Film forming system, method for controlling film forming system, and article manufacturing method

1 . A method for controlling a film forming system including a conveyance path extending in a first direction, a first conveyance carrier configured to hold a first substrate and a first mask and move inside the conveyance path, the first substrate including a film formation area, the first mask being configured to shield a film non-formation area other than the film formation area, a second conveyance carrier configured to hold a second substrate and move inside the conveyance path, the second substrate including a film formation area, a conveyance unit disposed on the conveyance path and configured to move the first conveyance carrier and the second conveyance carrier in the first direction and a second direction intersecting the first direction, the conveyance unit including stators and magnets, a film formation unit located along the conveyance path and configured to form a film on the film formation area of the first substrate and the second substrate, a mask supply unit located along the conveyance path and configured to supply the first conveyance carrier with the first mask, and a control unit including a processor and a memory, the method comprising:

conveying, by the control unit, the first conveyance carrier holding the first substrate to the mask supply unit;

causing, by the control unit, the first conveyance carrier to hold the first mask in the mask supply unit;

conveying, by the control unit, the first conveyance carrier holding the first substrate and the first mask to the film formation unit;

forming, by the control unit, a film on the film formation area of the first substrate held by the first conveyance carrier via the first mask in the film formation unit; and

wherein, after the film is formed on the film formation area of the first substrate held by the first conveyance carrier via the first mask in the film formation unit, the control unit causes the first conveyance carrier to place the first mask on a pedestal in the film formation unit and moves the first conveyance carrier to the conveyance path and

conveying, by the control unit, the second conveyance carrier to the firm formation unit without conveying to the mask supply unit.

2 . The method for controlling the film forming system according to claim 1 , wherein in forming the film on the film formation area of the first substrate held by the first conveyance carrier via the first mask in the film formation unit, the control unit levitates the first conveyance carrier over a pedestal of the film formation unit.

3 . The method for controlling the film forming system according to claim 1 ,

wherein the film forming system includes a third conveyance carrier configured to hold a third substrate and a second mask and move inside the conveyance path, the third substrate including a film formation area, the second mask being configured to shield a film non-formation area other than the film formation area,

wherein the method comprises:

conveying, by the control unit, the second conveyance carrier holding the third substrate to the mask supply unit;

causing, by the control unit, the third conveyance carrier to hold the second mask in the mask supply unit; and

conveying, by the control unit, the third conveyance carrier holding the third substrate and the second mask to the film formation unit,

wherein, in forming the film on the film formation area of the first substrate held by the first conveyance carrier via the first mask in the film formation unit, the control unit performs alignment on the third conveyance carrier between the third substrate and the second mask held by the third conveyance carrier.

4 . A non-transitory computer-readable storage medium storing a control program capable of executing the method for controlling the film forming system according to claim 1 .

5 . An article manufacturing method for controlling a film forming system including a conveyance path extending in a first direction, a first conveyance carrier configured to hold a first substrate and a first mask and move inside the conveyance path, the first substrate including a film formation area, the first mask being configured to shield a film non-formation area other than the film formation area, a second conveyance carrier configured to hold a second substrate and move inside the conveyance path, the second substrate including a film formation area, a conveyance unit disposed on the conveyance path and configured to move the first conveyance carrier and the second conveyance carrier in the first direction and a second direction intersecting the first direction, the conveyance unit including stators and magnets, a film formation unit located along the conveyance path and configured to form a film on the film formation area of the first substrate and the second substrate, a mask supply unit located along the conveyance path and configured to supply the first conveyance carrier with the first mask, and a control unit including a processor and a memory, the method comprising:

conveying, by the control unit, the first conveyance carrier holding the first substrate to the mask supply unit;

causing, by the control unit, the first conveyance carrier to hold the first mask in the mask supply unit;

conveying, by the control unit, the first conveyance carrier holding the first substrate and the first mask to the film formation unit;

manufacturing an article by forming, by the control unit, the film on the film formation area of the first substrate held by the first conveyance carrier via the first mask in the film formation unit;

wherein, after the film is formed on the film formation area of the first substrate held by the first conveyance carrier via the first mask in the film formation unit, the control unit causes the first conveyance carrier to place the first mask on a pedestal in the film formation unit and moves the first conveyance carrier to the conveyance path, and

conveying, by the control unit, the second conveyance carrier to the firm formation unit without conveying to the mask supply unit.