Multi-chip packaging method
A multi-chip packaging method includes: flip-mounting a first chip on a substrate on which first metal posts are arranged; mold packaging the first metal posts and the first chip to obtain a first package; forming a first redistribution layer on the surface of the first package; flip-mounting a second chip on a surface of the first redistribution layer and mold packaging the second chip to obtain a second package; removing the substrate and forming a second redistribution layer on a surface of the first package; forming second metal posts spaced apart from each other and flip-mounting a third chip on a surface of the second redistribution layer, and mold packaging the third chip and the second metal posts to obtain a third package; forming solder balls on a surface of the third package, where the solder balls are electrically connected to the second redistribution layer through the second metal posts.
1 . A multi-chip packaging method, comprising:
flip-mounting a first chip on a substrate on which a first metal post is fixedly arranged, wherein the first metal post and the first chip are arranged on a same surface of the substrate at an interval;
mold packaging the first metal post and the first chip through a molding process to obtain a first package arranged on the substrate, wherein the first package comprises the first metal post, the first chip and a first molded package;
forming a first redistribution layer on a surface of the first package remote from the substrate, wherein the first metal post is electrically connected to the first redistribution layer;
flip-mounting a second chip on a surface of the first redistribution layer remote from the substrate, and mold packaging the second chip to obtain a second package arranged on the first redistribution layer, wherein the second package comprises the second chip and a second molded package, the second chip is electrically connected to the first redistribution layer, and the first redistribution layer is arranged between the first chip and the second chip;
removing the substrate, and forming a second redistribution layer on a surface of the first package remote from the second package, wherein the first chip and the first metal post are each electrically connected to the second redistribution layer;
forming second metal posts spaced apart from each other and flip-mounting a third chip on a surface of the second redistribution layer remote from the first package, and mold packaging the third chip and the second metal posts to obtain a third package, wherein the third chip and the second metal posts are each electrically connected to the second redistribution layer; and
forming solder balls on a surface of the third package remote from the first package to obtain a wafer, wherein each of the solder balls is electrically connected to the second redistribution layer through a corresponding one of the second metal posts.
2 . The multi-chip packaging method according to claim 1 , wherein the first package further comprises a passive element group, the multi-chip packaging method further comprises, before mold packaging the first metal post and the first chip through the molding process to obtain the first package arranged on the substrate, mounting the passive element group to the substrate, wherein in mold packaging the first metal post and the first chip through the molding process to obtain the first package arranged on the substrate, the first metal post, the first chip and the passive element group are mold packaged through the molding process.
3 . The multi-chip packaging method according to claim 1 , wherein mold packaging the first metal post and the first chip through the molding process to obtain the first package arranged on the substrate comprises:
mold packaging the first metal post and the first chip through the molding process to obtain a first temporary molded package; and
grinding the first temporary molded package to expose a back surface of the first chip and the first metal post, and obtaining the first package.
4 . The multi-chip packaging method according to claim 1 , wherein forming the second metal posts spaced apart from each other and flip-mounting the third chip on the surface of the second redistribution layer remote from the first package, and mold packaging the third chip and the second metal posts to obtain the third package comprises:
forming the second metal posts on a surface of the second redistribution layer remote from the first package by electroplating, wherein the second metal posts are electrically connected to the second redistribution layer;
flip-mounting the third chip on a surface of the second redistribution layer remote from the first package, wherein the third chip is electrically connected to the second redistribution layer;
mold packaging the second metal posts and the third chip through a molding process to obtain a second temporary molded package; and
grinding the second temporary molded package to expose a back surface of the third chip and the second metal posts to obtain the third package.
5 . The multi-chip packaging method according to claim 1 , wherein forming the solder balls on the surface of the third package remote from the first package to obtain the wafer comprises:
forming an under-ball pad layer on the surface of the third package remote from the first package by a photolithographic process; and
forming the solder balls by electroplating or ball planting on the under-ball pad layer.
6 . The multi-chip packaging method according to claim 1 , wherein after forming the solder balls on the surface of the third package remote from the first package to obtain the wafer, the multi-chip packaging method further comprises:
dividing the wafer into a plurality of monomers by cutting; and
soldering the solder balls of the monomers to an interposer to obtain a multi-chip package.