Modular material handling robot platform

1 . A transport apparatus, comprising:

a first base plate having a first position track, where the first base plate is configured to have at least one first linear drive component and/or at least one first power coupling component connected to a top side of the first base plate, where the first base plate is configured to be located inside a vacuum chamber;

a second base plate having a second position track, where the second base plate is configured to have at least one second linear drive component and/or at least one second power coupling component connected to a top side of the second base plate, where the second base plate is configured to be located outside the vacuum chamber, where an end of the second base plate is aligned with an end of the first base plate and an end of the second position track is aligned with an end of the first position track to form a gap between the second position track and the first position track;

a plurality of transport guides on the top side of the first base plate and on the top side of the second base plate; and

a robot drive configured to move on the plurality of transport guides along the first position track and the second position track, the robot drive comprising a first position sensor configured to sense the first position track and the second position track and a second position sensor configured to sense the first position track and the second position track, the first position sensor being spaced from the second position sensor such that when the first position sensor engages the gap, the second position sensor senses a position of the robot drive on one of the first position track or the second position track and when the second position sensor engages the gap, the first position sensor senses the position of the robot drive on one of the first position track or the second position track, where a position of the robot drive on the first position track or the second position track is used to determine an operation of the robot drive;

where an end of the first base plate comprises at least one alignment feature configured to align the end of the first base plate to an end of the second base plate, and where the first base plate comprises a seal between the inside of the vacuum chamber and the outside of the vacuum chamber.

2 . The transport apparatus as in claim 1 , where the first position sensor is spaced from the second position sensor relative to a length of the first position track or a length of the second position track.

3 . The transport apparatus as in claim 1 , further comprising a controller on the robot drive, the controller being configured to switch between activation of the first position sensor and the second position sensor based on a location of the gap.

4 . The transport apparatus as in claim 3 , where an algorithm is implemented to use data from the first position sensor and the second position sensor to obtain a gradual transition of data during the switch between the activation of the first position sensor and the second position sensor.

5 . The transport apparatus as in claim 3 , where an algorithm is implemented to combine data from the first position sensor and the second position sensor when both the first position sensor and the second position sensor are activated.

6 . The transport apparatus as in claim 1 , where the at least one alignment feature is configured to align the plurality of transport guides on the first base plate with the plurality of transport guides on the second base plate.

7 . The transport apparatus as in claim 1 , where the at least one alignment feature comprises at least one projection extending from the end of the first base plate and at least one recess extending into the first end of the first base plate.

8 . The transport apparatus as in claim 1 , where the end of the first base plate comprises at least one mechanical connection feature projecting from the end of the first base plate, where the at least one mechanical connection feature is configured to be mechanically attached to the second base plate with at least one fastener.

9 . The transport apparatus as in claim 1 , where the first base plate is configured to be mechanically attached directly to the vacuum chamber at a bottom side of the vacuum chamber.

10 . The transport apparatus as in claim 1 , further comprising the vacuum chamber, where the vacuum chamber comprises a plurality of main sections configured to be attached to one another in an end-to-end configuration to form an elongate shaped frame having the first base plate connected thereto, where the main sections comprise opposite lateral side walls and a bottom wall portion, and at least one lid section configured to be removably connected to top sides of the opposite lateral side walls.

11 . The transport apparatus as in claim 1 , further comprising the at least one linear drive component connected to the top side of the first base plate, where the at least one linear drive component is configured to provide a magnetic field to move the robot drive along the plurality of transport guides.

12 . The transport apparatus as in claim 1 , further comprising the power coupling component, where the power coupling component is configured to transfer power to another power coupling component on the robot drive, where the transfer of power is with induction.