Plasma chemical vapor deposition (CVD) apparatus and film forming method
An apparatus includes a process chamber, a stage, a shower head, a plasma generation circuit, and a partition wall. The stage places a substrate. The shower head faces the stage and supplies process gas to the substrate. The plasma generation circuit generates plasma between the shower head and the stage. The partition wall isolates a first space between the shower head and the stage from a second space on a side of the shower head opposite to a side of the stage with a predetermined first gap, such that a pressure in the second space is higher than a pressure in the first space in a state where the process gas is supplied from the shower head, a gas different from the process gas is supplied to the second space, and an inside of the first space is evacuated.
1 . A plasma chemical vapor deposition (CVD) apparatus comprising:
a process chamber;
a stage disposed in the process chamber and configured to place a substrate;
a shower head facing the stage in the process chamber and configured to supply process gas to the substrate;
a plasma generation circuit configured to generate plasma between the shower head and the stage with the shower head and the stage respectively serving as electrodes; and
a first partition wall isolating a first space between the shower head and the stage in the process chamber from a second space in the process chamber on a side of the shower head opposite to a side of the stage with a predetermined first gap, such that a pressure in the second space is higher than a pressure in the first space in a state where the process gas is supplied from the shower head, a gas different from the process gas is supplied to the second space, and an inside of the first space is evacuated.
2 . The plasma chemical vapor deposition (CVD) apparatus according to claim 1 , wherein
the first partition wall is fixed to a side wall of the process chamber to form the first gap between the shower head and the first partition wall.
3 . The plasma chemical vapor deposition (CVD) apparatus according to claim 2 , wherein
no gap is formed between the first partition wall and the side wall of the process chamber.
4 . The plasma chemical vapor deposition (CVD) apparatus according to claim 2 , further comprising:
a plurality of the shower heads in the process chamber;
wherein the first gap is formed between the first partition wall and each of the plurality of shower heads.
5 . The plasma chemical vapor deposition (CVD) apparatus according to claim 1 , wherein
the process chamber has an outlet on the first space side among the first space and the second space.
6 . The plasma chemical vapor deposition (CVD) apparatus according to claim 1 , wherein
the first partition wall is formed of an insulator.
7 . The plasma chemical vapor deposition (CVD) apparatus according to claim 1 , further comprising:
a second partition wall isolating the first space from a third space in the process chamber on a side of the stage opposite to a side of the showerhead with a predetermined second gap, such that a pressure in the third space is higher than the pressure in the first space in a state where the process gas is supplied from the shower head, the gas different from the process gas is supplied to the second space and the third space, and the inside of the first space is evacuated.
8 . The plasma chemical vapor deposition (CVD) apparatus according to claim 7 , wherein
the process chamber has an outlet, and
in the second partition wall, the second gap is formed in a direction displaced from a direction from a center of the third space toward the outlet when viewed from above.
9 . The plasma chemical vapor deposition (CVD) apparatus according to claim 8 , wherein
the outlet is provided in a fourth space in the process chamber that is on the side of the stage opposite to the side of the shower head and on a side of an outer circumference of the third space.
10 . The plasma chemical vapor deposition (CVD) apparatus according to claim 7 , wherein
the second partition wall is formed of an insulator.
11 . A plasma chemical vapor deposition (CVD) apparatus comprising:
a process chamber having an outlet;
a stage disposed in the process chamber and configured to place a substrate;
a shower head facing the stage in the process chamber and configured to supply process gas to the substrate;
a plasma generation circuit configured to generate plasma between the shower head and the stage with the shower head and the stage respectively serving as electrodes; and
a partition wall which isolates a first space between the shower head and the stage in the process chamber from a second space on a side of the stage opposite to a side of the shower head in the process chamber with a predetermined gap, and in which a gas different from the process gas is supplied to the second space, and the gap is locally formed in a direction displaced from a direction from a center of the second space toward the outlet when viewed from above.
12 . The plasma chemical vapor deposition (CVD) apparatus according to claim 11 , wherein
the partition wall is configured such that a pressure in the second space is higher than a pressure in the first space in a state where the process gas is supplied from the shower head, the gas different from the process gas is supplied to the second space, and an inside of the first space is evacuated.
13 . The plasma chemical vapor deposition (CVD) apparatus according to claim 11 , wherein
the outlet is provided in a third space in the process chamber that is on the side of the stage opposite to the side of the shower head and on a side of an outer circumference of the second space.
14 . The plasma chemical vapor deposition (CVD) apparatus according to claim 11 , wherein
the partition wall has a cylindrical structure having a notch formed in a part of an upper surface, and
the stage is in contact with the partition wall.
15 . The plasma chemical vapor deposition (CVD) apparatus according to claim 11 , wherein
the partition wall includes a cylindrical main body having an inner diameter dimension larger than an outer diameter dimension of the stage and having an opening in a part of a side surface, and an annular plate disposed on the cylindrical main body to be in contact with a side surface of the stage.
16 . The plasma chemical vapor deposition (CVD) apparatus according to claim 15 , wherein
the cylindrical main body surrounds a lower portion of the side surface of the stage with a gap, and
the annular plate is in contact with an upper portion of the side surface of the stage without a gap.
17 . The plasma chemical vapor deposition (CVD) apparatus according to claim 11 , wherein
the partition wall is formed of an insulator.
18 . A film forming method comprising:
supplying process gas to a first space between a stage on which a substrate is placed and a shower head which is disposed at a position facing the stage and from which the process gas is introduced;
forming a state in which a pressure in a second space in a process chamber on a side of the shower head opposite to a side of the stage is higher than a pressure in the first space in the process chamber; and
forming a predetermined film on the substrate by generating plasma between the shower head and the stage by using the shower head and the stage respectively as electrodes in the state where the pressure in the second space is higher than the pressure in the first space.
19 . The film forming method according to claim 18 , further comprising
supplying inert gas to the second space.
20 . The film forming method according to claim 19 , wherein
a partition wall is provided between the first space and the second space in the process chamber with a predetermined gap, and the inert gas supplied to the second space flows to the first space side through the gap.