Sensor element, gas sensor, and production method for sensor element
A sensor element ( 100 ) including: a detection element portion ( 300 ) provided with at least one cell ( 130, 140 ) having a solid electrolyte ( 105, 109 ) and a pair of electrodes ( 104, 106, 108, 110 ) disposed on the solid electrolyte; a measurement chamber ( 107 c ) faced by one of the electrodes; and a diffusion resistance portion ( 115 ) through which a gas to be measured is introduced from outside into the measurement chamber. A porous protection layer ( 21 ) is in direct contact with the diffusion resistance portion and covers the diffusion resistance portion. The porous protection layer contains ceramic particles which serve as a backbone, and has pores formed in gaps between the ceramic particles. A diameter ratio R represented by (an average diameter D1 (nm) of the pores/a particle diameter D2 (nm) at which an accumulated number of the ceramic particles accounts for 50%) is not greater than 100.
1 . A sensor element comprising:
a detection element portion provided with at least one cell having a solid electrolyte and a pair of electrodes disposed on the solid electrolyte;
a measurement chamber faced by one electrode of the pair of electrodes; and
a diffusion resistance portion through which a gas to be measured is introduced from outside the sensor element into the measurement chamber, wherein
the sensor element further comprises a porous protection layer that is in direct contact with the diffusion resistance portion and which at least covers the diffusion resistance portion,
the porous protection layer contains ceramic particles which serve as a backbone, and has pores formed in gaps between the ceramic particles,
a diameter ratio R, represented by an average diameter D1 (nm) of the pores/a particle diameter D2 (nm) at which an accumulated number of the ceramic particles accounts for 50%, is not greater than 100, and
D1 is greater than D2.
2 . The sensor element as claimed in claim 1 , wherein
the average diameter D1 of the pores is not greater than 15 μm, and/or the particle diameter D2 is not less than 150 nm.
3 . The sensor element as claimed in claim 1 , wherein
a maximum diameter M1 (μm) of the pores is less than twice the average diameter D1 (μm) of the pores.
4 . The sensor element as claimed in claim 1 , wherein
the diffusion resistance portion is a porous body.
5 . The sensor element as claimed in claim 4 , wherein
the porous body of the diffusion resistance portion is formed from alumina.
6 . The sensor element as claimed in claim 1 , wherein a porosity of the porous protection layer is 40 to 85%.
7 . A gas sensor comprising:
the sensor element as claimed in claim 1 configured to detect a concentration of a specific gas component in the gas to be measured; and
a housing holding the sensor element.
8 . A gas sensor comprising:
the sensor element as claimed in claim 2 configured to detect a concentration of a specific gas component in the gas to be measured; and
a housing holding the sensor element.
9 . A gas sensor comprising:
the sensor element as claimed in claim 3 configured to detect a concentration of a specific gas component in the gas to be measured; and
a housing holding the sensor element.
10 . A production method for producing a sensor element, the sensor element including
a detection element portion provided with at least one cell having a solid electrolyte and a pair of electrodes disposed on the solid electrolyte,
a measurement chamber faced by one electrode of the pair of electrodes, and
a diffusion resistance portion through which a gas to be measured is introduced from outside the sensor element into the measurement chamber,
the production method comprising:
a coating liquid preparation step of preparing a coating liquid in which ceramic particles and a pore-forming material are mixed;
an application step of applying the coating liquid so as to be in direct contact with the diffusion resistance portion and so as to cover the detection element portion, at an outer surface of the sensor element; and
a porous protection layer formation step which comprises drying and sintering the applied coating liquid and removing the pore-forming material, to form a porous protection layer that contains the ceramic particles which serve as a backbone and has pores formed at removed parts of the pore-forming material, wherein
in the coating liquid, a diameter ratio R, represented by an average diameter D3 (nm) of the pore-forming material/a particle diameter D2 (nm) at which an accumulated number of the ceramic particles accounts for 50%, is not greater than 100, and D3 is greater than D2.
11 . The production method as claimed in claim 10 , wherein said removing comprises burning out the pore-forming material by the drying and the sintering of the applied coating liquid, and said removed parts are burnt-out parts of the pore-forming material.
12 . The production method as claimed in claim 10 , wherein said removing comprises dissolving the pore-forming material, and said removed parts are dissolved parts of the pore-forming material.