Susceptor for process chamber
A substrate support assembly is provided including: a susceptor assembly that includes an inner portion having an inner body, an outer rim disposed around the inner body, and a plurality of recessed portions, each recessed portion recessed relative to a lower surface of the inner body; and an outer portion positioned around the inner portion, the outer portion including an inner ledge. The outer rim of the inner portion is positioned on the inner ledge of the outer portion; and a first plurality of lift pins. Each lift pin of the first plurality of lift pins underlies one of the recessed portions of the inner portion of the susceptor assembly.
1 . A substrate support assembly comprising:
a susceptor assembly comprising:
an inner portion including an inner body, an outer rim disposed around the inner body, and a plurality of recessed portions, each recessed portion recessed relative to a lower surface of the inner body; and
an outer portion positioned around the inner portion, the outer portion including an inner ledge, wherein the outer rim of the inner portion is positioned on the inner ledge of the outer portion; and
a first plurality of lift pins, wherein each lift pin of the first plurality of lift pins underlies one of the recessed portions of the inner portion of the susceptor assembly.
2 . The substrate support assembly of claim 1 , wherein the inner portion further comprises a plurality of holes extending from the lower surface of the inner body of the inner portion to an upper surface of the inner body of the inner portion.
3 . The substrate support assembly of claim 2 , wherein the susceptor assembly further comprises a plurality of lift pin caps, each lift pin cap positioned in one of the plurality of holes.
4 . The substrate support assembly of claim 2 , further comprising a second plurality of lift pins, wherein each lift pin of the second plurality of lift pins underlies one of the holes of the inner portion of the susceptor assembly.
5 . The substrate support assembly of claim 4 , wherein each of the recessed portions and each of the holes are positioned a first distance from a center of the inner portion of the susceptor assembly.
6 . The substrate support assembly of claim 5 , wherein each recessed portion is spaced apart from two other recessed portions by a first angular difference relative to a center of the inner portion of the susceptor assembly.
7 . The substrate support assembly of claim 6 , wherein each hole is spaced apart from two other holes by the first angular difference relative to a center of the inner portion of the susceptor assembly.
8 . The substrate support assembly of claim 6 , further comprising a plurality of lift pin pads positioned below the first plurality of lift pins and the second plurality of lift pin, wherein each of the lift pin pads is positioned the first distance from a vertical axis extending through the center of the inner portion of the susceptor assembly.
9 . The substrate support assembly of claim 7 , further comprising a plurality of lift pin pads positioned below the first plurality of lift pins and the second plurality of lift pins, wherein each of the lift pin pads is spaced apart from two other lift pin pads by the first angular difference relative to a vertical axis extending through the center of the inner portion of the susceptor assembly.
10 . The substrate support assembly of claim 9 , wherein
the first plurality of lift pins and the second plurality of lift pins are configured to be rotated around the vertical axis from a first position to a second position,
the first plurality of lift pins overlie the lift pin pads in the first position, and
the second plurality of lift pins overlie the lift pin pads in the second position.
11 . A susceptor assembly comprising:
an inner portion including an inner body, an outer rim disposed around the inner body, and a plurality of recessed portions, each recessed portion recessed relative to a lower surface of the inner body; and
an outer portion positioned around the inner portion, the outer portion including an inner ledge, wherein the outer rim of the inner portion is positioned on the inner ledge of the outer portion.
12 . The susceptor assembly of claim 11 , wherein the inner portion further comprises a plurality of holes extending from the lower surface of the inner portion to an upper surface of the inner portion.
13 . The susceptor assembly of claim 12 , further comprising a plurality of lift pin caps, each lift pin cap positioned in one of the plurality of holes.
14 . The susceptor assembly of claim 13 , wherein each hole of the plurality of holes and each recessed portion of the plurality of recessed portions is positioned a first distance from a center of the inner portion.
15 . The susceptor assembly of claim 13 , wherein
the inner portion includes a center,
the plurality of recessed portions includes a first recessed portion located at a first angular location relative to the center, a second recessed portion located at a second angular location relative to the center, and a third recessed portion located at a third angular location relative to the center, and
an angular difference between the first angular location and the second angular location is the same as an angular difference between the first angular location and the third angular location.
16 . The susceptor assembly of claim 15 , wherein
the plurality of holes includes a first hole located at a fourth angular location relative to the center, a second hole located at a fifth angular location relative to the center, and a third hole located at a sixth angular location relative to the center, and
an angular difference between the fourth angular location and the fifth angular location is the same as an angular difference between the fourth angular location and the sixth angular location.
17 . The susceptor assembly of claim 16 , wherein the angular difference between the first angular location and the second angular location is the same as the angular difference between the fourth angular location and the fifth angular location.
18 . A process chamber for processing a substrate, the process chamber comprising:
a body enclosing an interior volume;
an opening configured for transferring a substrate into the interior volume; and
a susceptor assembly comprising:
an outer portion and an inner portion positioned on the outer portion, the outer portion positioned around the inner portion, wherein the inner portion is configured to be transferred through the opening.
19 . The process chamber of claim 18 , wherein
the inner portion of the susceptor assembly includes an inner body and an outer rim disposed around the inner body, and
the outer portion includes an inner ledge, wherein the outer rim of the inner portion is positioned on the inner ledge of the outer portion.
20 . The process chamber of claim 19 , wherein
the inner portion further comprises a plurality of holes extending from a lower surface of the inner body of the inner portion to an upper surface of the inner body of the inner portion, and
the susceptor assembly further comprises a plurality of lift pin caps, each lift pin cap positioned in one of the plurality of holes.