Inspection apparatus and inspection method

1 . An inspection apparatus comprising:

a voltage application unit that applies voltage to a capacitor to perform charging;

a current measurement unit that continuously measures current of the capacitor during the charging; and

a computer processor that detects an anomaly of the capacitor based on a regression line derived from a logarithm of a measured value of the current in a determination time range during the charging and a logarithm of measurement timing of the current.

2 . The inspection apparatus as defined in claim 1 , wherein the computer processor detects an anomaly of the capacitor based on degree of agreement of the logarithm of a measured value of the current and the logarithm of measurement timing of the current with respect to the regression line.

3 . The inspection apparatus as defined in claim 1 , wherein the computer processor detects an anomaly of the capacitor based on a relation of the logarithm of a measured value of the current with respect to at least one of an upper limit and a lower limit of a current tolerance range defined according to the regression line over the determination time range.

4 . The inspection apparatus as defined in claim 1 , wherein the computer processor

detects an anomaly of the capacitor based on a first regression line derived from the logarithm of a measured value of the current and the logarithm of measurement timing of the current in a first determination time range during the charging, and

detects an anomaly of the capacitor based on a second regression line derived from the logarithm of a measured value of the current and the logarithm of measurement timing of the current in a second determination time range during the charging.

5 . The inspection apparatus as defined in claim 1 , wherein:

the voltage application unit

applies voltage to the capacitor in a first polarity to perform first polarity charging, and

applies voltage to the capacitor in a second polarity being an opposite polarity to the first polarity, after the first polarity charging to perform second polarity charging;

the current measurement unit

measures a first polarity current that is a current of the capacitor during the first polarity charging, and

measures a second polarity current that is a current of the capacitor during the second polarity charging; and

the computer processor

detects an anomaly of the capacitor based on a first polarity regression line derived from a logarithm of a measured value of the first polarity current in a first determination time range during the first polarity charging and a logarithm of measurement timing of the first polarity current, and

detects an anomaly of the capacitor based on a second polarity regression line derived from a logarithm of a measured value of the second polarity current in a second determination time range during the second polarity charging and a logarithm of measurement timing of the second polarity current.

6 . An inspection method comprising the steps of:

applying voltage to a capacitor to perform charging;

measuring current of the capacitor continuously during the charging;

detecting an anomaly of the capacitor based on a regression line derived from a logarithm of a measured value of the current and a logarithm of measurement timing of the current in a determination time range during the charging; and

separately discharging electronic components determined to have the anomaly and electronic components determined not to have an anomaly to the collection device via discharge paths.