Stage for heating and cooling object

1 . A stage which is configured to be installed inside a chamber for heating or cooling an object, the stage comprising:

a stage body having a mounting surface on which the object is mounted;

a heating unit; and

a cooling unit,

wherein the stage body further comprises:

a first groove into which the heating unit is inserted; and

a second groove into which the cooling unit is inserted,

wherein a heat-conductive medium is provided in a first gap between the first groove and the heating unit as well as in a second gap between the second groove and the cooling unit,

wherein the heat-conductive medium is a helium gas having a pressure of from 0.1 atmospheres to 100 atmospheres, both inclusive, and

wherein each of the first gap and the second gap is a hermetically sealed space isolated from an external atmosphere outside the stage, and the heat-conductive medium is contained within each of the first gap and the second gap.

2 . A vacuum device comprising the stage according to claim 1 as a susceptor.

3 . The vacuum device according to claim 2 , wherein the vacuum device is used to manufacture a semiconductor integrated circuit, a flat display panel, or a solar cell panel.

4 . A method for manufacturing a semiconductor integrated circuit, a flat display panel, or a solar cell panel using the vacuum device according to claim 2 .

5 . The stage according to claim 1 , wherein the helium gas has a pressure of from 2 atmospheres to 10 atmospheres, both inclusive.