Semiconductor device and method of fabricating the same
A semiconductor device may include first active patterns adjacent to each other on a substrate, first source/drain patterns respectively on the first active patterns and adjacent to each other, a first division structure and a second division structure crossing the first active patterns and arranged on the substrate such that adjacent ones of the first source/drain patterns are interposed between the first division structure and the second division structure, a first penetration via between adjacent ones of the first source/drain patterns, a first power line on the first penetration via and electrically connected to the first penetration via, a power delivery network layer on a bottom surface of the substrate, and a first lower penetration via between the power delivery network layer and the first penetration via.
1 . A semiconductor device, comprising:
a substrate;
first active patterns adjacent to each other on the substrate;
first source/drain patterns respectively on the first active patterns and adjacent to each other;
a first division structure and a second division structure crossing the first active patterns and arranged on the substrate such that adjacent ones of the first source/drain patterns are between the first division structure and the second division structure;
a first penetration via between the adjacent ones of the first source/drain patterns in a cross-sectional view;
a first power line on the first penetration via and electrically connected to the first penetration via;
a power delivery network layer on a bottom surface of the substrate; and
a first lower penetration via between the power delivery network layer and the first penetration via,
wherein the first penetration via between the first power line and the first lower penetration via.
2 . The semiconductor device of claim 1 , further comprising:
a second active pattern on the substrate; and
a second source/drain pattern, wherein
the second source/drain pattern is on the second active pattern,
the second source/drain pattern is between the first division structure and the second division structure,
the second source/drain pattern is adjacent to a one of the first source/drain patterns, and
the first penetration via is spaced apart from a region between the second source/drain pattern and the one of the first source/drain patterns.
3 . The semiconductor device of claim 2 , further comprising:
interconnection lines on the region between the second source/drain pattern and the one of the first source/drain patterns, wherein
the interconnection lines are at a same level as the first power line.
4 . The semiconductor device of claim 1 , further comprising:
second active patterns adjacent to each other on the substrate;
second source/drain patterns respectively on the second active patterns adjacent to each other, the second source/drain patterns between the first division structure and the second division structure;
a second penetration via between adjacent ones of the second source/drain patterns;
a second power line, which is provided on the second penetration via and is electrically connected to the second penetration via; and
a second lower penetration via, which is provided between the power delivery network layer and the second penetration via.
5 . The semiconductor device of claim 4 , wherein
the power delivery network layer is configured to apply a source voltage to one of the first power line and the second power line, and
the power delivery network layer is configured to apply a drain voltage to an other of the first power line and the second power line.
6 . The semiconductor device of claim 1 , wherein
an upper portion of the first penetration via has a first width,
a center portion of the first penetration via has a second width,
a lower portion of the first penetration via has a third width,
the first width is larger than a distance between the first source/drain patterns, and
the third width is smaller than the distance between the first source/drain patterns.
7 . The semiconductor device of claim 6 , wherein the second width is equal to the distance between the first source/drain patterns.
8 . The semiconductor device of claim 1 , wherein
as a distance to the bottom surface of the substrate decreases, a width of the first penetration via decreases, and
as the distance to the bottom surface of the substrate decreases, a width of the first lower penetration via increases.
9 . The semiconductor device of claim 1 , wherein the first penetration via is between the first division structure and the second division structure.
10 . The semiconductor device of claim 1 , further comprising:
a plurality of semiconductor patterns on each of the first active patterns, wherein
the plurality of semiconductor patterns are stacked on each other and spaced apart from each other, and
the plurality of semiconductor patterns are connected to a corresponding one of the first source/drain patterns.
11 . A semiconductor device, comprising:
a substrate;
a plurality of power lines on the substrate, the plurality of power lines arranged in a first direction and extending in a second direction, the plurality of power lines being parallel to each other;
a plurality of logic cells two-dimensionally provided on an active region of the substrate;
a plurality of tab cells arranged in the first direction on the substrate; and
a power delivery network layer below the substrate, wherein
the plurality of tab cells include a plurality of penetration vias, the plurality of penetration vias are electrically connected to the plurality of power lines, respectively,
the power delivery network layer is configured to apply voltages to the plurality of power lines through the plurality of penetration vias,
the plurality of logic cells include a plurality of gate electrodes,
the plurality of gate electrodes are in the second direction,
a width of each of the plurality of tab cells in the second direction is equal to a pitch between the plurality of gate electrodes or the width of each of the plurality of tab cells is two times the pitch between the plurality of gate electrodes,
wherein each of the plurality of tab cells includes a first division structure and a second division structure,
wherein the first division structure and the second division structure are on two borders in each of the plurality of tab cells, and
wherein the first division structure and the second division structure include an insulating material.
