Isolation structures for transistors
The present disclosure is directed to methods for the fabrication of gate-all-around (GAA) field effect transistors (FETs) with low power consumption. The method includes depositing a first and a second epitaxial layer on a substrate and etching trench openings in the first and second epitaxial layers and the substrate. The method further includes removing, through the trench openings, portions of the first epitaxial layer to form a gap between the second epitaxial layer and the substrate and depositing, through the trench openings, a first dielectric to fill the gap and form an isolation structure. In addition, the method includes depositing a second dielectric in the trench openings to form trench isolation structures and forming a transistor structure on the second epitaxial layer.
1 . A structure, comprising:
a dielectric layer on a substrate;
a first epitaxial layer on the dielectric layer;
a second epitaxial layer on the first epitaxial layer, wherein the second epitaxial layer is in contact with the substrate and a side surface of the dielectric layer; and
a channel region on the second epitaxial layer.
2 . The structure of claim 1 , further comprising a source/drain region adjacent to the channel region and in contact with a side surface of the second epitaxial layer.
3 . The structure of claim 1 , further comprising a gate structure surrounding the channel region.
4 . The structure of claim 1 , wherein an interface between the first epitaxial layer and the dielectric layer is above an interface between the second epitaxial layer and the substrate.
5 . The structure of claim 1 , wherein an interface between the first epitaxial layer and the second epitaxial layer is coplanar with an interface between the dielectric layer and the second epitaxial layer.
6 . The structure of claim 1 , further comprising a third epitaxial layer on the substrate and coplanar with the dielectric layer.
7 . The structure of claim 1 , wherein a side surface of the second epitaxial layer is coplanar with a side surface of the channel region.
8 . The structure of claim 1 , wherein the dielectric layer comprises a void.
9 . A structure, comprising:
a dielectric layer on a substrate;
a first epitaxial layer on the dielectric layer;
a second epitaxial layer in contact with a top surface of the substrate and a side surface of the first epitaxial layer;
a channel region on the second epitaxial layer; and
a gate structure on the channel region.
10 . The structure of claim 9 , wherein the side surface of the first epitaxial layer is coplanar with a side surface of the dielectric layer.
11 . The structure of claim 9 , wherein a thickness of the second epitaxial layer is greater than a distance between a top surface of the first epitaxial layer and a bottom surface of the dielectric layer.
12 . The structure of claim 9 , wherein a width of the channel region is substantially the same as a width of the second epitaxial layer.
13 . The structure of claim 9 , further comprising a capping layer on the substrate and a side surface of the second epitaxial layer.
14 . The structure of claim 13 , wherein an interface between the capping layer and the substrate is curved.
15 . A structure, comprising:
a dielectric layer on a substrate;
an epitaxial layer in contact with the substrate and the dielectric layer, wherein the epitaxial layer comprises a first upper surface and a second upper surface above the first upper surface; and
a gate structure on the second upper surface of the epitaxial layer.
16 . The structure of claim 15 , wherein the epitaxial layer further comprises a side surface connected to the first and second upper surfaces.
17 . The structure of claim 15 , wherein the dielectric layer comprises a plurality of air pockets.
18 . The structure of claim 15 , further comprising another epitaxial layer on the dielectric layer, wherein an interface between the epitaxial layer and the another epitaxial layer is coplanar with an interface between the dielectric layer and the epitaxial layer.
19 . The structure of claim 15 , further comprising another epitaxial layer on the substrate, wherein a top surface of the another epitaxial layer is coplanar with a top surface of the dielectric layer.
20 . The structure of claim 15 , further comprising a capping layer on a side surface of the epitaxial layer, wherein a top surface of the capping layer is coplanar with a bottom surface of the gate structure.