Display device and method of manufacturing the same
A display device includes: a substrate; a spacer on the substrate and including: an upper surface; a first side surface extending toward the substrate from a first end of the upper surface; and a second side surface extending toward the substrate from a second end of the upper surface; an active pattern on the first side surface of the spacer, including a metal oxide semiconductor, and having a source region and a drain region; a source electrode on the second side surface of the spacer and the active pattern, and connected to the source region; a drain electrode on the substrate, including a same material as the source electrode, and connected to the drain region; and a first gate electrode on the active pattern and partially overlapping the first side surface of the spacer.
1 . A display device comprising:
a substrate;
a spacer on the substrate and comprising:
an upper surface;
a first side surface extending toward the substrate from a first end of the upper surface; and
a second side surface extending toward the substrate from a second end of the upper surface;
an active pattern on the first side surface of the spacer, including a metal oxide semiconductor, and having a source region and a drain region;
a source electrode on the second side surface of the spacer and the active pattern, and connected to the source region;
a drain electrode on the substrate, including a same material as the source electrode, and connected to the drain region; and
a first gate electrode on the active pattern such that the active pattern is between the first gate electrode and the spacer, with the first gate electrode partially overlapping the first side surface of the spacer.
2 . The display device of claim 1 , wherein the metal oxide semiconductor of the active pattern includes a material having chemical resistance.
3 . The display device of claim 1 , wherein a first end of the active pattern overlaps the upper surface of the spacer and a second end of the active pattern does not overlap the upper surface of the spacer.
4 . The display device of claim 1 , wherein the source region overlaps the upper surface of the spacer and the drain region does not overlap the upper surface of the spacer.
5 . The display device of claim 1 , wherein the source electrode extends along the second side surface of the spacer to an upper surface of the substrate.
6 . The display device of claim 1 , wherein the source electrode partially overlaps the source region and the drain electrode partially overlaps the drain region.
7 . The display device of claim 1 , wherein the active pattern further includes:
a channel region between the source region and the drain region, and partially overlapping each of the upper surface and the first side surface of the spacer, and
the first gate electrode completely overlaps the channel region.
8 . The display device of claim 1 , wherein a first end of the first gate electrode overlaps the upper surface of the spacer and a second end of the first gate electrode does not overlap the upper surface of the spacer.
9 . The display device of claim 1 , further comprising:
a first insulating pattern between the active pattern and the first gate electrode,
wherein the first insulating pattern partially overlaps each of the source region and the drain region.
10 . The display device of claim 1 , wherein the spacer includes an insulating material.
11 . The display device of claim 1 , wherein each of the first side surface and second side surface of the spacer is inclined with respect to the substrate.
12 . The display device of claim 1 , further comprising:
a second gate electrode on the source electrode and including a same material as the first gate electrode,
wherein the second gate electrode constitutes a storage capacitor together with a portion of the source electrode overlapping the second gate electrode.
13 . The display device of claim 12 , further comprising:
a second insulating pattern between the source electrode and the second gate electrode.
14 . The display device of claim 1 , further comprising:
a first pad layer on the source electrode; and
a second pad layer on the drain electrode and including a same material as the first pad layer.
15 . The display device of claim 14 , further comprising:
a lower electrode on the source electrode;
a light emitting layer on the lower electrode; and
an upper electrode on the light emitting layer,
wherein the lower electrode is directly connected to the first pad layer through a contact hole.
16 . A method of manufacturing a display device, the method comprising:
forming a spacer on a substrate comprising:
an upper surface;
a first side surface extending toward the substrate from a first end of the upper surface; and
a second side surface extending toward the substrate from a second end of the upper surface on the substrate;
forming a preliminary active pattern including a metal oxide semiconductor on the first side surface of the spacer;
simultaneously forming a source electrode connected to a first end of the preliminary active pattern on the second side surface of the spacer and the preliminary active pattern, and a drain electrode connected to a second end of the preliminary active pattern on the substrate; and
forming a first gate electrode partially overlapping the first side surface of the spacer on the preliminary active pattern such that the preliminary active pattern is between the first gate electrode and the spacer.
17 . The method of claim 16 , further comprising:
forming an insulating pattern between the preliminary active pattern and the first gate electrode after the forming the first gate electrode.
18 . The method of claim 17 , wherein the forming the insulating pattern includes:
forming an active pattern having a source region, a drain region, and a channel region between the source region and the drain region by introducing hydrogen into the preliminary active pattern.
19 . The method of claim 18 , wherein the source electrode is connected to the source region to partially overlap the source region and the drain electrode is connected to the drain region to partially overlap the drain region.
20 . An electronic device comprising:
a display device; and
a power supply which supplies power the display device,
wherein the display device includes:
a substrate;
a spacer on the substrate and comprising:
an upper surface;
a first side surface extending toward the substrate from a first end of the upper surface; and
a second side surface extending toward the substrate from a second end of the upper surface;
an active pattern on the first side surface of the spacer, including a metal oxide semiconductor, and having a source region and a drain region;
a source electrode on the second side surface of the spacer and the active pattern, and connected to the source region;
a drain electrode on the substrate, including a same material as the source electrode, and connected to the drain region; and
a first gate electrode on the active pattern such that the active pattern is between the first gate electrode and the spacer, with the first gate electrode partially overlapping the first side surface of the spacer.