Irradiation apparatus of electromagnetic waves
An electromagnetic wave irradiation apparatus includes a housing having a hollow portion formed inside and an open lower side; a coil-type antenna with a spiral shape in the hollow portion and configured to emit electromagnetic waves; a window coupled to the open lower side of the housing; and a capacitance variation measurement unit configured to measure a capacitance variation of the coil-type antenna. The electromagnetic wave irradiation apparatus may further include a cooling unit configured to cool at least one of the window or the housing. The capacitance variation measurement unit includes a capacitance sensor with one side connected to the coil-type antenna and the other side connected to the ground.
1 . An electromagnetic wave irradiation apparatus comprising:
a housing having a hollow portion formed inside and an open lower side;
a coil-type antenna with a spiral shape in the hollow portion and configured to emit electromagnetic waves; and
a capacitance variation measurement unit configured to measure a capacitance variation of the coil-type antenna,
wherein the capacitance variation measurement unit comprises a capacitance sensor with one side connected to the coil-type antenna and an other side connected to a ground, and
wherein the ground connected to the capacitance sensor is different from a ground of a radio frequency (RF) oscillator configured to supply power to the coil-type antenna.
2 . The electromagnetic wave irradiation apparatus of claim 1 , wherein the coil-type antenna has a horn shape, with one side connected to the housing and a radius of a bottom surface gradually widening towards an other side.
3 . The electromagnetic wave irradiation apparatus of claim 2 , wherein an inclination angle with respect to the bottom surface of the coil-type antenna decreases from one side to an other side.
4 . The electromagnetic wave irradiation apparatus of claim 1 , wherein the coil-type antenna is connected to the housing on one side and extends downward on an other side to form a spiral-shaped curve on a plane.
5 . The electromagnetic wave irradiation apparatus of claim 1 , wherein at least a portion of the coil-type antenna is arranged on a same plane.
6 . The electromagnetic wave irradiation apparatus of claim 1 , wherein a shape of a bottom surface of the housing is one of circular, oval, rectangular, or square shapes and the coil-type antenna is shaped to match the shape of the bottom surface of the housing.
7 . The electromagnetic wave irradiation apparatus of claim 1 , further comprising:
a window coupled to the open lower side of the housing; and
a cooling unit configured to cool at least one of the window or the housing.
8 . The electromagnetic wave irradiation apparatus of claim 7 , wherein the cooling unit comprises a Peltier element with one side in contact with an upper side of the housing.
9 . The electromagnetic wave irradiation apparatus of claim 8 , wherein the cooling unit comprises
a heat exchange unit in contact with an other side of the Peltier element;
a pump connected to the heat exchange unit to control a coolant flowing through the heat exchange unit; and
a heat dissipation unit connected to the pump to discharge heat from the coolant.
10 . The electromagnetic wave irradiation apparatus of claim 1 , wherein either of the ground of the capacitance sensor or the ground of the RF oscillator is connected to the housing.