IP Library › Granted Patent US 12682473
Granted Patent B2
US 12682473 · App. 18/259,749 · Granted Jul 14, 2026

Measurement system, inspection system, measurement device, measurement method, inspection method, and program

Inventors: Takako Onishi (Kyoto, JP); Takayuki Nishi (Kyoto, JP); Shimpei Fujii (Kyoto, JP); Hironori Kasahara (Kyoto, JP); Yuji Karita (Kyoto, JP); Hiroyuki Mori (Kyoto, JP)
Assignee: OMRON Corporation
G06T7/55G01B11/26G01B15/04G06T7/001G06T7/74G06T2207/10116G06T2207/20221G06T2207/30108
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Quick Facts
Patent No.
US 12682473
App. No.
18/259,749
Granted
Jul 14, 2026
Kind
B2
Abstract

A measurement system includes a first feature point data generator, a second feature point data generator, and a calculator. The first feature point data generator generates first feature point data from first image data or from first shape data. The first image data is obtained from imaging of a measurement target and includes a predetermined portion of the measurement target. The first shape data is generated based on the first image data. The second feature point data generator generates second feature point data from second image data different from the first image data or from second shape data. The calculator calculates a positional correspondence of the predetermined portion of the measurement target between the first image data and the second image data or between the first shape data and the second shape data based on the first feature point data and the second feature point data.

Claims (65)

1 . A measurement system for measuring a shape of at least a part of a measurement target, the measurement system comprising:

a first feature point data generator configured to generate first feature point data indicating a shape of a predetermined portion of the measurement target from first image data or from first shape data, the first image data being obtained from imaging of the measurement target and including the shape of the at least the part of the measurement target, the first shape data being generated based on the first image data;

a second feature point data generator configured to generate second feature point data indicating the shape of the predetermined portion of the measurement target from second image data or from second shape data, the second image data including the shape of the at least the part of the measurement target and being obtained differently from the first image data, the second shape data being generated based on the second image data;

a calculator configured to calculate a positional correspondence of the predetermined portion of the measurement target between the first image data and the second image data or between the first shape data and the second shape data based on the first feature point data and the second feature point data; and

a merged shape data generator configured to merge at least parts of the first image data and the second image data or at least parts of the first shape data and the second shape data based on the positional correspondence of the predetermined portion of the measurement target calculated by the calculator, and to generate merged shape data of the predetermined portion of the measurement target,

wherein the calculator includes an XY merging criterion generator and a Z merging criterion generator,

wherein the XY merging criterion generator is configured to determine a correspondence of horizontal positions of the measured object and generate a horizontal merging criterion for the first shape data and the second shape data,

wherein the Z merging criterion generator is configured to determine a correspondence of vertical positions of the measured object and generate a vertical merging criterion for the first shape data and the second shape data, and

wherein

the horizontal merging criterion is a transformation matrix that converts the first shape data into the second shape data, and

the vertical merging criterion is a height scale factor that converts a height in the second shape data to a height in the first shape data.

2 . The measurement system according to claim 1 , further comprising:

a first imager configured to image the measurement target; and

a second imager configured to image the measurement target.

3 . The measurement system according to claim 2 , wherein

the first imager is a visible light camera, and

the second imager is an X-ray camera.

4 . The measurement system according to claim 1 , wherein

the first feature point data includes at least one of coordinate data indicating the shape of the predetermined portion of the measurement target, binary image data indicating the shape of the predetermined portion of the measurement target, multivalued image data indicating the shape of the predetermined portion of the measurement target, or height inflection point data indicating a three-dimensional shape of the predetermined portion of the measurement target, and

the second feature point data includes at least one of coordinate data indicating the shape of the predetermined portion of the measurement target, binary image data indicating the shape of the predetermined portion of the measurement target, multivalued image data indicating the shape of the predetermined portion of the measurement target, or height inflection point data indicating the three-dimensional shape of the predetermined portion of the measurement target.

5 . The measurement system according to claim 1 , wherein

the measurement target is a board on which a component is mounted, and

the shape of the predetermined portion of the measurement target includes at least one of a shape of a wiring pattern on the board, a shape of a land on the board, a shape of an electrode in the component mounted on the board, or a shape of solder on the board.

6 . The measurement system according to claim 5 , wherein

the shape of the predetermined portion of the measurement target includes the shape of the wiring pattern on the board, and

the XY merging criterion generator obtains the transformation matrix by matching the respective wiring patterns in the first shape data and the second shape data via pattern matching, and selecting three or four matching points from ends or corners of the wiring pattern.

