Multifold micro emitting device, display apparatus having the same, method of manufacturing the multifold micro emitting device, and method of manufacturing the display apparatus
Provided are a multifold micro emitting device, a display apparatus, a method of manufacturing the multifold micro emitting device, and method of manufacturing the display apparatus. The multifold micro light emitting device includes a plurality of sub light emitting devices, a first electrode configured to apply a voltage to each of the plurality of sub light emitting devices, a second electrode configured to apply a common voltage to the plurality of sub light emitting devices, and a separator configured to separate the plurality of sub light emitting devices from each other, and the plurality of sub light emitting devices are configured as a single chip.
1 . A micro light emitting device comprising:
a plurality of sub light emitting devices comprising a first type semiconductor layer, an active layer provided on the first type semiconductor layer, and a second type semiconductor layer provided on the active layer, the active layer configured to emit light;
an insulator layer provided on a first surface of the second type semiconductor layer opposite to a second surface of the second type semiconductor layer contacting the active layer;
a plurality of first electrodes, each configured to apply a voltage to the first type semiconductor layer or the second type semiconductor layer of one of the plurality of sub light emitting devices;
a second electrode configured to apply a common voltage to the first type semiconductor layer or the second type semiconductor layer of each of the plurality of sub light emitting devices; and
a separator configured to separate the plurality of sub light emitting devices from each other,
wherein the plurality of sub light emitting devices are configured as a single chip, and
wherein the second electrode overlaps only a portion of the second type semiconductor layer in a plan view.
2 . The micro light emitting device of claim 1 , wherein the separator is configured to electrically and optically separate the plurality of sub light emitting devices.
3 . The micro light emitting device of claim 1 , wherein the separator comprises an insulator having a light absorption or reflection characteristic.
4 . The micro light emitting device of claim 1 , wherein the separator is provided to separate the second electrode into a plurality parts.
5 . The micro light emitting device of claim 1 , wherein the separator comprises a cross-shaped barrier rib structure.
6 . A display apparatus comprising:
a driving substrate comprising a driving circuit; and
a micro light emitting device bonded to the driving substrate,
wherein the micro light emitting device comprises:
a plurality of sub light emitting devices comprising a first type semiconductor layer, an active layer provided on the first type semiconductor layer, and a second type semiconductor layer provided on the active layer, the active layer configured to emit light;
an insulator layer provided on a first surface of the second type semiconductor layer opposite to a second surface of the second type semiconductor layer contacting the active layer;
a plurality of first electrodes, each configured to apply a voltage to the first type semiconductor layer or the second type semiconductor layer of one of the plurality of sub light emitting devices;
a second electrode configured to apply a common voltage to the first type semiconductor layer or the second type semiconductor layer of each of the plurality of sub light emitting devices; and
a separator configured to separate the plurality of sub light emitting devices from each other,
wherein the plurality of sub light emitting devices are configured as a single chip, and
wherein the second electrode overlaps only a portion of the second type semiconductor layer in a plan view.
7 . The display apparatus of claim 6 , further comprising:
a color conversion layer provided on an upper portion of each of the plurality of sub light emitting devices.
8 . The display apparatus of claim 6 , further comprising:
a plurality of pixels, each of the plurality of pixels comprises a blue sub pixel configured to display blue color, a green sub pixel configured to display green color, and a red sub pixel configured to display red color,
wherein each of the plurality of sub light emitting devices is configured to emit blue light, a green color conversion layer is provided on an upper portion of a sub light emitting device in the green sub pixel, and a red color conversion layer is provided on an upper portion of a sub light emitting device in the red sub pixel.
9 . The display apparatus of claim 6 , wherein the separator is configured to electrically and optically separate the plurality of sub light emitting devices.
10 . The display apparatus of claim 6 , wherein the separator comprises an insulator having a light absorption or reflection characteristic.
11 . The display apparatus of claim 6 , wherein the separator comprises a cross-shaped barrier rib structure.
12 . A method of manufacturing a micro light emitting device, the method comprising:
depositing a first type semiconductor layer, an active layer, and a second type semiconductor layer on a substrate;
forming an isolation pattern, a first electrode pattern, and a separator pattern by etching the second type semiconductor layer and the active layer;
providing an insulating layer on the second type semiconductor layer, the isolation pattern, the first electrode pattern, and the separator pattern;
forming an isolator by etching the insulating layer in a first region corresponding to the isolation pattern and a first type semiconductor layer;
separating the plurality of sub light emitting devices from each other by etching the insulating layer in a second region corresponding to the separator pattern and the first type semiconductor layer and forming a separator in the second region;
forming a second electrode pattern by etching the insulating layer on an upper portion of the second type semiconductor layer with respect to an upper portion of the separator;
forming a first electrode on the first electrode pattern and forming a second electrode on the second electrode pattern; and
separating the micro light emitting device comprising the plurality of sub light emitting devices into chip units through the isolator by removing the substrate,
wherein the second electrode overlaps only a portion of the second type semiconductor layer in a plan view.
13 . The method of claim 12 , wherein the separator is configured to electrically and optically separate the plurality of sub light emitting devices.
14 . The method of claim 12 , wherein the separator includes an insulator having a light absorption or reflection characteristic.
15 . The method of claim 12 , wherein the separator is provided to separate the second electrode into a plurality parts.
16 . The method of claim 12 , wherein the separator includes a cross-shaped barrier rib structure.
17 . A method of manufacturing a display apparatus, the method comprising:
forming a micro light emitting device including a plurality of sub light emitting devices having a first type semiconductor layer, an active layer provided on the first type semiconductor layer, and a second type semiconductor layer provided on the active layer, an insulator layer provided on a first surface of the second type semiconductor layer opposite to a second surface of the second type semiconductor layer contacting the active layer, a plurality of first electrodes, each configured to apply a voltage to the first type semiconductor layer or the second type semiconductor layer of one of the plurality of sub light emitting devices; a second electrode configured to apply a common voltage to the first type semiconductor layer or the second type semiconductor layer of each of the plurality of sub light emitting devices, and a separator configured to separate the plurality of sub light emitting devices from each other, wherein the plurality of sub light emitting devices are configured as a single chip;
transferring the micro light emitting device onto a driving substrate comprising a driving circuit using one of wet transfer, dry transfer, or pick-and-place transfer; and
forming a color conversion layer on an upper portion of the micro light emitting device,
wherein the second electrode overlaps only a portion of the second type semiconductor layer in a plan view.
18 . The method of claim 17 , wherein the display apparatus includes a plurality of pixels, each of the plurality of pixels includes a blue sub pixel configured to display blue color, a green sub pixel configured to display green color, and a red sub pixel configured to display red color, and
wherein each of the plurality of sub light emitting devices is configured to emit blue light, a green color conversion layer is provided on an upper portion of a sub light emitting device in the green sub pixel, and a red color conversion layer is provided on an upper portion of a sub light emitting device in the red sub pixel.
19 . The method of claim 17 , wherein the separator is configured to electrically and optically separate the plurality of sub light emitting devices.
20 . The method of claim 17 , wherein the separator includes an insulator having a light absorption or reflection characteristic.