IP Library Granted Patent US 12685950
Granted Patent B2
US 12685950 · App. 17/839,343 · Granted Jul 21, 2026

Charged particle filter and removal system

Inventors: En Tian Lin (Hsinchu, TW); Chiao Ling Weng (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
B01D35/06B01D29/66B01D35/30C02F1/469B01D2201/30B01D2201/58B01D2221/14
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Quick Facts
Patent No.
US 12685950
App. No.
17/839,343
Granted
Jul 21, 2026
Kind
B2
Abstract

The present disclosure is directed to at least one embodiment of a filter that is configured to remove contaminants utilizing a first conductive mesh (e.g., first electrode) and a second conductive mesh (e.g., second electrode) that extends around the first conductive mesh. For example, the first conductive mesh may receive a first electrical signal and the second conductive mesh may receive a second electrical signal such that the first and second conductive meshes are oppositely charged from each other (e.g., the first conductive mesh is positively charged and the second conductive mesh is negatively charged). Anions that are present within the fluid or generated by an electrical field between the first and second conductive meshes may interact with the contaminants such that the contaminants are attracted to at least one of the first and second conductive meshes, respectively.

Claims (105)

1 . A system, comprising:

a conductive filter including:

a housing with an inner surface and a cavity delimited by the inner surface, the housing includes:

a first end;

a second end spaced apart from the first end;

a first fluid opening at the first end;

a second fluid opening at the second end;

a first backwash opening at the first end and spaced apart from the first fluid opening;

a second backwash opening at the second end and spaced apart from the second fluid opening; and

a center axis;

a first cylindrical conductive mesh in the cavity of the housing, and the first cylindrical conductive mesh is configured to, in operation, act as a first electrode and a first filter, wherein the first cylindrical conductive mesh is made of a first metal material, and the first cylindrical conductive mesh includes:

a third end at which the first cylindrical conductive mesh terminates, the third end is in close proximity to the first fluid opening and the first backwash opening;

a fourth end at which the first cylindrical conductive mesh terminates, the fourth end is opposite to the third end, and the fourth end is in close proximity to the second fluid opening and the second backwash opening;

a second cylindrical conductive mesh in the cavity of the housing, the second cylindrical conductive mesh is between the first conductive mesh and the inner surface of the housing, the second cylindrical conductive mesh completely and fully surrounds the first cylindrical conductive mesh, and the second cylindrical conductive mesh is configured to, in operation, act as a second electrode and a second filter, wherein the second cylindrical conductive mesh is made of a second metal material, and the second cylindrical conductive mesh includes:

a fifth end at which the second cylindrical conductive mesh terminates, the fifth end is in close proximity to the first fluid the second fluid opening and the second backwash opening; and

a sixth end at which the second cylindrical conductive mesh terminates, the sixth end is opposite to the fifth end, and the sixth end is in close proximity to the second fluid opening and the second backwash opening;

a first volume is defined and completely surrounded by the first cylindrical conductive mesh, the first volume being void;

a second volume is defined between the first cylindrical conductive mesh and the second cylindrical conductive mesh, the second volume completely spaces apart the first cylindrical conductive mesh from the second cylindrical conductive mesh, and the second volume completely surrounds the first cylindrical conductive mesh, the second volume being void; and

a third volume is defined between the second cylindrical conductive mesh and the inner surface of the housing, and the third volume completely surrounds the second cylindrical conductive mesh, the third volume being void; and

wherein the cavity of the housing, the first cylindrical conductive mesh, and the second cylindrical conductive mesh are concentric with the center axis;

a backwash fluid source in fluid communication with the first backwash fluid opening;

a first backwash valve between the backwash fluid source and the first backwash fluid opening;

a second backwash valve downstream from the second backwash opening;

a power supply electrically coupled to the first cylindrical conductive mesh and the second cylindrical conductive mesh;

one or more sensors configured to, in operation, monitor characteristics and qualities of the conductive filter; and

a processing system in electrical communication with the one or more sensors, the first valve, the second valve, the first backwash valve, the second backwash valve, the one or more sensors, and the power supply, and the processing system is configured to, in operation:

monitor the characteristics and qualities of the conductive filter collected by the one or more sensors;

display the characteristics and qualities of the conductive filter collected by the one or more sensors;

when one or more of the characteristics or qualities are compliant with one or more selected thresholds indicating the conductive filter is unsaturated, a filtering process is allowed to continue being performed; and

when one or more characteristics or qualities are non-compliant with the one or more selected thresholds indicating the conductive filter is saturated, a backwash process to regenerate or rejuvenate the conductive filter is initiated in which respective polarities of the first cylindrical conductive mesh and the second cylindrical conductive mesh are switched relative to each other

wherein a first fluid flow direction is utilized during the filtering process is in a first direction; and

wherein a second fluid flow direction is utilized during the backwash process opposite to the first fluid flow direction.

