Laser apparatus and control method

1 . A laser apparatus comprising:

first light sources that output respective first laser beams to perform preliminary heating of respective first irradiation positions on an object;

a second light source that outputs a second laser beam to perform main heating of a second irradiation position on the object;

an input device that receives an input of an irradiation pattern from a user; and

a controller, wherein

the controller is configured to:

control the second light source to output the second laser beam to the second irradiation position after a predetermined period of time has elapsed since outputting the first laser beams for the preliminary heating; and

based on the irradiation pattern, change at least one of a relative positional relationship and the first irradiation positions of the first laser beams, the relative positional relationship being a relative positional relationship between the respective first irradiation positions of the first laser beams on the object and the second irradiation position of the second laser beam on the object.

2 . The laser apparatus according to claim 1 , further comprising an optical element that splits the second laser beam into parts,

wherein the irradiation pattern includes a pattern in which respective positions corresponding to the split parts of the second laser beam are irradiated with some of the first laser beams.

3 . The laser apparatus according to claim 1 , wherein the irradiation pattern includes a pattern in which the object is irradiated with one or more of the first laser beama, and subsequently, the first irradiation position irradiated with the one or more first laser beams are irradiated with the second laser beam.

4 . The laser apparatus according to claim 1 , further comprising a condensing lens that collects the first laser beams and causes the first laser beams to be applied to the object, wherein

the condensing lens has a pass-through portion that causes the second laser beam to pass therethrough, and

the second laser beam that has passed through the pass-through portion is applied to the object.

5 . The laser apparatus according to claim 4 , wherein the pass-through portion is a hole.

6 . The laser apparatus according to claim 4 , wherein the pass-through portion includes a pass-through coating for causing the second laser beam to pass therethrough.

7 . The laser apparatus according to claim 1 , wherein each of the first light sources is formed of a diode laser device.

8 . The laser apparatus according to claim 1 , wherein the second light source is formed of a single-mode fiber laser device.

9 . The laser apparatus according to claim 1 , wherein

each of the first laser beams is a laser beam having a wavelength of not less than 400 nm and not greater than 550 nm, and

the second laser beam is a laser beam having a wavelength of not less than 900 nm and not greater than 1100 nm.

10 . A laser apparatus comprising:

first light sources that output respective first laser beams to perform preliminary heating of respective first irradiation positions on an object;

a second light source that outputs a second laser beam to perform main heating of a second irradiation position on the object;

an input device that receives an input of an irradiation pattern from a user; and

a controller, wherein

the controller is configured to:

control the second light source to output the second laser beam to the second irradiation position after a predetermined period of time has elapsed since outputting the first laser beams for the preliminary heating; and

based on the irradiation pattern, change a relative positional relationship between the first irradiation positions of the first laser beams on the object and the second irradiation position of the second laser beam.

11 . A laser apparatus comprising:

first light sources that output respective first laser beams to perform preliminary heating of respective first irradiation positions on an object;

second light sources that output respective second laser beams to perform main heating of respective second irradiation positions on the object;

an input device that receives an input of an irradiation pattern from a user; and

a controller, wherein

the controller is configured to:

control the second light sources to output the second laser beams to the second irradiation positions after a predetermined period of time has elapsed since outputting the first laser beams for the preliminary heating; and

based on the irradiation pattern, change at least one of a relative positional relationship and each of the respective second irradiation positions of the second laser beams, the relative positional relationship being a relative positional relationship between the respective first irradiation positions of the first laser beams on the object and the respective second irradiation positions of the second laser beams on the object.

12 . A laser apparatus comprising:

first light sources that output respective first laser beams to perform preliminary heating of respective first irradiation positions on an object;

a second light source that outputs a second laser beam to perform main heating of a second irradiation position on the object;

a first optical system that collects the first laser beams;

a second optical system that collects the second laser beam;

an input device that receives an input of an irradiation pattern from a user; and

a controller,

wherein the controller is configured to:

control the second light source to output the second laser beam to the second irradiation position after a predetermined period of time has elapsed since outputting the first laser beams for the preliminary heating, and

based on the irradiation pattern, change at least one of a relative positional relationship and the first irradiation positions of the first laser beams, the relative positional relationship being a relative positional relationship between the respective first irradiation positions of the first laser beams on the object and the second irradiation position of the second laser beam on the object, and

wherein the first optical system and the second optical system are shifted from each other in a direction of an optical axis.

13 . A control method for a laser apparatus that processes an object, the control method comprising:

outputting first laser beams to perform preliminary heating of respective first irradiation positions on the object;

outputting a second laser beam to perform main heating of a second irradiation position on the object;

outputting the second laser beam to the second irradiation position, after a predetermined period of time has elapsed since outputting the first laser beam for the preliminary heating;

inputting a first irradiation pattern; and

based on the irradiation pattern, changing at least one of

a relative positional relationship between the respective first irradiation positions of the first laser beams on the object and the second irradiation position of the second laser beam on the object, and

the first irradiation positions.

14 . The control method according to claim 13 , wherein the changing of the relative positional relationship includes

determining the second irradiation position, and

determining the first irradiation positions based on the determined second irradiation position.