Memory device
A memory device includes: an interconnect structure, a staircase structure, a dielectric layer and a stop structure. The interconnect structure is located above a substrate. The staircase structure is located above the interconnect structure. The dielectric layer is located above the interconnect structure and covers the staircase structure. The stop structure is located between the interconnect structure and the staircase structure, and between the interconnect structure and the dielectric layer, and the stop structure has an opening exposing the interconnect structure. The first contact extends through the dielectric layer and the opening, and is connected to the interconnect of the interconnect structure. The middle width of the opening is not equal to the top width of the opening, or the middle width of the opening is not equal to the bottom width of the opening. The memory device may be 3D NAND flash memory with high capacity and high performance.
1 . A memory device, comprising:
a substrate;
an interconnect structure, located above the substrate;
a staircase structure, located above the interconnect structure;
a dielectric layer, located above the interconnect structure and covering the staircase structure;
a stop structure, located between the interconnect structure and the staircase structure, and between the interconnect structure and the dielectric layer, wherein the stop structure has an opening exposing the interconnect structure;
a first contact, extending through the dielectric layer and the opening, and connected to an interconnect of the interconnect structure,
wherein a middle width of the opening is not equal to a top width of the opening, or the middle width of the opening is not equal to a bottom width of the opening, and
wherein the opening includes a rectangular part and a conical part, and the rectangular part and the conical part together form a funnel shape, an inverted funnel shape or a bowl shape.
2 . The memory device of claim 1 , wherein the conical part is closer to the substrate than the rectangular part, and a width of the conical part gradually becomes decreased toward the substrate.
3 . The memory device of claim 1 , wherein the conical part is closer to the substrate than the rectangular part, and a width of the conical part gradually becomes increased toward the substrate.
4 . The memory device of claim 1 , wherein the rectangular part is closer to the substrate than the conical part, and a width of the conical part gradually becomes decreased toward the substrate.
5 . The memory device of claim 1 , further comprising a second contact extending through the dielectric layer and the opening and connected to the interconnect of the interconnect structure.
6 . The memory device of claim 5 , wherein a bottom pitch of the first contact and the second contact is larger than a top pitch of the first contact and the second contact.
7 . The memory device of claim 6 , wherein an inclined degree of the first contact is different from an inclined degree of the second contact.
8 . The memory device of claim 5 , wherein a bottom pitch of the first contact and the second contact is smaller than a top pitch of the first contact and the second contact, and a difference between the bottom pitch and the top pitch ranges from 1 nm to 50 nm.
9 . A memory device, comprising:
a substrate;
an interconnect structure, located above the substrate;
a staircase structure, located above the interconnect structure;
a dielectric layer, located above the interconnect structure and covering the staircase structure;
a stop structure, located between the interconnect structure and the staircase structure, and between the interconnect structure and the dielectric layer, wherein the stop structure has an opening exposing the interconnect structure;
a first contact and a second contact, extending through the dielectric layer and the opening, and connected to an interconnect of the interconnect structure; and
a plurality of liner layers, located on a sidewall of the opening.
10 . The memory device of claim 9 , wherein the plurality of liner layers are separated from the first contact and the second contact by a non-zero distance.
11 . The memory device of claim 9 , wherein the first contact is separated by a non-zero distance from a first adjacent one of the plurality of liner layers, and the second contact is in contact with a second adjacent one of the plurality of liner layers.
12 . The memory device of claim 9 , wherein a bottom pitch of the first contact and the second contact is larger than a top pitch of the first contact and the second contact.
13 . The memory device of claim 12 , wherein an inclined degree of the first contact is different from an inclined degree of the second contact.
14 . The memory device of claim 9 , wherein the stop structure includes a conductive material, and the plurality of liner layers include a dielectric material.
15 . The memory device of claim 9 , wherein the stop structure includes polysilicon, and the plurality of liner layers include SiON, SiC, SiOC, SiOCN or a combination thereof.
16 . The memory device of claim 9 , further comprising a plurality of support pillars, wherein the plurality of support pillars extend through the dielectric layer, land on the stop structure and are adjacent to the plurality of liner layers.
17 . A memory device, comprising:
a substrate;
an interconnect structure, located above the substrate;
a staircase structure, located above the interconnect structure;
a dielectric layer, located above the interconnect structure and covering the staircase structure;
a stop structure, located between the interconnect structure and the staircase structure, and between the interconnect structure and the dielectric layer, wherein the stop structure has an opening exposing the interconnect structure; and
a first contact and a second contact, extending through the dielectric layer and the opening, and connected to an interconnect of the interconnect structure,
wherein a base angle of the opening ranges from 84° to 86° or is larger than 90°, and
wherein the opening includes a rectangular part and a conical part, and the rectangular part and the conical part together form a funnel shape, an inverted funnel shape or a bowl shape.
18 . The memory device of claim 17 , further comprising a plurality of support pillars, wherein the plurality of support pillars extend through the dielectric layer and land on the stop structure around the opening.
19 . The memory device of claim 18 , wherein a ratio of a distance between the plurality of support pillars to a top width of the opening ranges from 1.03 to 1.15, and a ratio of the top width of the opening to a bottom width of the opening ranges from 1.1 to 0.9.