Structural body, X-ray generation apparatus, X-ray computed tomography (CT) apparatus, and manufacturing method for manufacturing heat dissipation portion
The present invention is directed to providing a structural body in which the heat dissipation property is improved. A structural body heated to 700° C. or more includes a heat dissipation portion configured to dissipate heat of the structural body, wherein, on a surface of the heat dissipation portion, a first concavo-convex structure is provided where a plurality of first convex portions and a plurality of first concave portions are alternately arranged, wherein, when the structural body is heated to 700° C. or more, a peak wavelength of an electromagnetic wave of heat emitted from the heat dissipation portion is 3 μm or less, and wherein a distance between first convex portions close to each other among the plurality of first convex portions, and/or a distance between first concave portions close to each other among the plurality of first concave portions is less than half of the peak wavelength.
1 . A structural body heated to 700° C. or more, the structural body comprising:
a heat dissipation portion configured to dissipate heat of the structural body,
wherein, on a surface of the heat dissipation portion, the structural body is provided with a first concavo-convex structure is provided where a plurality of first convex portions and a plurality of first concave portions are alternately arranged, and with a second concavo-convex structure where a plurality of second convex portions and a plurality of second concave portions are alternately arranged,
wherein the first concavo-convex structure is provided on a surface of the second concavo-convex structure,
wherein, when the structural body is heated to 700° C. or more, a peak wavelength of an electromagnetic wave of heat emitted from the heat dissipation portion is 3 μm or less, and
wherein a distance between first convex portions close to each other among the plurality of first convex portions, and/or a distance between first concave portions close to each other among the plurality of first concave portions, is/are 50 nm or more but less than half of the peak wavelength,
wherein a distance between second convex portions close to each other among the plurality of second convex portions is longer than the distance between the first convex portions, and/or a distance between second concave portions close to each other among the plurality of second concave portions is longer than the distance between the first concave portions, and
wherein the distance between second convex portions and/or the distance between second concave portions is/are 1 μm or more and 100 μm or less.
2 . The structural body according to claim 1 , wherein the first concavo-convex structure is composed of a material having a melting point of 1500° C. or more.
3 . The structural body according to claim 1 , wherein the second concavo-convex structure is composed of a metal having a melting point of 1500° C. or more.
4 . The structural body according to claim 1 , wherein the distance between the second convex portions and/or the distance between the second concave portions is/are 10 μm or more.
5 . The structural body according to claim 1 , wherein a depth of the first concavo-convex structure is 50 nm or more but less than 1500 nm.
6 . The structural body according to claim 1 , wherein the second concavo-convex structure is composed of tungsten, molybdenum, niobium, tantalum, rhenium, hafnium, zirconium, or yttrium.
7 . The structural body according to claim 1 , wherein the first concavo-convex structure includes particles, and a particle size of the particles is 50 nm or more but less than 1500 nm.
8 . A structural body heated to 700° C. or more, the structural body comprising:
an area configured to be irradiated with an electron; and
a heat dissipation portion configured to dissipate heat of the structural body,
wherein the structural body forms an electron tube target,
wherein on a surface of the heat dissipation portion, the structural body is provided with a first concavo-convex structure where a plurality of first convex portions and a plurality of first concave portions are alternately arranged, and with a second concavo-convex structure where a plurality of second convex portions and a plurality of second concave portions are alternately arranged,
wherein the first concavo-convex structure is provided on a surface of the second concavo-convex structure,
wherein a distance between first convex portions close to each other among the plurality of first convex portions or a distance between first concave portions close to each other among the plurality of first concave portions is less than ½ of a peak wavelength of an electromagnetic wave of heat emitted from the heat dissipation portion, and
wherein a distance between second convex portions close to each other among the plurality of second convex portions is longer than the distance between the first convex portions, and/or a distance between second concave portions close to each other among the plurality of second concave portions is longer than the distance between the first concave portions.
9 . The structural body according to claim 8 , wherein the distance between the first convex portions and/or the distance between the first concave portions is/are 50 nm or more.
10 . The structural body according to claim 8 , wherein the first concavo-convex structure is arranged apart from the area.
11 . An X-ray generation apparatus comprising:
the structural body according to claim 8 ; and
an electron emission source configured to emit electrons to the electron tube target.
12 . The structural body according to claim 8 , wherein a depth of the first concavo-convex structure is 50 nm or more but less than 1500 nm.
