Movable coolant processing apparatus
A temperature control medium processing apparatus configured to collect a temperature control medium from a module using the temperature control medium or refill the module with the temperature control medium includes a tank configured to store the temperature control medium therein; a first inlet path which is connected to a first inlet opening of the tank, and through which the temperature control medium is introduced; an inlet connector configured to connect the first inlet path and a path from the module; an outlet path which is connected to an outlet opening of the tank, and through which the temperature control medium flows out; an outlet connector configured to connect the outlet path and a path to the module; and a pump provided at the outlet path, and configured to force the temperature control medium stored in the tank to flow out.
1 . A coolant system including a movable coolant processing apparatus detachably connected to a coolant circulation path for circulating a coolant between a substrate processor and a chiller, the coolant circulation path including a first path for supplying the coolant to the substrate processor from the chiller and a second path for returning the coolant to the chiller from the substrate processor, the movable coolant processing apparatus comprising:
a housing;
movers configured to move the housing;
a first connector detachably connected to a first connection path branching from the first path;
a second connector detachably connected to a second connection path branching from the second path;
a pump disposed in the housing;
a battery electrically connected to the pump; and
a coolant tank disposed in the housing, wherein the coolant circulated between the substrate processor and the chiller is collected from the second path to the coolant tank through the second connection path and the second connector before maintenance of the substrate processor or the chiller, and then the collected coolant is refilled from the coolant tank to the first path through the first connection path and the first connector by the pump after the maintenance of the substrate processor or the chiller.
2 . The coolant system according to claim 1 ,
wherein the movers include wheels attached on a bottom surface of the housing.
3 . The coolant system according to claim 1 ,
wherein the movers are configured such that the housing is self-propelled.
4 . The coolant system according to claim 1 ,
wherein the coolant tank has an additional coolant inlet connected to the second connector without the pump.
5 . The coolant system according to claim 1 , further comprising:
a third connector detachably connected to an exhaust path,
wherein the coolant tank has an exhaust opening connected to the third connector.
6 . The coolant system according to claim 5 ,
wherein the first connector is a first female coupler detachably connected to a first male coupler attached to the first connection path,
the second connector is a second male coupler detachably connected to a second female coupler attached to the second connection path, and
the third connector is a third female coupler detachably connected to a third male coupler attached to the exhaust path.
7 . The coolant system according to claim 5 ,
wherein the first connector is a first male coupler detachably connected to a first female coupler attached to the first connection path,
the second connector is a second female coupler detachably connected to a second male coupler attached to the second connection path, and
the third connector is a third male coupler detachably connected to a third female coupler attached to the exhaust path.
8 . The coolant system according to claim 1 ,
wherein the first connector is a first female coupler detachably connected to a first male coupler attached to the first connection path, and
the second connector is a second male coupler detachably connected to a second female coupler attached to the second connection path.
9 . The coolant system according to claim 1 ,
wherein the first connector is a first male coupler detachably connected to a first female coupler attached to the first connection path, and
the second connector is a second female coupler detachably connected to a second male coupler attached to the second connection path.
10 . The coolant system according to claim 1 , further comprising:
a check valve connected between the pump and the second connector, and configured to suppress the coolant from flowing toward the pump.
11 . The coolant system according to claim 1 , wherein the pump is located outside the coolant tank and the pump is directly connected to the coolant tank.