Wire bonding systems and related methods of forming a vertical wire structure

1 . A wire bonding system comprising:

a bond head assembly configured to carry a wire bonding tool, the bond head assembly including a first wire clamp, the wire bonding tool and the first wire clamp being configured to move together along a z-axis of the wire bonding system;

a support structure configured to support a workpiece, the workpiece being configured for wire bonding;

a movable stage assembly including a movable stage configured to move with respect to the wire bonding tool, the wire bonding tool being configured to press a wire engaged with the wire bonding tool against the movable stage to create a deformed portion of the wire, wherein an end portion of the wire extends from the deformed portion; and

a second wire clamp, the second wire clamp being stationary with respect to the wire bonding tool and the first wire clamp along the z-axis,

wherein the first wire clamp is configured to be closed and move downward along the z-axis, with the second wire clamp open, to advance the end portion of the wire prior to formation of the deformed portion of the wire,

wherein the first wire clamp is configured to be open and move downward along the z-axis, with the second wire clamp closed, to at least partially straighten the end portion of the wire after formation of the deformed portion of the wire,

wherein the movable stage is configured to move to a retracted position away from the wire bonding tool simultaneously with downward motion of the first wire clamp along the z-axis after formation of the deformed portion of the wire.

2 . The wire bonding system of claim 1 wherein the end portion is a wire tail.

3 . The wire bonding system of claim 1 wherein the end portion is configured to form a vertical wire structure on the workpiece.

4 . The wire bonding system of claim 1 wherein the movable stage is supported by the bond head assembly.

5 . The wire bonding system of claim 1 wherein the movable stage and the bond head assembly are supported by a common structure of the wire bonding system.

6 . The wire bonding system of claim 1 wherein the movable stage assembly includes a motion system for moving the movable stage between a first position and a second position.

7 . The wire bonding system of claim 6 wherein the movable stage assembly includes an arm assembly carrying the movable stage, the motion system moving the movable stage between the first position and the second position by moving the arm assembly.

8 . The wire bonding system of claim 6 wherein the first position is the retracted position and the second position is a contact position, the wire bonding tool being configured to press the wire against the movable stage at the contact position.

9 . The wire bonding system of claim 1 wherein the wire includes a wire tail extending below the wire bonding tool, and wherein movement of the movable stage from a first position to a second position results in bending of the wire tail through contact with the movable stage.

10 . The wire bonding system of claim 9 wherein the wire bonding tool is configured to press the wire engaged with the wire bonding tool against the movable stage to create the deformed portion of the wire after bending of the wire tail through contact with the movable stage.

11 . The wire bonding system of claim 1 wherein the wire includes a wire tail extending below the wire bonding tool, and wherein movement of the movable stage from a first position to a second position results in the movable stage being positioned below an end of the wire tail.

12 . The wire bonding system of claim 11 wherein the bond head assembly is configured to press the wire engaged with the wire bonding tool against the movable stage to create the deformed portion of the wire after the movable stage is positioned below the end of the wire tail.

13 . A method of forming a vertical wire structure on a wire bonding system, the method comprising the steps of:

(a) providing an end portion of a wire below a tip of a wire bonding tool on the wire bonding system;

(b) moving a movable stage with respect to the wire bonding tool;

(c) pressing a portion of the wire adjacent to the end portion against the movable stage with the wire bonding tool to form a deformed portion of the wire; and

(d) forming the vertical wire structure on a workpiece using the end portion of the wire.

14 . The method of claim 13 wherein the end portion of the wire extends from the deformed portion, and step (b) includes bending the end portion of the wire through contact with the movable stage.

15 . The method of claim 13 wherein the end portion of the wire extends from the deformed portion, and step (b) includes moving the movable stage below the end portion of the wire.

16 . The method of claim 13 wherein step (a) includes advancing the end portion of the wire below the tip of the wire bonding tool.

17 . The method of claim 16 wherein the step of advancing includes (i) operating a first wire clamp and a second wire clamp of the wire bonding system in conjunction with (ii) moving of the first clamp and the wire bonding tool, to advance the end portion of the wire below the tip of the wire bonding tool.

18 . The method of claim 16 wherein the step of advancing includes using ultrasonic energy to assist in the step of advancing the end portion of the wire.

19 . The method of claim 13 further comprising a step of forming a free air ball on an end of the end portion after step (a), and wherein step (d) includes bonding the free air ball to the workpiece such that the bonded free air ball is a lower part of the vertical wire structure.

20 . The method of claim 13 further comprising a step of lowering the wire bonding tool with respect to the end portion of wire, after step (c), to at least partially straighten the end portion of the wire.

21 . The method of claim 20 further comprising a step of forming a free air ball on an end of the end portion after step (a), the method further comprising a step of seating the free air ball at the tip of the wire bonding tool prior to step (d), and wherein step (d) includes bonding the free air ball to the workpiece such that the bonded free air ball is a lower part of the vertical wire structure.

22 . The method of claim 21 wherein step (d) includes raising the wire bonding tool above the bonded free air ball, and tearing the wire at the deformed portion.