IP Library › Granted Patent US 12681393
Granted Patent B2
US 12681393 · App. 18/015,155 · Granted Jul 14, 2026

System and method for conditioning optical apparatuses

Inventors: Oleg Viacheslavovich Voznyi (Eindhoven, NL); Bearrach Moest (Eindhoven, NL)
Assignee: ASML Netherlands B.V.
G03F7/70633G03F7/70558G03F7/70716G03F7/7085
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Quick Facts
Patent No.
US 12681393
App. No.
18/015,155
Granted
Jul 14, 2026
Kind
B2
Abstract

Disclosed is a stage system, which comprises a pre-exposure element, and to a method employing the pre-exposure element for conditioning an optical system. The pre-exposure element comprises a radiation receiving area at a surface of the stage system, wherein the radiation receiving area comprises at least one pre-exposure plate configured to receive radiation. The stage system comprises further a controller, wherein the controller is capable to control an optical parameter of the pre-exposure element, herewith controlling a portion of received radiation reflected by the pre-exposure element.

Claims (26)

1 . A stage system configured to receive radiation from an optical system, the stage system comprising:

a pre-exposure element disposed in a surface of the stage system and configured to condition the optical system, the pre-exposure element having a radiation receiving area at a top surface of the stage system,

wherein the radiation receiving area comprises at least one pre-exposure plate configured to receive radiation from the optical system that is incident at the top surface of the stage system; and

wherein the pre-exposure element is configured to receive a control signal to control an optical parameter of the pre-exposure element, thereby controlling a portion of the received radiation and reflecting the portion of the received radiation back to the optical system for the conditioning.

2 . The stage system of claim 1 , wherein the pre-exposure element further comprises an at least partially reflective optical member, and wherein the pre-exposure element is configured to receive a control signal to control the optical property of the pre-exposure element by controlling the reflectivity of the at least partially reflective optical member.

3 . The stage system of claim 2 , wherein the reflectivity of the at least partially reflective optical member is controlled by a rotation of the at least partially optical member around a point on a central axis at the at least partially reflective optical member.

4 . The stage system of claim 2 , wherein the at least partially reflective optical member is an electrotuneable optical element configured to change between a reflective state and a transmissive stage based on an electric signal.

5 . The stage system of claim 1 , wherein the pre-exposure element is purged with a purging fluid.

6 . The stage system of claim 1 , wherein the pre-exposure element comprises one or more detectors configured to measure a radiation intensity.

7 . The stage system of claim 1 , further comprising a plurality of pre-exposure plates, each pre-exposure plate having a reflectivity different from each other, wherein the optical parameter of the pre-exposure element is controlled by selecting one from the plurality of pre-exposure plates.

8 . The stage system of claim 7 , wherein at least one pre-exposure plate is an electrotuneable optical element configured to change between a reflective state and a transmissive state by means of an electric signal.

9 . The stage system of claim 1 , wherein the pre-exposure element comprises cooling lines.

10 . The stage system of claim 1 , wherein the pre-exposure element is arranged in a pocket at the surface of the stage system.

11 . The stage system of claim 1 , wherein the radiation receiving area has a surface at substantially a same height as the surface of the stage system.

12 . The stage system of claim 1 , further comprising a sealing member is provided to close a gap between the surface of the stage system and the pre-exposure element.

13 . The stage system of claim 1 , wherein the pre-exposure element is removable from the stage system.

14 . The stage system of claim 1 , wherein at least a portion of a surface of the pre-exposure element comprises a coating layer.

15 . An optical system comprising;

a stage system configured to receive radiation, comprising:

a pre-exposure element disposed in a surface of the stage system and configured to condition an optical system, the pre-exposure element having a radiation receiving area at a top surface of the stage system,

wherein the radiation receiving area comprises at least one pre-exposure plate configured to receive radiation; and

wherein the pre-exposure element is configured to receive a control signal to control an optical parameter of the pre-exposure element, thereby controlling a portion of the received radiation and reflecting the portion of the received radiation back to the optical system for the conditioning.

16 . A pre-exposure element for conditioning an optical system, comprising:

a radiation receiving area at a top surface of a stage system,

wherein the radiation receiving area comprises at least one pre-exposure plate configured to receive radiation from the optical system that is incident at the top surface of the stage system; and

wherein the pre-exposure element is configured to receive a control signal to control an optical parameter of the pre-exposure element, thereby controlling a portion of the received radiation and reflecting the portion of the received radiation back to the optical system for the conditioning.