7 . The measurement system according to claim 5 , wherein

the shape of the predetermined portion of the measurement target includes the shape of solder on the board, and

the Z merging criterion generator determines N points from endpoints or angle inflection points within a common area of the solder regions in the first shape data and the second shape data, and based on this, determines a height scale factor that converts a height in the second shape data to a height in the first shape data.

8 . The measurement system according to claim 1 , wherein

the first image data is imaged with a visible light camera,

the second image data is X-ray image data, and

the merged shape data generator generates the merged shape data of the predetermined portion of the measurement target by using, with priority, the second image data or the second shape data for an area in a blind spot of the visible light camera in the first image data.

9 . An inspection system for inspecting a measurement target, the inspection system comprising:

the measurement system according to claim 1 ; and

a merged data inspector configured to determine whether the measurement target or a component included in the measurement target is acceptable based on the merged shape data generated by the merged shape data generator.

10 . A measurement apparatus for measuring a shape of at least a part of a measurement target, the measurement apparatus comprising:

a first feature point data generator configured to generate first feature point data indicating a shape of a predetermined portion of the measurement target from first image data or from first shape data, the first image data being obtained from imaging of the measurement target and including the shape of the at least the part of the measurement target, the first shape data being generated based on the first image data;

a second feature point data generator configured to generate second feature point data indicating the shape of the predetermined portion of the measurement target from second image data or from second shape data, the second image data including the shape of the at least the part of the measurement target and being obtained differently from the first image data, the second shape data being generated based on the second image data;

a calculator configured to calculate a positional correspondence of the predetermined portion of the measurement target between the first image data and the second image data or between the first shape data and the second shape data based on the first feature point data and the second feature point data; and

a merged shape data generator configured to merge at least parts of the first image data and the second image data or at least parts of the first shape data and the second shape data based on the positional correspondence of the predetermined portion of the measurement target calculated by the calculator, and to generate merged shape data of the predetermined portion of the measurement target,

wherein the calculator includes an XY merging criterion generator and a Z merging criterion generator,

wherein the XY merging criterion generator is configured to determine a correspondence of horizontal positions of the measured object and generate a horizontal merging criterion for the first shape data and the second shape data,

wherein the Z merging criterion generator is configured to determine a correspondence of vertical positions of the measured object and generate a vertical merging criterion for the first shape data and the second shape data, and

wherein

the horizontal merging criterion is a transformation matrix that converts the first shape data into the second shape data, and

the vertical merging criterion is a height scale factor that converts a height in the second shape data to a height in the first shape data.

11 . A measurement method for measuring a shape of at least a part of a measurement target, the measurement method comprising:

generating first feature point data indicating a shape of a predetermined portion of the measurement target from first image data or from first shape data, the first image data being obtained from imaging of the measurement target and including the shape of the at least the part of the measurement target, the first shape data being generated based on the first image data;

generating second feature point data indicating the shape of the predetermined portion of the measurement target from second image data or from second shape data, the second image data including the shape of the at least the part of the measurement target and being obtained differently from the first image data, the second shape data being generated based on the second image data;

calculating a positional correspondence of the predetermined portion of the measurement target between the first image data and the second image data or between the first shape data and the second shape data based on the first feature point data and the second feature point data;

merging at least parts of the first image data and the second image data or at least parts of the first shape data and the second shape data based on the calculated positional correspondence of the predetermined portion of the measurement target; and

generating merged shape data of the predetermined portion of the measurement target,

wherein calculating the positional correspondence includes determining a correspondence of horizontal positions of the measured object and generating a horizontal merging criterion for the first shape data and the second shape data, and determining a correspondence of vertical positions of the measured object and generating a vertical merging criterion for the first shape data and the second shape data, and

wherein

the horizontal merging criterion is a transformation matrix that converts the first shape data into the second shape data, and

the vertical merging criterion is a height scale factor that converts a height in the second shape data to a height in the first shape data.

12 . The measurement method according to claim 11 , wherein

the first image data is imaged with a visible light camera,

the second image data is X-ray image data, and

the generating the merged shape data includes generating merged shape data of the predetermined portion of the measurement target using, with priority, the second image data or the second shape data for an area in a blind spot of the visible light camera in the first image data.

13 . An inspection method for a measurement target, the inspection method comprising:

obtaining merged shape data of a predetermined portion of a measurement target generated in the generating the merged shape data according to claim 11 ; and

determining whether the measurement target or a component included in the measurement target is acceptable based on the obtained merged shape data of the predetermined portion of the measurement target.

14 . A non-transitory computer readable medium storing a program for causing a computer to perform operations included in the method according to claim 11 .