Package structure and method for fabricating the same
A method includes forming a first conductive feature over a first semiconductor structure; forming a first dielectric layer over the first conductive feature and the first semiconductor structure; removing a portion of the first dielectric layer to expose a top surface of the first conductive feature; forming a second conductive feature over a second semiconductor structure, wherein the first and second conductive features comprise nanotwinned copper; forming a second dielectric layer over the second conductive feature and the second semiconductor structure, wherein the second dielectric layer comprises a same material as the first dielectric layer; removing a portion of the second dielectric layer to expose a top surface of the second conductive feature; and performing a hybrid bonding process to bond the first dielectric layer to the second dielectric layer and bond the first conductive feature to the second conductive feature.
1 . A method, comprising:
forming a first conductive feature over a first semiconductor structure;
forming a first dielectric layer over the first conductive feature and the first semiconductor structure;
removing a portion of the first dielectric layer to expose a top surface of the first conductive feature;
forming a second conductive feature over a second semiconductor structure, wherein the first and second conductive features comprise nanotwinned copper;
forming a second dielectric layer over the second conductive feature and the second semiconductor structure, wherein the second dielectric layer comprises a same material as the first dielectric layer, wherein the first and second dielectric layers are organic materials;
removing a portion of the second dielectric layer to expose a top surface of the second conductive feature; and
performing a hybrid bonding process to bond the first dielectric layer to the second dielectric layer and bond the first conductive feature to the second conductive feature.
2 . The method of claim 1 , wherein the exposed top surface of the first conductive feature and the exposed top surface of the second conductive feature are ( 111 ) surfaces of nanotwinned copper.
3 . The method of claim 1 , wherein removing the portion of the first dielectric layer comprises a first planarization process, and removing the portion of the second dielectric layer comprises a second planarization process.
4 . The method of claim 3 , wherein the first planarization process is performed such that the first conductive feature protrudes from a top surface of the first dielectric layer, and the second planarization process is performed such that the second conductive feature protrudes from a top surface of the second dielectric layer.
5 . The method of claim 3 , wherein the first planarization process is performed such that the first conductive feature is dished in the first dielectric layer, and the second planarization process is performed such that the second conductive feature is dished in the second dielectric layer.
6 . The method of claim 1 , wherein the hybrid bonding process is performed such that the first dielectric layer is bonded to the second dielectric layer with no interface therebetween, and the first conductive feature is bonded to the second conductive feature with no interface therebetween.
7 . The method of claim 1 , wherein the hybrid bonding process is performed such that the first dielectric layer is bonded to the second dielectric layer with an interface therebetween, and the first conductive feature is bonded to the second conductive feature with no interface therebetween.
8 . The method of claim 1 , wherein the hybrid bonding process is performed such that the first dielectric layer is bonded to the second dielectric layer with no interface therebetween, and the first conductive feature is bonded to the second conductive feature with an interface therebetween.
9 . The method of claim 1 , wherein the hybrid bonding process is performed such that the first dielectric layer is bonded to the second dielectric layer with a first interface therebetween, and the first conductive feature is bonded to the second conductive feature with a second interface therebetween.
10 . A method, comprising:
forming a first conductive feature over a first semiconductor structure, wherein the first conductive feature comprises nanotwinned copper;
coating a first organic material layer over the first conductive feature and the first semiconductor structure, wherein the first organic material layer comprises an organic precursor and a solvent;
removing a portion of the solvent from the first organic material layer;
partially curing the first organic material layer; and
performing a hybrid bonding process to bond the first organic material layer to a second organic material layer of a second semiconductor structure and bond the first conductive feature to a second conductive feature of the second semiconductor structure, wherein the hybrid bonding process is performed such that the first organic material layer is fully cured.
11 . The method of claim 10 , wherein the hybrid bonding process comprises a thermal-compression step performed at a temperature ranging from 150° C. to 250° C.
12 . The method of claim 11 , wherein the hybrid bonding process further comprises an annealing step performed after the thermal-compression step.
13 . The method of claim 10 , wherein a time duration for the hybrid bonding process is less than 1 hour.
14 . The method of claim 10 , wherein partially curing the first organic material layer is performed such that the first organic material layer has a degree of curing in a range from 1% to 70%, and the fully cured first organic material layer has a degree of curing of 100% after the hybrid bonding process.
15 . The method of claim 10 , wherein the fully cured first organic material layer is a polyimide layer.
16 . The method of claim 10 , wherein the first semiconductor structure is a semiconductor die, and the second semiconductor structure is a semiconductor substrate.
17 . A package structure, comprising:
a first semiconductor structure having a first side;
a first conductive feature over the first side of the first semiconductor structure
a first dielectric layer surrounding the first conductive feature;
a second semiconductor structure having a second side facing the first side of the first semiconductor structure;
a second conductive feature over the second side of the second semiconductor structure, wherein the first and second conductive features comprise nanotwinned copper; and
a second dielectric layer surrounding the first conductive feature, wherein the first and second dielectric layers comprise a same dielectric material, wherein the second dielectric layer is bonded with the first dielectric layer, and the second conductive feature is bonded with the first conductive feature, wherein the same dielectric material of the first dielectric layer and the second dielectric layer is an organic material having a theoretic glass transition temperature in a range from 150° C. to 250° C.
18 . The package structure of claim 17 , wherein the second dielectric layer is bonded with the first dielectric layer with no interface therebetween, and the second conductive feature is bonded with the first conductive feature with no interface therebetween.
19 . The method of claim 1 , wherein the organic materials comprise polyimide, polybenzoxazole (PBO), or benzocyclobutene (BCB).
20 . The package structure of claim 17 , wherein the same material of the first dielectric layer and the second dielectric layer is polyimide.