Apparatus and method for determining the surface profile of a semiconductor substrate using a laser scanning technique
Systems and methods are provided herein for determining the planarity of a semiconductor substrate. The systems and methods described herein use a metrology tool that utilizes a non-contact, laser-scanning technique to determine the planarity a semiconductor substrate. The metrology tool disclosed herein uses a fixed optical system to measure the slope of the substrate surface at multiple points across the substrate surface as the semiconductor substrate is moved in at least one direction (e.g., an x and/or y direction). The slope measurements obtained across the substrate surface are then combined to determine a surface profile of the semiconductor substrate, or used to calculate the amount of bow or warp attributed to the substrate surface.
1 . A metrology tool for determining a surface profile of a substrate, the metrology tool comprising:
a wafer mount configured to support the substrate;
at least one movable stage coupled to move the wafer mount in at least one direction;
an optical system comprising a plurality of components, which remain stationary at fixed positions while the at least one movable stage moves the wafer mount and the substrate supported thereon in the at least one direction, wherein plurality of components comprises:
a beamsplitter coupled to redirect a coherent light beam onto a surface of the substrate, wherein as the wafer mount moves in the at least one direction, the coherent light beam redirected by the beamsplitter is reflected from the surface of the substrate at each of a plurality of measurement points and transmitted back through the beamsplitter as reflected light;
a lens coupled to receive the reflected light transmitted through the beamsplitter, wherein as the wafer mount moves in the at least one direction, the reflected light from each of the plurality of measurement points is transmitted through the lens: (a) without redirection if a slope of the surface of the substrate is zero at a given measurement point, and (b) with redirection if the slope of the surface of the substrate is not zero at the given measurement point; and
an optical sensor coupled to receive the reflected light transmitted through the lens, wherein as the wafer mount moves in the at least one direction, the optical sensor detects a position of the reflected light from each of the plurality of measurement points incident on the optical sensor, and generates a plurality of output data corresponding to the detected positions of the reflected light; and
a processing device coupled to receive the plurality of output data from the optical system, wherein the processing device executes program instructions stored in non-transitory memory to:
convert the plurality of output data into a plurality of slope data points, each corresponding to a slope of the surface of the substrate at a different measurement point on the surface of the substrate; and
combine the plurality of slope data points to determine a surface profile of the substrate.
2 . The metrology tool of claim 1 , wherein the plurality of components further comprise
a laser light source configured to emit the coherent light beam; and
wherein the beamsplitter is coupled to receive the coherent light beam emitted by the laser light source and configured to redirect the coherent light beam onto the surface of the substrate.
3 . The metrology tool of claim 1 , wherein the output data corresponding to each detected position of the reflected light corresponds to: (a) a zero slope position if the slope of the surface of the substrate is zero at a given measurement point, and (b) a position displaced from the zero slope position if the slope of the surface of the substrate is not zero at the given measurement point.
4 . The metrology tool of claim 3 , wherein the processing device executes the program instructions stored in non-transitory memory to:
convert the output data corresponding to each detected position of the reflected light into a slope data point that corresponds to the slope of the surface of the substrate at each corresponding measurement point.
5 . The metrology tool of claim 1 , wherein the at least one movable stage is configured to move the wafer mount in the at least one direction to scan the coherent light beam across the surface of the substrate.
6 . The metrology tool of claim 5 , wherein the substrate is supported by the wafer mount in a horizontal orientation, or a vertical orientation, while the coherent light beam is scanned across the surface of the substrate.
7 . The metrology tool of claim 1 , wherein the at least one movable stage is configured to move the wafer mount in a first direction to scan the coherent light beam across the surface of the substrate in a line, which passes through a center point on the surface of the substrate.
8 . The metrology tool of claim 7 , wherein as the coherent light beam is scanned across the surface of the substrate in the line, the optical system: (a) detects light reflected from a first set of measurement points, which are spaced across the surface of the substrate and located along the line, and (b) generates a first set of output data corresponding to the reflected light detected from the first set of measurement points.