2 . The system of claim 1 , wherein one of the first backwash opening or the second backwash opening is configured to, in operation, be in fluid communication with a backwash fluid source in fluid communication with at least one of the following of the first backwash opening and the second backwash opening.

3 . The system of claim 1 , wherein the first cylindrical conductive mesh and the second cylindrical conductive mesh have a mesh size of equal to or less than 74-micrometers.

4 . The system of claim 1 , wherein the first cylindrical conductive mesh and the second cylindrical conductive mesh have a mesh size equal to or less than 3-micrometers.

5 . The system of claim 1 , wherein:

the housing has a first diameter that extends from the center axis to the inner surface;

the first cylindrical conductive mesh has a second diameter that extends from the center axis to the first cylindrical conductive mesh, the second diameter is less than the first diameter;

the second cylindrical conductive mesh has a third diameter that extends from the center axis to the second cylindrical conductive mesh, the third diameter is less than the first diameter and is greater than the second diameter.

6 . The system of claim 1 , wherein the first and second cylindrical conductive meshes include a coated stainless steel mesh.

7 . The system of claim 6 , wherein the coated stainless steel mesh includes a stainless steel mesh coated with a fluorine based polymer material.

8 . The system of claim 1 , wherein, in a top-plan view, the first cylindrical conductive mesh has a first circular profile and the second has a second circular profile, and the second circular profile completely surrounds the first circular profile.

9 . The system of claim 1 , wherein the first cylindrical conductive mesh is spaced apart from the second cylindrical conductive mesh by a distance equal to or greater than 1-centimeter (cm).

10 . A system, comprising:

a pump;

a first valve downstream the pump;

a second valve downstream the first valve; and

a conductive filter between the first valve and the second valve, the conductive filter including:

a housing downstream the first valve, the housing including:

a first end;

a second end opposite to the first end;

an inner surface;

a first fluid opening at the first end;

a second fluid opening at the second end, downstream the first fluid opening, and downstream the first valve;

a first backwash opening at the first end and spaced apart from the first fluid opening; and

a second backwash opening at the second end and spaced apart from the second fluid opening, the second backwash opening being downstream the first backwash opening;

a first right cylindrical conductive mesh within the housing, the first right cylindrical conductive mesh has a first diameter that remains consistent along each respective point of the first right cylindrical conductive mesh, wherein the first right cylindrical conductive mesh is configured to, in operation, act as a first electrode and a first filter, and wherein the first right cylindrical conductive mesh is made of a first metal material; and

a second right cylindrical conductive mesh within the housing, the second right cylindrical conductive mesh is between the first right cylindrical conductive mesh and the inner surface of the housing by a volume that extends from the first right cylindrical conductive mesh and the second right cylindrical conductive mesh, the second right cylindrical conductive mesh completely surrounds the first right cylindrical conductive mesh, the second right cylindrical conductive mesh has a second diameter that remains consistent along each respective point of the second right cylindrical conductive mesh, the second diameter is greater than the first diameter, and the second right cylindrical conductive mesh is concentric with the first right cylindrical conductive mesh, wherein the second right cylindrical conductive mesh is configured to, in operation, act as a second electrode and a second filter, and wherein the second right cylindrical conductive mesh is made of a second metal material;

a first backwash valve between the backwash fluid source and at least one of the following of the first backwash opening;

a second backwash valve downstream from the second backwash opening;

a power supply electrically coupled to the first right cylindrical conductive mesh and the second right cylindrical conductive mesh;

one or more sensors configured to, in operation, monitor characteristics and qualities of the conductive filter; and

a processing system in electrical communication with the one or more sensors, the first valve, the second valve, the first backwash valve, the second backwash valve, the one or more sensors, and the power supply, and the processing system is configured to, in operation:

monitor the characteristics and qualities of the conductive filter collected by the one or more sensors;

display the characteristics and qualities of the conductive filter collected by the one or more sensors;

when one or more of the characteristics or qualities are compliant with one or more selected thresholds indicating the conductive filter is unsaturated, a filtering process is allowed to continue being performed; and

when one or more characteristics or qualities are non-compliant with the one or more selected thresholds indicating the conductive filter is saturated, a backwash process to regenerate or rejuvenate the conductive filter is initiated in which respective polarities of the first right cylindrical conductive mesh and the second right cylindrical conductive mesh are switched relative to each other.

