X-ray fluorescence spectrometer
An X-ray fluorescence spectrometer includes: a sample stage; an X-ray tube that radiates excitation X-rays toward the sample stage; a detector that detects fluorescent X-rays emitted from a sample on the sample stage; and a control device that controls the X-ray tube and the detector. Assuming that an intensity of X-rays that are part of the fluorescent X-rays, of a material of an X-ray tube target, emitted from the X-ray tube and are Rayleigh scattered by the sample placed on the sample stage is defined as IR and that an intensity of X-rays that are Compton scattered is defined as IC, when the control device creates a calibration curve by irradiating the standard sample with the excitation X-rays from the X-ray tube and when a value of IR/IC obtained for the standard sample is out of a reference range, the control device issues a warning.
1 . An X-ray fluorescence spectrometer that analyzes a constituent element of a sample, the X-ray fluorescence spectrometer comprising:
a sample stage on which the sample is placed;
an X-ray tube including a target that emits X-rays when receiving thermal electrons, the X-ray tube radiating, toward the sample stage, excitation X-rays containing fluorescent X-rays of a material of the target; and
a detector that detects fluorescent X-rays emitted from the sample on the sample stage; and
a control device that controls the X-ray tube and the detector, wherein
an intensity of X-rays that are part of the fluorescent X-rays from the target material and are Rayleigh scattered by the sample placed on the sample stage is defined as IR,
an intensity of X-rays that are part of the fluorescent X-rays from the target material and are Compton scattered by the sample placed on the sample stage is defined as IC, and
the control device is configured to issue a warning, when the control device creates a calibration curve by irradiating a standard sample with the excitation X-rays from the X-ray tube and when a value of IR/IC obtained for the standard sample is out of a first reference range, wherein
the first reference range is a range determined in advance for a base material of the standard sample, and is stored in the control device.
2 . An X-ray fluorescence spectrometer that analyzes a constituent element of a sample, the X-ray fluorescence spectrometer comprising:
a sample stage on which the sample is placed;
an X-ray tube including a target that emits X-rays when receiving thermal electrons, the X-ray tube radiating, toward the sample stage, excitation X-rays containing fluorescent X-rays of a material of the target; and
a detector that detects fluorescent X-rays emitted from the sample on the sample stage; and
a control device that controls the X-ray tube and the detector, wherein
an intensity of X-rays that are part of the fluorescent X-rays from the target material and are Rayleigh scattered by the sample placed on the sample stage is defined as IR,
an intensity of X-rays that are part of the fluorescent X-rays from the target material and are Compton scattered by the sample placed on the sample stage is defined as IC, and
the control device is configured to issue a warning, when the control device creates a calibration curve by irradiating a standard sample with the excitation X-rays from the X-ray tube and when a value of IR/IC obtained for the standard sample is out of a first reference range, wherein
the sample stage includes a plurality of opening portions each of which is provided with an opening, and a sample is allowed to be placed on each of the plurality of opening portions, and
the control device is configured to create the calibration curve by sequentially irradiating a plurality of standard samples each placed on one of the plurality of opening portions with the excitation X-rays from the X-ray tube.
3 . The X-ray fluorescence spectrometer according to claim 2 , wherein the first reference range is determined based on an average value and a standard deviation of IR/IC obtained for each of a plurality of standard samples each placed on one of the plurality of opening portions when the calibration curve is created.
4 . The X-ray fluorescence spectrometer according to claim 1 , wherein, after the calibration curve is created, the control device is configured to issue a warning when a value of IR/IC obtained by measuring the sample is out of the first reference range.
5 . An X-ray fluorescence spectrometer that analyzes a constituent element of a sample, the X-ray fluorescence spectrometer comprising:
a sample stage on which the sample is placed;
an X-ray tube including a target that emits X-rays when receiving thermal electrons, the X-ray tube radiating, toward the sample stage, excitation X-rays containing fluorescent X-rays of a material of the target; and
a detector that detects fluorescent X-rays emitted from the sample on the sample stage; and
a control device that controls the X-ray tube and the detector, wherein
an intensity of X-rays that are part of the fluorescent X-rays from the target material and are Rayleigh scattered by the sample placed on the sample stage is defined as IR,
an intensity of X-rays that are part of the fluorescent X-rays from the target material and are Compton scattered by the sample placed on the sample stage is defined as IC, and
the control device is configured to issue a warning, when the control device creates a calibration curve by irradiating a standard sample with the excitation X-rays from the X-ray tube and when a value of IR/IC obtained for the standard sample is out of a first reference range, wherein,
during a creation of the calibration curve using a plurality of standard samples, the control device is configured to issue a warning when an analysis point is out of a second reference range defined with respect to a provisional calibration curve, the analysis point being obtained by a fluorescent X-ray intensity of an analysis target component and a concentration of the analysis target component, the fluorescent X-ray intensity being obtained by measuring a determination target standard sample, the concentration being registered for the determination target standard sample, and
the provisional calibration curve is a calibration curve created using the plurality of standard samples or a calibration curve created using a sample obtained by removing the determination target standard sample from the plurality of standard samples.