IP Library Granted Patent US 12687430
Granted Patent B2
US 12687430 · App. 17/759,518 · Granted Jul 21, 2026

Spectroferometer

Inventor: Dominic Murphy (Wilmington, DE)
Assignee: Layer Metrics Inc.
G01J3/0218G01J3/18G01J3/45G01J2003/1842
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12687430
App. No.
17/759,518
Granted
Jul 21, 2026
Kind
B2
Abstract

Spectroferometers and methods of use are provided. The spectroferometers includes an enclosure, one or more interferometer beam-splitting elements, and one or more spectrometer beam-dispersing elements. The one or more interferometer beam-splitting elements and the one or more spectrometer beam-dispersing elements are housed in the enclosure, share one or more radiation sensitive elements, which are arranged to generate a signal in response to incident electromagnetic radiation, and each generate one or more optical outputs. The one or more optical outputs are arranged such that respective optical axes intersect substantially in a plane of the one or more radiation sensitive elements.

Claims (76)

1 . An apparatus comprising:

an enclosure;

one or more interferometer beam-splitting elements; and

one or more spectrometer beam-dispersing elements,

wherein the one or more interferometer beam-splitting elements and the one or more spectrometer beam-dispersing elements:

are housed in the enclosure;

share one or more radiation sensitive elements, which are arranged to generate a signal in response to incident electromagnetic radiation; and

each generate one or more optical outputs,

wherein the one or more optical outputs are arranged such that respective optical axes intersect substantially in a plane of the one or more radiation sensitive elements,

wherein the one or more optical outputs of the one or more interferometer beam-splitting elements comprise two or more optical outputs configured to form an interference pattern on the one or more radiation sensitive elements, and

wherein the one or more optical outputs of the one or more spectrometer beam-dispersing elements comprise one or more outputs configured to form a diffraction fringe pattern on the one or more radiation sensitive elements.

2 . The apparatus of claim 1 , further comprising one or more reflective surfaces between the optical outputs.

3 . The apparatus of claim 2 , wherein the one or more reflective surfaces include one or more optical coatings on one or more of the reflective surfaces.

4 . The apparatus of claim 3 , wherein the one or more of the reflective surfaces are microelectromechanical systems (MEMS) elements,

wherein each of the MEMS elements are controllable and are configured to reflect a portion of the incident electromagnetic radiation.

5 . The apparatus of claim 1 , wherein the one or more radiation sensitive elements are configured to detect one or more inputs originating from one or more spatially distinct locations.

6 . The apparatus of claim 5 , wherein the one or more inputs include the one or more optical outputs from the one or more interferometer beam-splitting elements and/or the one or more spectrometer beam-dispersing elements.

7 . The apparatus of claim 5 , wherein the one or more inputs originate from one or more imaging bundles.

8 . The apparatus of claim 5 , wherein the one or more inputs originate from one or more optical waveguides.

9 . The apparatus of claim 8 , wherein the one or more optical waveguides include one or more optical fibers.

10 . The apparatus of claim 1 , further comprising one or more optical waveguides.

11 . The apparatus of claim 10 , wherein the one or more optical waveguides include one or more optical fibers.

12 . The apparatus of claim 11 , wherein the one or more optical fibers include one or more of: microstructured optical fibers; and multicore optical fibers.

13 . The apparatus of claim 1 , wherein the one or more interferometer beam-splitting elements are dynamically adjustable.

14 . The apparatus of claim 1 , wherein the one or more spectrometer beam-dispersing elements are dynamically adjustable.

15 . The apparatus of claim 1 , further comprising:

one or more processors; and

a memory, configured to store instructions which, when executed by the one or more processors, cause the one or more processors to:

process one or more signals generated by the one or more radiation sensitive elements; and

generate a spatial intensity profile of the incident electromagnetic radiation.

16 . The apparatus of claim 15 , wherein the instructions, when executed by the one or more processors, further cause the one or more processors to:

recover data from the spatial intensity profile using one or more of:

transform processing techniques;

curve fitting techniques;

frequency filtering techniques;

fringe counting techniques;

interpolation techniques;

weighting techniques;

one or more orders of differentiation;

one or more orders of integration;

predictive analysis techniques;

machine learning techniques; and

artificial intelligence techniques,

wherein the data includes one or more of: temporal data; spectral data; phase data; amplitude data; and polarization data.

17 . The apparatus of claim 1 , wherein the one or more spectrometer beam-dispersing elements comprise elements of a transmission diffraction grating.

18 . The apparatus of claim 1 , wherein the one or more interferometer beam-splitting elements are configured to provide substantially equal light at each of two or more of the one or more optical outputs of the one or more interferometer beam-splitting elements.

19 . A method of analyzing electromagnetic radiation, comprising:

providing an apparatus, including:

an enclosure;

a processor;

a memory;

one or more interferometer beam-splitting elements; and

one or more spectrometer beam-dispersing elements,

wherein the one or more interferometer beam-splitting elements and the one or more spectrometer beam-dispersing elements:

are housed in the enclosure;

share one or more radiation sensitive elements, which are arranged to generate a signal in response to incident electromagnetic radiation; and

each generate one or more optical outputs,

wherein the one or more optical outputs are arranged such that respective optical axes intersect substantially in a plane of the one or more radiation sensitive elements;

processing, using the processor, one or more signals generated by the one or more radiation sensitive elements,

wherein the one or more optical outputs of the one or more interferometer beam-splitting elements comprise two or more optical outputs configured to form an interference pattern on the one or more radiation sensitive elements, and

wherein the one or more optical outputs of the one or more spectrometer beam-dispersing elements comprise one or more outputs configured to form a diffraction fringe pattern on the one or more radiation sensitive elements; and

generating a spatial intensity profile of the incident electromagnetic radiation.

20 . The method of claim 19 , further comprising:

recovering, using the processor, data from the spatial intensity profile using one or more of:

transform processing techniques;

curve fitting techniques;

frequency filtering techniques;

fringe counting techniques;

interpolation techniques;

weighting techniques;

one or more orders of differentiation;

one or more orders of integration;

predictive analysis techniques;

machine learning techniques; and

artificial intelligence techniques,

wherein the data includes one or more of: temporal data; spectral data; phase data; amplitude data; and polarization data.