13 . The structural body according to claim 9 , wherein the distance between second convex portions and/or the distance between second concave portions is/are 1 μm or more and 100 μm or less.
14 . The structural body according to claim 13 , wherein the distance between the second convex portions and/or the distance between the second concave portions is/are 10 μm or more.
15 . An X-ray generation apparatus comprising:
the structural body according to claim 10 ; and
a container storing the structural body inside the container.
16 . An X-ray computed tomography (CT) apparatus comprising:
the X-ray generation apparatus according to claim 15 ; and
a detection unit configured to detect an X-ray emitted from the X-ray generation apparatus.
17 . The X-ray generation apparatus according to claim 15 , wherein an inside of the container is in a vacuum state.
18 . The X-ray generation apparatus according to claim 15 , further comprising a shaft attached to the electron tube target, wherein the shaft is stored in the container, and the electron tube target is configured to be rotated together with the shaft.
19 . An X-ray computed tomography (CT) apparatus comprising: the X-ray generation apparatus according to claim 11 ; and a detection unit detects configured to detect an X-ray emitted from the X-ray generation apparatus.
20 . A structural body heated to 700° C. or more, the structural body comprising:
a heat dissipation portion configured to dissipate heat of the structural body,
wherein, on a surface of the heat dissipation portion, the structural body is provided with a first concavo-convex structure where a plurality of first convex portions and a plurality of first concave portions are alternately arranged,
wherein, when the structural body is heated to 700° C. or more, a peak wavelength of an electromagnetic wave of heat emitted from the heat dissipation portion is 3 μm or less, and
wherein a distance between first convex portions close to each other among the plurality of first convex portions, and/or a distance between first concave portions close to each other among the plurality of first concave portions, is/are less than half of the peak wavelength, and
wherein an amount of nitrogen contained in a portion from a surface to a depth of 100 nm or less in the first concavo-convex structure is 1 at % or more, or an amount of oxygen contained in the portion is 10 at % or less.
21 . A structural body heated to 700° C. or more, the structural body comprising:
a heat dissipation portion configured to dissipate heat of the structural body,
wherein, on a surface of the heat dissipation portion, the structural body is provided with a first concavo-convex structure where a plurality of first convex portions and a plurality of first concave portions are alternately arranged,
wherein, when the structural body is heated to 700° C. or more, a peak wavelength of an electromagnetic wave of heat emitted from the heat dissipation portion is 3 μm or less,
wherein a distance between first convex portions close to each other among the plurality of first convex portions, and/or a distance between first concave portions close to each other among the plurality of first concave portions, is/are less than half of the peak wavelength, and
wherein the first concavo-convex structure includes particles, and a particle size of the particles is 50 nm or more and less than 1500 nm.
22 . The structural body according to claim 21 , wherein a difference between a minimum particle size of the particles and a maximum particle size of the particles is 300 nm or more.
23 . A manufacturing method for manufacturing a structural body having a first concavo-convex structure where a plurality of first convex portions and a plurality of first concave portions are alternately arranged and a second concavo-convex structure where a plurality of second convex portions and a plurality of second concave portions are alternately arranged, the manufacturing method comprising:
processing for surface-treating a surface of a member with laser light, the member being composed of a metal having a melting point of 1500° C. or more; and
wherein in the processing, forming a concavo-convex structure corresponding to the second concavo-convex structure by partially removing a part of the member, and forming a concavo-convex structure corresponding to the first concavo-convex structure by depositing a particles generated from the part of the member on the surface of the second concavo-convex structure,
wherein a distance between first convex portions close to each other among the plurality of first convex portions, and/or a distance between first concave portions close to each other among the plurality of first concave portions, is/are less than 1500 nm, and
wherein a distance between second convex portions close to each other among the plurality of second convex portions is longer than the distance between the first convex portions, or a distance between second concave portions close to each other among the plurality of second concave portions is longer than the distance between the first concave portions.
24 . The manufacturing method according to claim 23 , wherein after the deposition, the first concavo-convex structure and the second concavo-convex structure are heat-treated at 800° C. or more in a hydrogen atmosphere.
25 . The manufacturing method according to claim 23 , wherein the member is composed of tungsten, molybdenum, niobium, tantalum, rhenium, hafnium, zirconium, or yttrium.