12 . The semiconductor device of claim 11 , wherein each of the plurality of tab cells includes a giant division structure in place of the active region.
13 . The semiconductor device of claim 11 , wherein
each of the plurality of tab cells comprises a giant division structure, a first division structure, and a second division structure,
the giant division structure is in place of the active region,
the first division structure and the second division structure are on two borders in each of the plurality of tab cells.
14 . The semiconductor device of claim 11 , further comprising:
a plurality of routing tab cells arranged in the first direction on the substrate; and
a plurality of interconnection lines on the plurality of logic cells, wherein
the plurality of routing tab cells comprise a plurality of signal penetration vias,
the plurality of signal penetration vias are electrically connected to the plurality of interconnection lines, respectively, and
the power delivery network layer is configured to deliver signals between at least two of the plurality of logic cells through the plurality of signal penetration vias.
15 . A semiconductor device, comprising:
a substrate;
a first power line and a second power line on the substrate, the first power line and the second power line being spaced apart from each other in a first direction and extending in a second direction to be parallel to each other;
a logic cell and a tab cell between the first power line and the second power line, the logic cell and the tab cell being adjacent to each other in the second direction;
a first active pattern and a second active pattern on the logic cell, the first active pattern and the second active pattern being spaced apart from each other in the first direction;
a first channel pattern and a first source/drain pattern on the first active pattern;
a second channel pattern and a second source/drain pattern on the second active pattern, a conductivity type of the second source/drain pattern being different than a conductivity type of the first source/drain pattern;
a gate electrode on the first channel pattern and the second channel pattern;
a gate insulating layer between the gate electrode and the first channel pattern and the second channel pattern;
a gate spacer on a side surface of the gate electrode;
a gate capping pattern on a top surface of the gate electrode;
an interlayer insulating layer covering the first source/drain pattern, the second source/drain pattern, and the gate capping pattern;
an active contact penetrating the interlayer insulating layer and being electrically connected to each of the first source/drain pattern and the second source/drain pattern;
a metal-semiconductor compound layer between the active contact and each of the first source/drain pattern and the second source/drain pattern;
a gate contact penetrating the interlayer insulating layer and the gate capping pattern, the gate contact being electrically connected to the gate electrode;
a first division structure and a second division structure respectively provided on two borders of the tab cell, which are opposite each other in the second direction;
a first penetration via and a second penetration via on the tab cell, the first penetration via and the second penetration via being electrically connected to the first power line and the second power line, respectively, and the first penetration via and the second penetration via each being interposed between the first division structure and the second division structure;
a power delivery network layer on a bottom surface of the substrate;
a first lower penetration via and a second lower penetration via, which are respectively provided between the power delivery network layer and the first penetration via and the second penetration via, wherein
as a distance to the bottom surface of the substrate decreases, a width of each of the first penetration via and the second penetration via decreases,
as the distance to the bottom surface of the substrate decreases, a width of each of the first lower penetration via and the second lower penetration via increases.
16 . The semiconductor device of claim 15 , wherein the first channel pattern and the second channel pattern each comprise a plurality of semiconductor patterns, which are stacked to be spaced apart from each other.
17 . The semiconductor device of claim 15 , wherein
the power delivery network layer is configured to apply a source voltage to one of the first power line and the second power line, and
the power delivery network layer is configured to apply a drain voltage to an other of the first power line and the second power line.
18 . The semiconductor device of claim 15 , further comprising:
interconnection lines on the logic cell, wherein
the interconnection lines are electrically connected to the active contact and the gate contact, respectively, and
the interconnection lines are at a same level as the first power line and the second power line.