Structure, exposure apparatus, and article manufacturing method
The present invention provides a structure forming a part of an exposure apparatus that includes a stage configured to move on a base while holding an original, and a projection optical system configured to project a pattern image of the original onto a substrate, the structure comprising: a plate arranged between a moving path of the stage and the projection optical system; and a plurality of support members arranged extending along a lower surface of the plate and configured to support the plate by contacting the lower surface.
1 . A structure forming a part of an exposure apparatus that includes a stage configured to move on a base while holding an original, and a projection optical system configured to project a pattern image of the original onto a substrate, the structure comprising:
a plate arranged between a moving path of the stage and the projection optical system; and
a plurality of support members arranged extending along a lower surface of the plate and configured to support the plate by contacting the lower surface,
wherein each of the plurality of support members extends in a direction along the moving path of the stage, and
wherein each of the plurality of support members extends for a length at least equal to the length of the plate.
2 . The structure according to claim 1 , wherein
the plurality of support members are fixed to the base.
3 . The structure according to claim 2 , further comprising a fixing member connected to an end portion of each of the plurality of support members,
wherein the plurality of support members are fixed to the base via the fixing member.
4 . The structure according to claim 1 , wherein
the plurality of support members are arranged so as to sandwich an optical path of light passing through the original and entering the projection optical system.
5 . The structure according to claim 1 , wherein
two rails configured to guide movement of the stage are arranged on the base, and
the plate and the plurality of support members are arranged between the two rails.
6 . The structure according to claim 5 , wherein
the projection optical system is arranged extending through the base so as to have a protrusion portion protruding from the base toward a side of the original, and
the two rails are arranged on the base so as to sandwich the protrusion portion of the projection optical system.
7 . The structure according to claim 6 , wherein
the plurality of support members are fixed to the base via two fixing members arranged so as to sandwich the protrusion portion of the projection optical system in a direction in which the stage moves.
8 . The structure according to claim 1 , wherein
each of the plurality of support members is formed so as to extend along a direction in which the stage moves.
9 . The structure according to claim 8 , wherein
the plate is arranged such that a longitudinal direction of the plate matches the direction in which the stage moves.
10 . The structure according to claim 1 , wherein
each of the plurality of support members includes a groove portion into which the plate is fitted.
11 . The structure according to claim 10 , wherein
the plurality of support members are arranged so as to sandwich an optical path of light from the original, and
the groove portion is provided in a side surface of each of the plurality of support members on a side of the optical path.
12 . The structure according to claim 1 , wherein
each of the plurality of support members is formed such that an end portion is thicker than a central portion in a longitudinal direction of each support member.
13 . The structure according to claim 1 , wherein
the plate includes a window portion through which light from the original passes.
14 . The structure according to claim 1 , wherein
the plate is formed by a member that transmits light from the original.
15 . The structure according to claim 1 , wherein
the plate is divided into a plurality of partial regions.
16 . The structure according to claim 15 , wherein
the plate includes a window portion through which light from the original passes, and
the plurality of partial regions in the plate include a first partial region including a part of the window portion, and a second partial region including a remaining part of the window portion.
17 . The structure according to claim 1 , wherein
the plate is formed to be separatable from the plurality of support members.
18 . An exposure apparatus that exposes a substrate, the apparatus comprising:
a stage configured to move while holding an original;
a projection optical system configured to project a pattern image of the original onto the substrate; and
a structure defined in claim 1 .
19 . An article manufacturing method comprising:
exposing a substrate by using an exposure apparatus defined in claim 18 ;
processing the substrate having undergone the exposing; and
manufacturing an article from the substrate having undergone the processing.