areas are released from the substrate, and recovering the target samples.
1 . An apparatus for selectively separating samples from a substrate, comprising:
a stage adapted to support a substrate mounted with samples;
a laser light source unit from which laser light is extracted to separate target samples from the samples;
a light shape modulator configured to pattern the extracted laser light in accordance with a shape desired by a user; and
a sample recovery stage on which a substrate is located to accommodate the separated target samples,
wherein,
the light shape modulator is one selected from the group consisting of light shape modulators (LSMs), spatial light modulators (SLM), and acousto-optic modulators (AOMs), and
the light shape modulator is configured such that all of the target samples are being able to be released from the substrate at once by a single shot of the patterned laser light.
2 . The apparatus according to claim 1 , further comprising a guide light source unit adapted to irradiate a guide beam onto the same locations as locations on the substrate where the patterned laser light reaches.
3 . The apparatus according to claim 1 , the light shape modulator is further configured such that a target area to be separated by the single shot is larger than 1000 um 2 .