Radiation-emitting semiconductor chip, and method for producing same
The invention relates to a radiation-emitting semiconductor chip having the following features: —a semiconductor body including an active region which, during operation, generates electromagnetic radiation and is arranged in a resonator, —at least one recess in the semiconductor body, which recess completely penetrates the active region, wherein—the recess has a first lateral face and a second lateral face opposite the first lateral face, and—the first lateral face has a first coating which specifies a reflectivity for the electromagnetic radiation of the active region, and/or—the second lateral face has a second coating which specifies a reflectivity for the electromagnetic radiation of the active region. The invention further relates to a method for producing such a semiconductor chip.
1 . A radiation-emitting semiconductor chip comprising:
a semiconductor body comprising an active region which, during operation, generates electromagnetic radiation and is arranged in a resonator,
at least one cutout in the semiconductor body which completely penetrates through the active region,
wherein
the cutout has a first side surface and a second side surface opposite the first side surface, and
the first side surface has a first coating, which predefines a reflectivity for the electromagnetic radiation of the active region, and/or
the second side surface has a second coating, which predefines a reflectivity for the electromagnetic radiation of the active region,
wherein
a second layer sequence is embodied in identical fashion to the first layer sequence apart from an additional symmetry breaking layer, or
a first layer sequence is embodied in identical fashion to the second layer sequence apart from an additional symmetry breaking layer.
2 . The radiation-emitting semiconductor chip as claimed in claim 1 , wherein
the first coating is embodied as the first layer sequence having a multiplicity of individual layers, and/or
the second coating is embodied as the second layer sequence having a multiplicity of individual layers.
3 . The radiation-emitting semiconductor chip as claimed in claim 1 , wherein the first coating and the second coating are embodied differently from one another.
4 . The radiation-emitting semiconductor chip as claimed in claim 2 , wherein
the first layer sequence and the second layer sequence are formed from individual layers of identical materials and with an identical succession, and
a thickness of the first layer sequence in the region of the first side surface and a thickness of the second layer sequence in the region of the second side surface are different from one another.
5 . The radiation-emitting semiconductor chip as claimed in claim 4 , wherein
the thickness of the first layer sequence in the region of the first side surface and the thickness of the second layer sequence in the region of the second side surface are in a ratio of greater than 1:1 and less than or equal to 1:20.
6 . The radiation-emitting semiconductor chip as claimed in claim 1 , wherein
the semiconductor body comprises a first segment and a second segment, the first segment being electrically and/or optically isolated from the second segment by the cutout.
7 . The radiation-emitting semiconductor chip as claimed in claim 6 , wherein the first segment comprises the resonator and the second segment comprises a modulation element configured to modulate an intensity of the electromagnetic radiation of the active region.
8 . The radiation-emitting semiconductor chip as claimed in claim 7 , wherein
the first segment and the second segment are electrically isolated from one another, and
the second segment comprises an electrical switching element configured to switch on and switch off the radiation-emitting semiconductor chip.
9 . The radiation-emitting semiconductor chip as claimed in claim 6 , wherein the semiconductor body has at least one of the first segment, the second segment, and/or a third segment comprises one or more of the following elements: photodiode, passive waveguide, active waveguide, beam splitter, beam combiner, lens, wavelength-selective element, phase shifting elements, frequency doubler, taper, amplifier, converter, transistor.
10 . The radiation-emitting semiconductor chip as claimed in claim 1 , wherein a refractive index progression along a main extension direction of the semiconductor chip proceeding from the first side surface of the cutout as far as the second side surface of the cutout is embodied in nonperiodic fashion.
11 . An array comprising at least two radiation-emitting semiconductor chips as claimed in claim 1 .
12 . A method for producing a radiation-emitting semiconductor chip comprising:
providing a semiconductor body comprising an active region which, during operation, generates electromagnetic radiation, and is arranged in a resonator,
producing at least one cutout in the semiconductor body which completely penetrates through the active region, the cutout having a first side surface and a second side surface, the first side surface being arranged opposite the second side surface, and
applying a first coating, which predefines a reflectivity for the electromagnetic radiation of the active region, to the first side surface, and/or
applying a second coating, which predefines a reflectivity for the electromagnetic radiation of the active region, to the second side surface,
wherein before the first coating and the second coating are applied, a shading element is applied to a region of a main surface of the semiconductor body which directly adjoins the first side surface of the cutout, such that a thickness of the first coating in the region of the first side surface is different from a thickness of the second coating in the region of the second side surface.
13 . The method as claimed in claim 12 , wherein
the second side surface of the cutout is provided with a protective layer,
the first side surface of the cutout is provided with the first coating, and
the protective layer is removed, such that the semiconductor body is freely accessible in the region of the second side surface.
14 . The method as claimed in claim 13 , wherein
the first coating is provided with a further protective layer at least in the region of the first side surface, and
the second side surface of the cutout is provided with the second coating, and
the further protective layer is removed, such that the first coating is freely accessible in the region of the first side surface.
15 . The method as claimed in claim 12 , wherein the first coating and the second coating are simultaneously applied to the first side surface and the second side surface, wherein
the first coating is embodied as a first layer sequence of a multiplicity of individual layers, and
the second coating is embodied as a second layer sequence of a multiplicity of individual layers,
the first layer sequence and the second layer sequence are formed from individual layers of identical materials and with an identical succession, and
the thickness of the first layer sequence in the region of the first side surface and the thickness of the second layer sequence in the region of the second side surface are in a ratio of between not less than 1:1 and not more than 1:20.
16 . The method as claimed in claim 15 , wherein
a preferred direction of a method for applying the first coating and the second coating forms a predefined angle with a main extension plane of the semiconductor body, such that the thickness of the first coating in the region of the first side surface is different from the thickness of the second coating in the region of the second side surface.
17 . The method as claimed in claim 12 ,
wherein a multiplicity of semiconductor bodies are provided in a wafer assemblage,
separating trenches are arranged between the semiconductor bodies,
a layer sequence comprising a first layer and a second layer is deposited in the separating trenches,
the semiconductor bodies are singulated along the separating trenches in such a way that the first layer is arranged on a side surface of a semiconductor body and the second layer is arranged on a side surface of a directly adjacent semiconductor body.
18 . A radiation-emitting semiconductor chip comprising:
a semiconductor body comprising an active region which, during operation, generates electromagnetic radiation and is arranged in a resonator,
at least one cutout in the semiconductor body which completely penetrates through the active region,
wherein
the cutout has a first side surface and a second side surface opposite the first side surface, and
the first side surface has a first coating, which predefines a reflectivity for the electromagnetic radiation of the active region, and/or
the second side surface has a second coating, which predefines a reflectivity for the electromagnetic radiation of the active region, and
wherein
a first layer sequence and a second layer sequence are formed from individual layers of identical materials and with an identical succession, and
a thickness of the first layer sequence in the region of the first side surface and a thickness of the second layer sequence in the region of the second side surface are different from one another.