Cyclic exposure scanning system having distributed multi-lens and method thereof
The present invention provides a cyclic exposure scanning system having distributed multi-lens and method thereof. The system includes a processor, a platform, an optical engine, a first optical imaging device, a second optical device and a light guide structure. By executing the method of the present disclosure by the system, the optical engine projects the first optical image and the second optical image respectively. The first optical image is guided to the first optical imaging device and the second optical image is sequentially guided to the second optical imaging device through the light guide structure. The first optical imaging device and the second optical imaging device receives and projects the first and second optical images onto the corresponding exposure areas, respectively. Such that efficiency and light source utilization may be significantly increased.
1 . A cyclic exposure scanning system having distributed multi-lens comprising:
a processor configured to perform computations according to a first optical pattern and a second optical pattern and output a corresponding control command;
a platform configured to carry a substrate, wherein the platform moves according to the control command;
an optical engine configured to project a corresponding first optical image and a corresponding second optical image according to the control command;
a first optical imaging device configured to project the first optical image onto a first exposure area of the substrate;
a second optical imaging device configured to project the second optical image onto a second exposure area of the substrate; and
a light guide structure configured to guide the first optical image to the first optical imaging device and guide the second optical image to the second optical imaging device according to the control command;
wherein during a first time interval within a cycle time, the control command directs the optical engine to project the first optical image, the first image is guided by the light guiding structure to the first optical imaging device, the first optical imaging device receives and projects the first optical image onto the first exposure area, during a second time interval within the cycle time, the control command directs the optical engine to project the second optical image, the second image is guided by the light guiding structure to the second optical imaging device, the second optical imaging device receives and projects the second optical image onto the second exposure area.
2 . The cyclic exposure scanning system having distributed multi-lens of claim 1 , wherein the platform comprises a first sub-platform and a second sub-platform, the substrate comprises a first sub-substrate and a second sub-substrate, the first sub-platform carries the first sub-substrate, the second sub-platform carries the second sub-substrate, the first sub-platform and the second sub-platform are moved respectively according to the control command.
3 . The cyclic exposure scanning system having distributed multi-lens of claim 2 , wherein the first sub-platform and the second sub-platform move to corresponding positions along corresponding predetermined paths, respectively.
4 . The cyclic exposure scanning system having distributed multi-lens of claim 3 , wherein the first sub-platform and the second sub-platform move at constant speeds differently from the predetermined positions toward a scanning axis.
5 . The cyclic exposure scanning system having distributed multi-lens of claim 4 , wherein the first time interval and the second time interval account for 1% to 99% of the cycle time.
6 . The cyclic exposure scanning system having distributed multi-lens of claim 1 , wherein the first optical pattern and the second optical pattern are completely identical, partially identical, or entirely different.
7 . The cyclic exposure scanning system having distributed multi-lens of claim 1 , wherein the optical engine comprises a light source device and a digital micromirror array, the light source device emits light according to the control command, the digital micromirror array is configured to open and close multiple micromirrors according to the control command, the opened micromirrors project the first optical image and the second optical image based on the light.
8 . The cyclic exposure scanning system having distributed multi-lens of claim 1 , wherein the first optical image and the second optical image are completely identical, partially identical, or entirely different.
9 . The cyclic exposure scanning system having distributed multi-lens of claim 1 , wherein the light guide structure has a rotating structure configured to rotate the light guide structure toward the first optical imaging device and the second optical imaging device according to the control commands.
10 . A cyclic exposure scanning method having distributed multi-lens comprising:
generating and outputting a control command by computing a first optical pattern and a second optical pattern by a processor;
moving a platform carrying a substrate to a corresponding predetermined position according to the control command;
guiding a projected first optical image to a first optical imaging device through a light guide structure according to the control command during a first time interval of a cycle time;
receiving and projecting the first optical image onto a first exposure area of the substrate by the first optical imaging device;
guiding a projected second optical image to a second optical imaging device through the light guide structure according to the control command during a second time interval of the cycle time; and
receiving and projecting the second optical image onto a second exposure area of the substrate by the second optical imaging device.
11 . The cyclic exposure scanning method having distributed multi-lens of claim 10 , wherein the platform comprises a first sub-platform and a second sub-platform, the substrate comprises a first sub-substrate and a second sub-substrate, the first sub-platform carries the first sub-substrate, the second sub-platform carries the second sub-substrate, the first sub-platform is moved to a first corresponding predetermined position and the second sub-platform is moved to a second corresponding predetermined position according to the control command.
12 . The cyclic exposure scanning method having distributed multi-lens of claim 11 , wherein the first sub-platform and the second sub-platform are moved to corresponding positions along corresponding predetermined paths, respectively, according to the control command.
13 . The cyclic exposure scanning method having distributed multi-lens of claim 12 , wherein the first sub-platform and the second sub-platform are moved at constant speeds differently from the predetermined positions toward a scanning axis.
14 . The cyclic exposure scanning method having distributed multi-lens of claim 10 , wherein the first optical pattern and the second optical pattern are completely identical, partially identical, or entirely different.
15 . The cyclic exposure scanning method having distributed multi-lens of claim 10 , wherein the first optical image and the second optical image are completely identical, partially identical, or entirely different.
16 . The cyclic exposure scanning method having distributed multi-lens of claim 10 , wherein the method further comprises:
rotating the light guide structure toward the first optical imaging device and the second optical imaging device through a rotating structure according to the control command.
17 . The cyclic exposure scanning method having distributed multi-lens of claim 11 , wherein the first time interval and the second time interval account for 1% to 99% of the cycle time.