Sprayed article
A sprayed article is disclosed including a substrate and a sprayed coating deposited thereon and containing a rare earth oxyfluoride as main phase. Provided is a slurry for suspension plasma spraying, which is a spray material used for suspension plasma spraying in an atmosphere including an oxygen-containing gas, contains 5-40 mass % of rare earth fluoride particles having a maximum particle diameter (D100) of 12 μm or less, and contains one or more types of solvent selected from among water and organic solvents. A rare earth acid fluoride-containing sprayed film, in which process shift and particle generation hardly occur, can be stably formed on a base material by carrying out suspension plasma spraying in an atmosphere including an oxygen-containing gas. A spraying member provided with this sprayed film exhibits excellent corrosion resistance to halogen-based gas plasma.
1 . A sprayed article comprising a substrate and a sprayed coating deposited thereon and containing, as main phase, a crystal phase of at least one rare earth oxyfluoride selected from the group consisting of ResO 4 F 7 and Re 6 O 5 F 8 wherein Re is a rare earth element, wherein the sprayed coating has a Vickers hardness of 390 or more.
2 . The sprayed article of claim 1 wherein the rare earth element is at least one element selected from the group consisting of yttrium (Y), gadolinium (Gd), holmium (Ho), erbium (Er), ytterbium (Yb), and lutetium (Lu).
3 . The sprayed article of claim 1 wherein the sprayed coating is a mixture of a rare earth oxyfluoride, a rare earth oxide, and a rare earth fluoride.
4 . The sprayed article of claim 1 wherein the sprayed coating has a thickness of 10 mm to 150 mm.
5 . The sprayed article of claim 1 wherein the sprayed coating has a porosity of up to 1%.
6 . The sprayed article of claim 1 wherein, on X-ray diffractometry (XRD) analysis of the sprayed coating, the sum of the highest peaks of crystal phases assigned to the rare earth oxyfluoride is at least 50% based on the sum of the highest peaks of crystal phases of which the sprayed coating is composed.
7 . The sprayed article of claim 1 wherein, on X-ray diffractometry (XRD) analysis of the sprayed coating, the highest peak is a peak assigned to the rare earth oxyfluoride.
8 . The sprayed article of claim 1 wherein the sprayed coating further contains a rare earth fluoride.
9 . The sprayed article of claim 1 wherein the sprayed coating is formed by atmospheric suspension plasma spraying with feeding a slurry having rare earth fluoride particles with a volume basis maximum particle size (D100) of up to 12 μm dispersed in a solvent.
10 . The sprayed article of claim 1 including an undercoat pre-formed on the substrate.
11 . The sprayed article of claim 10 wherein the undercoat is a rare earth oxide layer of 50 to 300 μm thick.