Probe and inspection apparatus including the same
An inspection apparatus is provided. The inspection apparatus includes a substrate extending in a first direction and a second direction perpendicular to the first direction, a receiver antenna arranged on the substrate and including first and second antenna electrodes, a first waveguide on the substrate, and a second waveguide on the substrate, wherein the first antenna electrode overlaps the first waveguide in a third direction that is perpendicular to the first direction and the second direction, and the second antenna electrode overlaps the second waveguide in the third direction.
1 . An inspection apparatus comprising:
a substrate extending in a first direction and a second direction perpendicular to the first direction;
a receiver antenna arranged on the substrate and comprising first and second antenna electrodes;
a first waveguide on the substrate; and
a second waveguide on the substrate,
wherein the first antenna electrode overlaps the first waveguide in a third direction that is perpendicular to the first direction and the second direction, and
the second antenna electrode overlaps the second waveguide in the third direction.
2 . The inspection apparatus of claim 1 , wherein the first waveguide comprises:
a first lower cladding on the substrate;
a first core on the first lower cladding; and
a first upper cladding on the first core.
3 . The inspection apparatus of claim 2 , wherein the first antenna electrode is arranged between the substrate and the first lower cladding.
4 . The inspection apparatus of claim 2 , wherein the first antenna electrode is arranged between the first lower cladding and the first core.
5 . The inspection apparatus of claim 2 , wherein the first antenna electrode is arranged between the first core and the first upper cladding.
6 . The inspection apparatus of claim 2 , wherein the first core comprises a first base and a first protrusion protruding from the first base in the third direction.
7 . The inspection apparatus of claim 6 , wherein an end portion of the first antenna electrode overlaps the first base in the third direction.
8 . The inspection apparatus of claim 6 , wherein an end portion of the first antenna electrode overlaps the first protrusion in the third direction.
9 . The inspection apparatus of claim 6 , wherein the first antenna electrode comprises a bent portion contacting the first protrusion.
10 . The inspection apparatus of claim 9 , wherein the bent portion contacts an upper surface of the first protrusion.
11 . The inspection apparatus of claim 9 , wherein the bent portion contacts a first side surface of the first protrusion and a second side surface of the first protrusion, which is opposite to the first side surface of the first protrusion.
12 . The inspection apparatus of claim 9 , wherein the bent portion contacts a first side surface of the first protrusion and is apart from a second side surface of the first protrusion, which is opposite to the first side surface of the first protrusion.