Physical quantity detector and physical quantity detection device
A physical quantity detector includes a base member, a movable part coupled to the base member, a physical quantity detection element which is attached to the base member and the movable part, and which detects a physical quantity caused by a stress according to a displacement of the movable part, a supporter configured to support the base member, and a weight bonded to a principal surface of the movable part, wherein the weight includes a main body overlapping the movable part and the supporter when viewed from a perpendicular direction of the principal surface, and a first protrusion which protrudes from the main body toward the movable part, and which is bonded to the movable part, and the main body and the first protrusion are disposed integrally with each other.
1 . A physical quantity detector comprising:
a base member;
a movable part coupled to the base member;
a physical quantity detection element which is attached to the base member and the movable part, and which detects a physical quantity caused by a stress according to
a displacement of the movable part;
a supporter configured to support the base member; and
a weight bonded to a principal surface of the movable part, wherein
the weight includes
a main body overlapping the movable part and the supporter when viewed from a perpendicular direction of the principal surface, and
a first protrusion which protrudes from the main body toward the movable part, and which is bonded to the movable part, and
the main body and the first protrusion are disposed integrally with each other.
2 . The physical quantity detector according to claim 1 , wherein
the supporter includes a first support arm and a second support arm, and
the first support arm and the second support arm overlap the main body when viewed from a perpendicular direction of the principal surface.
3 . The physical quantity detector according to claim 1 , wherein
the weight includes a second protrusion protruding toward a direction same as that of the first protrusion in a region which fails to overlap the supporter of the main body and the movable part when viewed from the perpendicular direction of the principal surface.
4 . The physical quantity detector according to claim 1 , wherein
the first protrusion includes a bonding surface to be bonded to the principal surface, and
the bonding surface is provided with a recess.
5 . The physical quantity detector according to claim 4 , wherein
the recess is a groove having an end portion connected to a side surface of the first protrusion.
6 . The physical quantity detector according to claim 1 , wherein
the first protrusion overlaps a centroid of the weight when viewed from the perpendicular direction of the principal surface.
7 . The physical quantity detector according to claim 1 , wherein
the base member and the movable part are coupled to each other via a constricted portion.
8 . A physical quantity detection device comprising:
the physical quantity detector according to claim 1 ; and
a processing circuit configured to calculate the physical quantity based on an output signal of the physical quantity detector.