Display apparatus and method of manufacturing the same

Inventors: Shinhyuk Yang (Yongin-si, KR); Jeehoon Kim (Yongin-si, KR); Donghan Kang (Yongin-si, KR); Junki Lee (Yongin-si, KR)

Assignee: Samsung Display Co., Ltd.

H10K59/1201 H10K59/131

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Quick Facts

Patent No.: US 12677534
App. No.: 18/153,968
Granted: Jul 7, 2026
Kind: B2

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Abstract

A display apparatus includes: a substrate including a display area, and a peripheral area outside the display area; a display element at the display area; and a pad at the peripheral area, the pad including: a first metal layer; a second metal layer on the first metal layer; a first metal oxide layer on the second metal layer, and in surface-contact with the second metal layer; and an oxide conductive layer on the first metal oxide layer, and in surface-contact with the first metal oxide layer.

Claims (37)

1 . A display apparatus comprising:

a substrate comprising a display area, and a peripheral area outside the display area;

a display element at the display area; and

a pad at the peripheral area, the pad comprising:

a first metal layer;

a second metal layer on the first metal layer;

a first metal oxide layer on the second metal layer, and in surface-contact with the second metal layer; and

an oxide conductive layer on the first metal oxide layer, and in surface-contact with the first metal oxide layer,

wherein the first metal oxide layer comprises an oxide of a metal included in the second metal layer.

2 . The display apparatus of claim 1 , wherein the oxide conductive layer comprises indium tin oxide (ITO).

3 . The display apparatus of claim 1 , wherein the oxide conductive layer comprises amorphous ITO.

4 . The display apparatus of claim 1 , wherein the first metal layer comprises titanium.

5 . The display apparatus of claim 1 , wherein the oxide conductive layer has a thickness of about 400 Å to about 850 Å.

6 . The display apparatus of claim 1 , wherein an area of a bottom surface of the second metal layer is greater than an area of an upper surface of the second metal layer, and a side surface of the second metal layer is inclined with respect to the bottom surface of the second metal layer.

7 . The display apparatus of claim 6 , wherein an angle between the bottom surface and the side surface of the second metal layer is about 30° to about 70°.

8 . The display apparatus of claim 1 , further comprising a thin film transistor at the display area, and electrically connected to the display element, the thin film transistor comprising an electrode having a layered structure that is the same as a layered structure of the pad.

9 . The display apparatus of claim 1 , wherein the display apparatus is one of a smartphone, a tablet, a laptop computer, a television, or a billboard.

10 . The display apparatus of claim 1 , wherein a side surface of the oxide conductive layer is inclined with respect to an upper surface of the first metal oxide layer, and comprises a portion that faces toward the upper surface of the first metal oxide layer while being spaced from the upper surface of the first metal oxide layer.

11 . A display apparatus comprising:

a substrate comprising a display area, and a peripheral area outside the display area;

a display element at the display area; and

a pad at the peripheral area, the pad comprising:

a first metal layer;

a second metal layer on the first metal layer;

a first metal oxide layer on the second metal layer, and in surface-contact with the second metal layer; and

an oxide conductive layer on the first metal oxide layer, and in surface-contact with the first metal oxide layer,

wherein a bottom surface of the oxide conductive layer facing the first metal oxide layer has an area that is less than an area of an upper surface of the oxide conductive layer, and

wherein a side surface of the oxide conductive layer is inclined with respect to an upper surface of the first metal oxide layer.

12 . The display apparatus of claim 11 , wherein an area of the upper surface of the first metal oxide layer is equal to the area of the bottom surface of the oxide conductive layer.

13 . The display apparatus of claim 12 , further comprising a second metal oxide layer on the second metal layer and located outside the first metal oxide layer.

14 . The display apparatus of claim 13 , wherein the first metal oxide layer and the second metal oxide layer are integrally formed as a single body.

15 . The display apparatus of claim 13 , wherein the first metal oxide layer has a thickness that is greater than a thickness of the second metal oxide layer.

16 . The display apparatus of claim 13 , wherein the first metal oxide layer and the second metal oxide layer comprise a same material as each other.

17 . The display apparatus of claim 13 , wherein the first metal oxide layer and the second metal oxide layer comprise an oxide of a metal included in the second metal layer.

18 . The display apparatus of claim 13 , wherein the second metal layer comprises copper, and the first metal oxide layer and the second metal oxide layer comprise copper oxide.

19 . The display apparatus of claim 11 , wherein the area of the upper surface of the oxide conductive layer is equal to or less than an area of an upper surface of the second metal layer.

20 . The display apparatus of claim 11 , wherein an angle between the bottom surface and the side surface of the oxide conductive layer is larger than 90° and less than or equal to 170°.