Vibration sensors
Embodiments of the present disclosure provide a vibration sensor. The vibration sensor may include a transducer; and a vibration component connected with the transducer, wherein the vibration component may be configured to transmit an external vibration signal to the transducer to generate an electrical signal, and include one or more plate structures and one or more mass blocks physically connected with each of the one or more plate structures; and the vibration component may be further configured to make a sensitivity of the vibration sensor greater than a sensitivity of the transducer within one or more target frequency bands.
1 . A vibration sensor, including:
a transducer; and
a vibration component connected with the transducer, wherein
the transducer further includes a conduction channel;
the vibration component is arranged within the conduction channel along a radial cross-section of the conduction channel;
the vibration component is configured to transmit an external vibration signal to the transducer to generate an electrical signal, and includes one or more plate structures and one or more mass blocks physically connected with each of the one or more plate structures, wherein the one or more plate structures include a cantilever beam, a mass block of the one or more mass blocks, a diaphragm, and a plurality of mass blocks of the one or more mass blocks in sequence in a direction away from the transducer in the conduction channel; and
the vibration component is further configured to make a sensitivity of the vibration sensor greater than a sensitivity of the transducer within one or more target frequency bands, wherein a frequency response curve of the vibration sensor under an action of the vibration component includes a plurality of resonance peaks.
2 . The vibration sensor of claim 1 , wherein the one or more mass blocks connected with each of the one or more plate structures include at least two mass blocks.
3 . The vibration sensor of claim 1 , wherein in a vibration direction of the vibration component, a projection of the one or more mass blocks is located within a projection of the one or more plate structures.
4 . The vibration sensor of claim 1 , wherein the vibration component further includes a supporting structure configured to support the one or more plate structures, the supporting structure is physically connected with the transducer, and the one or more plate structures are connected with the supporting structure.
5 . The vibration sensor of claim 4 , wherein the support structure is made of an impermeable material.
6 . The vibration sensor according to claim 4 , wherein
a projection region of the one or more mass blocks does not overlap with a projection region of the supporting structure in a vertical direction with respect to a surface, wherein the one or more plate structures and the one or more mass blocks are connected at the surface.
7 . The vibration sensor of claim 2 , wherein one of the one or more plate structures and at least two mass blocks physically connected with the plate structure correspond to multiple target frequency bands of the one or more target frequency bands, so that the sensitivity of the vibration sensor is greater than the sensitivity of the transducer within the multiple target frequency bands of the one or more target frequency bands, wherein each target frequency band of the one or more target frequency bands is a frequency range of a resonance frequency corresponding to each of the one or more plate structures and the one or more mass blocks.
8 . The vibration sensor of claim 1 , wherein at least one mass block of the one or more mass blocks connected with one plate structure of the one or more plate structure is concentric with the plate structure.
9 . The vibration sensor of claim 1 , wherein at least one of the one or more plate structures includes the diaphragm.
10 . The vibration sensor of claim 1 , wherein at least one of the one or more plate structures includes the cantilever beam.
11 . The vibration sensor of claim 10 , wherein the one or more mass blocks connected with the cantilever beam are set at a free end of the cantilever beam.
12 . The vibration sensor of claim 1 , wherein the one or more mass blocks include at least three mass blocks, connecting lines between any two mass blocks of the at least three mass blocks at a center point of the diaphragm do not overlap into a straight line.
13 . The vibration sensor of claim 1 , wherein the one or more mass blocks include two mass blocks having different heights in a horizontal direction, the horizontal direction being perpendicular to the vibration direction.
14 . A sound input device, comprising a vibration sensor, wherein the vibration sensor includes:
a transducer; and
a vibration component connected with the transducer, wherein
the transducer further includes a conduction channel;
the vibration component is arranged within the conduction channel along a radial cross-section of the conduction channel;
the vibration component is configured to transmit an external vibration signal to the transducer to generate an electrical signal, and includes one or more plate structures and one or more mass blocks physically connected with each of the one or more plate structures, wherein the one or more plate structures includes a cantilever beam, a mass block of the one or more mass blocks, a diaphragm, and a plurality of mass blocks of the one or more mass blocks in sequence in a direction away from the transducer in the conduction channel; and
the vibration component is further configured to make a sensitivity of the vibration sensor greater than a sensitivity of the transducer within one or more target frequency bands, wherein a frequency response curve of the vibration sensor under an action of the vibration component includes a plurality of resonance peaks.