Semiconductor structure and method of forming the same
A semiconductor structure and a method of forming the same are provided. The semiconductor structure includes a substrate, a floating gate, a dielectric stack, a control gate, and a protective layer. The substrate includes an active region and a peripheral region. The floating gate is disposed on the substrate. The dielectric stack is disposed on the floating gate. The control gate is disposed on the dielectric stack. The protective layer is disposed on the control gate. The protective layer located in the active region has a stepped portion.
1 . A semiconductor structure, comprising:
a substrate comprising an active region and a peripheral region;
a floating gate disposed on the substrate;
a dielectric stack disposed on the floating gate;
a control gate disposed on the dielectric stack; and
a protective layer disposed on the control gate,
wherein the protective layer located in the active region has a stepped portion.
2 . The semiconductor structure as claimed in claim 1 , wherein a thickness of the protective layer located in the active region is less than a thickness of the protective layer located in the peripheral region.
3 . The semiconductor structure as claimed in claim 2 , wherein the thickness of the protective layer located in the active region is 50% to 70% of the thickness of the protective layer located in the peripheral region.
4 . The semiconductor structure as claimed in claim 1 , further comprising:
a liner disposed on the stepped portion of the protective layer;
a planarization layer disposed on the liner; and
a spacer disposed on the liner, and wherein a bottom surface of the spacer is higher than a bottom surface of the planarization layer.
5 . The semiconductor structure as claimed in claim 4 , further comprising:
a capping layer disposed between the protective layer and the liner and located under the spacer.
6 . The semiconductor structure as claimed in claim 5 , wherein a thickness of the capping layer is 20% to 50% of a thickness of the protective layer located in the peripheral region.
7 . The semiconductor structure as claimed in claim 5 , wherein the protective layer is silicon oxide, and the capping layer is silicon nitride.
8 . The semiconductor structure as claimed in claim 4 , further comprising:
a contact plug disposed in the peripheral region, wherein the contact plug passes through the planarization layer and the protective layer so as to electrically connect to the control gate.
9 . The semiconductor structure as claimed in claim 1 , wherein a bottom surface of the floating gate is wavy.
10 . The semiconductor structure as claimed in claim 1 , further comprising:
an isolation structure disposed in the substrate, wherein a top surface of the floating gate is higher than a top surface of the isolation structure.
11 . A method of forming a semiconductor structure, comprising:
forming a floating gate on a substrate, wherein the substrate comprises an active region and a peripheral region;
forming a dielectric stack on the floating gate;
forming a control gate on the dielectric stack;
forming a protective layer on the control gate;
forming a capping layer on the protective layer; and
performing an etching process by using the capping layer as an etching mask, so that the protective layer located in the active region has a stepped portion.
12 . The method as claimed in claim 11 , wherein performing the etching process further comprises:
performing a first etching process to remove the capping layer and the protective layer in the peripheral region; and
performing a second etching process to remove the control gate and the dielectric stack in the peripheral region and the protective layer in the active region.
13 . The method as claimed in claim 12 , wherein performing the etching process further comprises:
before performing the first etching process, forming a first photoresist layer on the protective layer and the capping layer.
14 . The method as claimed in claim 11 , wherein a ratio of an etching rate of the capping layer to an etching rate of the protective layer is 1:2-1:10.
15 . The method as claimed in claim 11 , wherein the formation of the capping layer on the protective layer further comprises:
patterning the capping layer so that the capping layer exposes the protective layer in the active region.
16 . The method as claimed in claim 15 , wherein the formation of the capping layer on the protective layer further comprises:
forming a second photoresist layer on the capping layer, wherein the second photoresist layer exposes a portion of the capping layer in the active region; and
performing a third etching process to remove the portion of the capping layer in the active region and exposes the protective layer in the active region.
17 . The method as claimed in claim 11 , wherein performing the etching process further comprises:
forming a liner on the protective layer and the capping layer;
forming a sacrificial layer on the liner;
forming a spacer on the liner;
removing the liner and the capping layer to expose the protective layer;
removing the sacrificial layer;
forming a planarization layer on the liner, the spacer, and the protective layer; and
forming a contact plug in the peripheral region, wherein the contact plug passes through the planarization layer and the protective layer so as to electrically connect to the control gate.
18 . The method as claimed in claim 17 , wherein the formation of the liner further comprises:
forming a first liner on the protective layer and the capping layer; and
forming a second liner on the first liner.
19 . The method as claimed in claim 18 , wherein the first liner is oxide, and the second liner is nitride.
20 . The method as claimed in claim 17 , wherein the sacrificial layer is polycrystalline silicon.