9 . The metrology tool of claim 8 , wherein the processing device is coupled to receive the first set of output data and configured to execute the program instructions stored in the non-transitory memory to:
convert the first set of output data into a first set of slope data points, each corresponding to a slope of the surface of the substrate at a different measurement point located along the line; and
calculate a bow value corresponding to the substrate using the first set of slope data points.
10 . The metrology tool of claim 1 , wherein the at least one movable stage is configured to move the wafer mount in a first direction and a second direction orthogonal to the first direction to scan the coherent light beam across the surface of the substrate in a two-dimensional (2D) array.
11 . The metrology tool of claim 10 , wherein as the coherent light beam is scanned across the surface of the substrate in the 2D array, the optical system: (a) detects light reflected from a second set of measurement points, which are spaced across the surface of the substrate and located within the 2D array, and (b) generates a second set of output data corresponding to the reflected light detected from the second set of measurement points.
12 . The metrology tool of claim 11 , wherein the processing device is coupled to receive the second set of output data and configured to execute the program instructions stored in the non-transitory memory to:
convert the second set of output data into a second set of slope data points, each corresponding to a slope of the surface of the substrate at a different measurement point within the 2D array; and
calculate at least one of a bow value and a warp value corresponding to the substrate using the second set of slope data points.
13 . A method of determining a surface profile of a substrate, the method comprising:
moving the substrate in at least one direction, the substrate having a substrate surface;
directing a coherent light beam onto the substrate surface via a beamsplitter, wherein as the substrate moves in the at least one direction, the coherent light beam is scanned across the substrate surface, reflected from the surface of the substrate at each of a plurality of measurement points spaced across the substrate surface and transmitted back through the beamsplitter as reflected light;
transmitting the reflected light through a lens, wherein as the substrate moves in the at least one direction, the reflected light from each of the plurality of measurement points is transmitted through the lens: (a) without redirection if a slope of the surface of the substrate is zero at a given measurement point, and (b) with redirection if the slope of the surface of the substrate is not zero at the given measurement point;
detecting the reflected light transmitted through the lens, wherein the reflected light is detected at each of the plurality of measurement points as the substrate moves in the at least one direction;
generating a plurality of output data, wherein the plurality of output data corresponds to the reflected light detected at each of the plurality of measurement points as the substrate moves in the at least one direction;
converting the plurality of output data into a plurality of slope data points, wherein each slope data point corresponds to a slope of the substrate surface at a different measurement point on the substrate; and
determining the surface profile of the substrate using the plurality of slope data points.
14 . The method of claim 13 , further comprising supporting the substrate in a horizontal orientation, or a vertical orientation, while the coherent light beam is scanned across the substrate surface.
15 . The method of claim 13 , wherein said moving the substrate in the at least one direction comprises:
moving the substrate in a first direction to scan the coherent light beam across the surface of the substrate in a line, which passes through a center point on the substrate surface.
16 . The method of claim 15 , wherein said detecting the reflected light comprises detecting the reflected light from a first set of measurement points, which are spaced across the substrate surface and located along the line, and wherein said generating the plurality of output data comprises generating a first set of output data corresponding to the reflected light detected from the first set of measurement points.
17 . The method of claim 16 , wherein said converting the plurality of output data comprises converting the first set of output data into a first set of slope data points, each corresponding to a slope of the substrate surface at a different measurement point located along the line, and wherein said determining the surface profile of the substrate comprises calculating a bow value corresponding to the substrate using the first set of slope data points.
18 . The method of claim 13 , wherein said moving the substrate in the at least one direction comprises:
moving the substrate in a first direction and a second direction orthogonal to the first direction to scan the coherent light beam across the substrate surface in a two-dimensional (2D) array.
19 . The method of claim 18 , wherein said detecting the reflected light comprises detecting the reflected light from a second set of measurement points, which are spaced across the substrate surface and located within the 2D array, and wherein said generating the plurality of output data comprises generating a second set of output data corresponding to the reflected light detected from the second set of measurement points.
20 . The method of claim 19 , wherein said converting the plurality of output data comprises converting the second set of output data into a second set of slope data points, each corresponding to a slope of the substrate surface at a different measurement point within the 2D array, and wherein said determining the surface profile of the substrate comprises calculating at least one of a bow value and a warp value corresponding to the substrate using the second set of slope data points.