11 . The system of claim 10 , further comprising one or more power supplies in electrical communication with the first right cylindrical conductive mesh and the second right cylindrical conductive mesh.

12 . The system of claim 10 , further comprising a third valve downstream the conductive filter.

13 . The system of claim 12 , wherein the conductive filter is between the first valve and the third valve, and the conductive filter is between the second valve and the third valve.

14 . A system, comprising:

a pump;

a reservoir tank in fluid communication with the pump;

at least one workpiece processing tool in fluid communication with the reservoir tank;

a first valve downstream the pump;

a second valve downstream the first valve; and

a conductive filter between the first valve and the second valve, the conductive filter including:

a cylindrical housing downstream the first valve, the cylindrical housing including:

a first end and a second end opposite to the first end;

an inner surface;

a cavity delimited by the inner surface;

a first fluid opening at the first end and in fluid communication with the cavity;

a second fluid opening at the second end, downstream the first fluid opening, and downstream the first valve and in fluid communication with the cavity;

a center axis;

a first diameter that extends from the center axis to the inner surface of the cylindrical housing;

a first backwash opening proximate the first end, the first backwash opening separate from the first fluid opening, and the first backwash opening being in fluid communication with the cavity; and

a second backwash opening proximate the second end, the second backwash opening separate from the second fluid opening, the second backwash opening being in fluid communication with the cavity;

a first cylindrical conductive mesh within the cavity of the cylindrical housing, the first cylindrical conductive mesh being concentric the center axis, the first cylindrical conductive mesh having a second diameter that remains consistent at each respective point along the first cylindrical conductive mesh, the second diameter being less than the first diameter, and the first cylindrical conductive mesh is configured to, in operation during a filtering operation, receive a first electrical signal charging the first conductive mesh with a first charge type; and

a second cylindrical conductive mesh within the cavity of the cylindrical housing, the second cylindrical conductive mesh is between the first cylindrical conductive mesh and the inner surface of the cylindrical housing, the second conductive mesh having a third diameter that remains consistent at each respective point along the second cylindrical conductive mesh, the third diameter being less than the first diameter and greater than the second diameter, the second cylindrical conductive mesh completely surrounds the first cylindrical conductive mesh, the second cylindrical conductive mesh is configured to, in operation during the filtering operation, receive a second electrical signal charging the second conductive mesh with a second charge type opposite to the first charge type;

a backwash fluid source in fluid communication with the first backwash opening;

a first backwash valve between the backwash fluid source and at least one of the following of the first backwash opening;

a second backwash valve downstream from the second backwash opening;

a power supply electrically coupled to the first cylindrical conductive mesh and the second cylindrical conductive mesh;

one or more sensors configured to, in operation, monitor characteristics and qualities of the conductive filter; and

a processing system in electrical communication with the one or more sensors, the first valve, the second valve, the first backwash valve, the second backwash valve, the one or more sensors, and the power supply, and the processing system is configured to, in operation:

monitor the characteristics and qualities of the conductive filter collected by the one or more sensors;

display the characteristics and qualities of the conductive filter collected by the one or more sensors;

when one or more of the characteristics or qualities are compliant with one or more selected thresholds indicating the conductive filter is unsaturated, a filtering process is allowed to continue being performed; and

when one or more characteristics or qualities are non-compliant with the one or more selected thresholds indicating the conductive filter is saturated, a backwash process to regenerate or rejuvenate the conductive filter is initiated in which the second cylindrical conductive mesh is switched from the second charge type to the first charge type.

15 . The system of claim 14 , wherein the first charge type is a positive charge and the second charge type is a negative charge.

16 . The system of claim 14 , wherein the first charge type is a negative charge type and the second charge type is a positive charge type.

17 . The system of claim 14 , further comprising a backwash fluid source in fluid communication with at least one of the following of the first backwash opening and the second backwash opening.

18 . The system of claim 14 , further comprising a third valve between the reservoir tank and the at least one workpiece processing tool.

19 . The system of claim 14 , wherein the first cylindrical conductive mesh is spaced apart from the second cylindrical conductive mesh by a distance equal to or greater than 1-centimeter (cm).

20 . The system of claim 14 , wherein the first cylindrical conductive mesh and the second cylindrical conductive mesh have a mesh size equal to or less than 3-micrometers.