FTIR-based sensor system for monitoring gas, vapor, or fluid emissions
An optical spectral sensing system that provides a full-range mid-IR FTIR based measurement for gases and vapors. The system features a small interferometer module which is integrated with a sample cell and solid-state source, that has an optimized optical path matched to the intended concentration ranges for the gas/vapor measurements. The concentration ranges targeted are from % level for high targeted gas concentrations, as provided by short-pathlength gas cells, to parts-per-million (ppm) and for certain gases high parts-per-billion (ppb) for low trace targeted gas concentrations, provided by long-pathlength gas cells. The optics and opto-mechanical components selected are able to provide a spectral range of 400 cm −1 to 5000 cm −1 , with nominal spectral resolutions of 4 cm −1 to 16 cm −1 , with the potential to extend the resolution from 2 cm −1 out to 32 cm −1 . The electronics are optimized to support both the range and spectral resolution based the use of a “universal” mid-IR detector.
1 . A Mid-infrared fourier transform (FT-IR) sensor system to sense and analyze flowing gas, vapor, or fluid streams in a spectral range comprising:
a compact infrared (IR) light source wherein the light source is configured in operation to emit electromagnetic radiation in the spectral range from 2 μm to 25 μm and to provide energy for a spectral process;
a gas cell to interface to the light source, the gas cell to receive incoming light from the light source; and
a moving beam-splitter assembly as a scanning element with a beam splitter and a fixed angle mirror, the scanning beam splitter is configured to split incoming light from the gas cell and to generate an output beam to direct on a detector.
2 . The Mid-infrared FT-IR sensor system of claim 1 , wherein the gas cell includes semiconductor processing gases to be sensed and analyzed.
3 . The Mid-infrared FT-IR sensor system of claim 1 , wherein the gas cell includes airborne pollutants to be sensed and analyzed for general environmental monitoring of the airborne pollutants.
4 . The Mid-infrared FT-IR sensor system of claim 1 , further comprising:
a plate to mount the beam splitter and the fixed angle mirror to move together in operation.
5 . The Mid-infrared FT-IR sensor system of claim 1 , wherein the light source is a compact emitter.
6 . The Mid-infrared FT-IR sensor system of claim 1 , wherein the gas cell is disposable.
7 . The Mid-infrared FT-IR sensor system of claim 1 , further comprising:
an electronic detector and control module that comprises an electronics circuit board and computer system for sensing and analysis of gases to identify and quantify.
8 . The Mid-infrared FT-IR sensor system of claim 1 , wherein the light source comprises a Micro-Electro-Mechanical System (MEMS) light source that is configured in operation to be pulsed.
9 . The Mid-infrared FT-IR sensor system of claim 1 , wherein the gas cell comprises a circular geometry to receive an IR beam from the compact infrared (IR) light source with the IR beam entering a cylindrical construction with opposing mirrors and the IR beam exits the cylindrical construction after multiple reimaging throughout a cell cavity of the gas cell to provide an extended optical pathlength of 5 meters.
10 . The Mid-infrared FT-IR sensor system of claim 1 , wherein the gas cell comprises a 50 mm pathlength gas cell that has a width of approximately 40 to 44 mm, a height of 30 to 34 mm, and a length of 94 to 98 mm.
11 . A method to sense and analyze gases, vapors, or fluids with a mid-infrared spectrometer system comprising:
emitting light with infrared (IR) radiation in a wavelength range from 2 μm to 25 μm with a compact IR light source;
transmitting incoming light from the light source through a gas cell for a gas cell optical path; and
moving a beam-splitter assembly as a scanning element with a beam splitter and a fixed angle mirror, the beam-splitter assembly is configured to split incoming light from the gas cell and to generate an output beam to direct on a detector, wherein the gas cell optical path is matched to target concentration ranges for gas, vapor, or fluid measurements.
12 . The method of claim 11 , wherein the gas cell includes semiconductor processing gases to be sensed and analyzed.
13 . The method of claim 11 , wherein the gas cell comprises a 50 mm pathlength gas cell to target monitoring of high component concentrations without absorption interference from background water vapor and carbon dioxide.
14 . The method of claim 11 , wherein the gas cell comprises an extended pathlength gas cell to target monitoring of low component concentrations in parts per million or parts per billion without absorption interference from background water vapor and carbon dioxide.
15 . A miniature optical sensor system to sense and analyze flowing gas, vapor, or fluid streams in a spectral range comprising:
a compact infrared (IR) light source wherein the light source is configured in operation to emit electromagnetic radiation in the spectral range from 2 μm to 25 μm and to provide energy for a spectral process;
a gas cell to receive incoming light from the light source; and
a moving beam-splitter assembly as a scanning element with a beam splitter and a mirror, the scanning beam splitter is configured to split incoming light from the gas cell and to generate an output beam to direct on a detector.
16 . The miniature optical sensor system of claim 15 , wherein the gas cell includes semiconductor processing gases to be sensed and analyzed.
17 . The miniature optical sensor system of claim 15 , further comprising:
a plate to mount the beam splitter and the mirror to move together in operation.
18 . The miniature optical sensor system of claim 15 , further comprising:
an electronic detector and control module that comprises an electronics circuit board and computer system for sensing and analysis of gases to identify and quantify.
19 . The miniature optical sensor system of claim 15 , wherein the gas cell comprises a circular geometry to receive an IR beam from the compact infrared (IR) light source with the IR beam entering a cylindrical construction with opposing mirrors and the IR beam exits the cylindrical construction after multiple reimaging throughout a cell cavity of the gas cell to provide an extended optical pathlength of 5 meters.
20 . The miniature optical sensor system of claim 15 , wherein the gas cell comprises a 50 mm pathlength gas cell that has a width of approximately 40 to 44 mm, a height of 30 to 34 mm, and a length of 94 to 98 mm.