Agglutinant for pellicles, pellicle frame with agglutinant layer, pellicle, exposure original plate with pellicle, exposure method, method for producing semiconductor, and method for producing liquid crystal display board
Provided is an agglutinant for pellicles that can reduce residues stuck onto an exposure original plate when a pellicle is peeled from the exposure original plate after exposure, in particular exposure using ArF as an exposure light source, and also provided are a pellicle, an exposure original plate with a pellicle, a method for regenerating an exposure original plate, and a peeling residue reduction method. An agglutinant for pellicles for bonding a pellicle to an exposure original plate, the agglutinant comprising an acrylic polymer as a base material, the acrylic polymer comprising, as monomer components: a (meth)acrylic acid alkyl ester having a C 4 or less alkyl group; and a (meth)acrylic acid ester having an ether bond.
1 . A pellicle frame with an agglutinant layer, comprising:
a pellicle frame; and
an agglutinant layer provided on one end face of the pellicle frame and obtained from an agglutinant for pellicle,
the agglutinant for pellicles comprising a reaction product of an acrylic polymer and a curing agent,
the acrylic polymer consisting of, as monomer components:
a (meth)acrylic acid alkyl ester having an alkyl group with 4 or less carbon atoms; and
a (meth)acrylic acid ester having an ether bond,
wherein an amount of the a (meth)acrylic acid ester having an ether bond is 40 to 60 mass % in a whole monomer components, and
the (meth)acrylic acid ester having an ether bond comprises at least one selected from the group consisting of 2-butoxyethyl (meth)acrylate, phenoxyethylene glycol (meth)acrylate, methoxydiethylene glycol (meth)acrylate, ethoxypolyethylene glycol (meth)acrylates, butoxypolyethylene glycol (meth)acrylates and phenoxypolyethylene glycol (meth)acrylates.
2 . The pellicle frame as claimed in claim 1 , wherein a ratio of the (meth)acrylic acid alkyl ester having an alkyl group is 20 to 59 mass % in the whole monomer components.
3 . The pellicle frame as claimed in claim 1 , wherein the (meth)acrylic acid alkyl ester having an alkyl group with 4 or less carbon atoms comprises a (meth)acrylic acid alkyl ester having a C 4 alkyl group.
4 . The pellicle frame as claimed in claim 1 , wherein the (meth)acrylic acid ester having an ether bond is a (meth)acrylic acid ester having an ethylene oxide group.
5 . The pellicle frame as claimed in claim 1 , wherein the agglutinant is used to produce an ArF pellicle.
6 . A pellicle comprising:
a pellicle film;
the pellicle frame comprising the agglutinant layer as claimed claim 1 .
7 . An exposure original plate with a pellicle, comprising:
an exposure original plate; and
the pellicle as claimed in claim 6 mounted on the exposure original plate.
8 . An exposure method comprising performing exposure using an exposure original plate with the pellicle as claimed in claim 6 .
9 . The exposure method as claimed in claim 8 , wherein an exposure light source is ArF.
10 . A method for producing a semiconductor, comprising a step of performing exposure using an exposure original plate with the pellicle as claimed in claim 6 .
11 . The method for producing a semiconductor as claimed in claim 10 , wherein an exposure light source is ArF.
12 . A method for producing a liquid crystal display board, comprising a step of performing exposure using an exposure original plate with the pellicle as claimed in claim 6 .
13 . The pellicle frame of claim 1 wherein the acrylic polymer is crosslinked.
14 . The pellicle frame of claim 1 , wherein a weight average molecular weight of the acrylic polymer is from 700,000 to 2.5 million.
15 . A pellicle frame with an agglutinant layer, comprising:
a pellicle frame, and
an agglutinant layer provided on one end face of the pellicle frame and obtained from an agglutinant for pellicle,
the agglutinant for pellicles comprising a reaction product of an acrylic polymer and a curing agent,
the acrylic polymer consisting of, as monomer components:
a (meth)acrylic acid alkyl ester having a C 4 alkyl group;
a (meth)acrylic acid ester having an ethylene oxide group; and
an unsaturated monomer having a carboxyl group,
wherein an amount of the (meth)acrylic acid ester having an ethylene oxide group is 40 to 60 mass % in a whole monomer components,
the (meth)acrylic acid ester having an ether bond comprises at least one selected from the group consisting of 2-butoxyethyl (meth)acrylate, phenoxyethylene glycol (meth)acrylate, methoxydiethylene glycol (meth)acrylate, ethoxypolyethylene glycol (meth)acrylates, butoxypolyethylene glycol (meth)acrylates and phenoxypolyethylene glycol (meth)acrylates, and
the unsaturated monomer having a carboxyl group comprises at least one selected from the group consisting of maleic acid, crotonic acid, and fumaric acid.
16 . The pellicle frame as claimed in claim 15 , wherein the agglutinant is used to produce an ArF pellicle.
17 . A pellicle comprising:
a pellicle film;
the pellicle frame; and
the agglutinant as claimed in claim 15 .
18 . An exposure original plate with a pellicle, comprising:
an exposure original plate; and
the pellicle as claimed in claim 17 mounted on the exposure original plate.
19 . An exposure method comprising performing exposure using an exposure original plate with the pellicle as claimed in claim 18 .
20 . A method for producing a semiconductor, comprising a step of performing exposure using an exposure original plate with the pellicle as claimed in claim 18 .