IP Library › Granted Patent US 12684680
Granted Patent B2
US 12684680 · App. 18/762,519 · Granted Jul 14, 2026

Low-k RF rod for RF bias power delivery

Inventors: James Carducci (Sunnyvale, CA); Kiran Honnavar (Bangalore, IN); Silverst Rodrigues (San Jose, CA); Kartik Ramaswamy (San Jose, CA); Larry Elizaga (Tracy, CA)
Assignee: Applied Materials, Inc.
H05H1/4645H05H1/0081H05H1/52
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Quick Facts
Patent No.
US 12684680
App. No.
18/762,519
Granted
Jul 14, 2026
Kind
B2
Abstract

Embodiments described herein relate to an apparatus that includes an inner rod assembly. In an embodiment, the inner rod assembly includes a first rod and a second rod oriented approximately ninety degrees with respect to the first rod. In an embodiment, a bridge is electrically coupled to the first rod and the second rod. In an embodiment, a first insulator is over an outer surface of the inner rod assembly, and a shell is provided around the inner rod assembly. In an embodiment, a second insulator is provided over an outer surface of the shell, and a housing surrounds the shell. In an embodiment, an interior surface of the housing is spaced away from the second insulator by an air gap.

Claims (53)

1 . An apparatus, comprising:

an inner rod assembly, wherein the inner rod assembly comprises:

a first rod;

a second rod oriented approximately ninety degrees with respect to the first rod; and

a bridge electrically coupled to the first rod and the second rod;

a first insulator over an outer surface of the inner rod assembly;

a shell around the inner rod assembly:

a second insulator over an outer surface of the shell; and

a housing surrounding shell, wherein an interior surface of the housing is spaced away from the second insulator by an air gap.

2 . The apparatus of claim 1 , wherein the first insulator and the second insulator comprise polytetrafluoroethylene (PTFE).

3 . The apparatus of claim 1 , wherein the first insulator is overmolded on the inner rod assembly, and wherein the second insulator is overmolded on the shell.

4 . The apparatus of claim 1 , wherein the shell comprises:

a first shell segment around the first rod;

a second shell segment around the second rod; and

a corner coupler that is electrically coupled to the first shell segment and the second shell segment.

5 . The apparatus of claim 1 , wherein the bridge comprises a first protrusion and a second protrusion, wherein the first protrusion is inserted into a first slot in the first rod and the second protrusion is inserted into a second slot in the second rod.

6 . The apparatus of claim 1 , further comprising:

a third insulator around the bridge, wherein the third insulator is provided between the second insulator and the housing.

7 . The apparatus of claim 1 , wherein the shell is electrically coupled to a radio frequency (RF) match.

8 . The apparatus of claim 1 , wherein the inner rod assembly is electrically coupled to a direct current (DC) bias source.

9 . The apparatus of claim 1 , wherein the inner rod assembly and the shell are electrically coupled to a chuck.

10 . The apparatus of claim 1 , wherein the first rod comprises a plurality of segments.

11 . An apparatus, comprising:

a chamber;

a chuck within the chamber; and

a rod assembly electrically coupled to the chuck, wherein the rod assembly comprises:

a first electrical conductor;

a first insulator over the first electrical conductor;

a second electrical conductor around the first insulator;

a second insulator over the second electrical conductor; and

a housing around the second insulator, wherein at least a portion of the housing is spaced away from the second insulator by an air gap.

12 . The apparatus of claim 11 , wherein the rod assembly has an L-shape.

13 . The apparatus of claim 11 , wherein the first insulator is overmolded over the first electrical conductor, and wherein the second insulator is overmolded over the second electrical conductor.

14 . The apparatus of claim 13 , wherein the first insulator and the second insulator comprise polytetrafluoroethylene (PTFE).

15 . The apparatus of claim 11 , wherein the rod assembly is electrically coupled to a radio frequency (RF) match and a direct current (DC) bias source.

16 . The apparatus of claim 11 , wherein the first electrical conductor comprises a first rod that is electrically coupled to a second rod by a bridge.

17 . An apparatus, comprising:

an inner rod assembly, wherein the inner rod assembly comprises:

a first rod;

a second rod; and

a bridge electrically coupled to the first rod and the second rod, wherein the inner rod assembly has an L-shape;

a first insulator over an outer surface of the inner rod assembly;

a shell around the inner rod assembly, wherein an inner surface of the shell directly contacts the first insulator:

a second insulator over an outer surface of the shell;

an insulating corner reinforcement around the bridge, wherein the insulating corner reinforcement wraps around the shell; and

a housing surrounding the shell, wherein a portion of an interior surface of the housing is spaced away from the second insulator by an air gap.

18 . The apparatus of claim 17 , wherein the inner rod assembly is electrically coupled to a direct current (DC) bias source, and wherein the shell is electrically coupled to a radio frequency (RF) match.

19 . The apparatus of claim 17 , wherein the shell comprises:

a first tube;

a second tube; and

an electrically conductive corner coupler that is electrically coupled to the first tube and the second tube.

20 . The apparatus of claim 17 , further comprising:

an electrostatic chuck, wherein the inner rod assembly and the shell are electrically coupled to the electrostatic chuck.