IP Library Granted Patent US 12687510
Granted Patent B2
US 12687510 · App. 18/616,824 · Granted Jul 21, 2026

Analysis apparatus, system, method, and program

Inventors: Rieko Suenaga (Akishima, JP); Yoshiyasu Ito (Akishima, JP)
Assignee: RIGAKU CORPORATION
G01N23/2252G01N23/2055
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Quick Facts
Patent No.
US 12687510
App. No.
18/616,824
Granted
Jul 21, 2026
Kind
B2
Abstract

An analysis apparatus for calculating an index indicating an optimization degree of a model with respect to measurement data includes processing circuitry configured to calculate an index indicating an optimization degree of a model including information of an electron density distribution with respect to measurement data, a probability distribution function followed by the measurement data being known, acquire the measurement data, acquire calculation data calculated from the model, and calculate an index GOF including a ratio of a residual, which is defined by a predetermined mathematical formula including the measurement data and the calculation data, and an expected value of the residual, which is defined based on the probability distribution function and the predetermined mathematical formula.

Claims (45)

1 . An analysis apparatus for calculating an index indicating an optimization degree of a model including information of an electron density distribution with respect to measurement data, a probability distribution function followed by the measurement data being known, comprising:

processing circuitry configured to

acquire the measurement data,

acquire calculation data calculated from the model, and

calculate an index goodness-of-fit (GOF) including a ratio of a residual, which is defined by a predetermined mathematical formula including the measurement data and the calculation data, and an expected value of the residual, which is defined based on the probability distribution function and the predetermined mathematical formula,

wherein the predetermined mathematical formula includes a sum of squared residuals of a logarithm of the measurement data and a logarithm of the calculation data.

2 . The analysis apparatus according to claim 1 ,

wherein the processing circuitry is further configured to evaluate convergence of the GOF.

3 . The analysis apparatus according to claim 1 ,

wherein the probability distribution function is a Poisson distribution, and the processing circuitry is further configured to calculate an expected value of the residual by approximating the expected value with a Gaussian distribution.

4 . A system comprising,

an X-ray analysis apparatus comprising an X-ray generating section for generating X-rays, a sample table for placing a sample, and a detector for detecting X-rays, and

an analysis apparatus according to claim 1 .

5 . The analysis apparatus according to claim 2 , wherein the processing circuitry is further configured to

generate the model and calculate the calculation data based on the generated model,

acquire the calculation data,

output the model in a case that the GOF has converged,

update a model parameter of the model, generate the model and calculate the calculation data in a case that the GOF has not converged, and

calculate the GOF based on the calculated calculation data.

6 . An analysis apparatus for calculating an index indicating an optimization degree of a model including information of an electron density distribution with respect to measurement data, a probability distribution function followed by the measurement data being known, comprising:

processing circuitry configured to

acquire the measurement data,

acquire calculation data calculated from the model, and

calculate an index goodness-of-fit (GOF) including a ratio of a residual, which is defined by a predetermined mathematical formula including the measurement data and the calculation data, and an expected value of the residual, which is defined based on the probability distribution function and the predetermined mathematical formula,

wherein the predetermined mathematical formula includes a weight parameter that multiplies the measurement data by a constant value when the measurement data has an intensity equal to or less than a predetermined value and that takes a logarithm of the measurement data when the measurement data has an intensity more than the predetermined value.

7 . A method for calculating an index indicating an optimization degree of a model including information of an electron density distribution with respect to measurement data, a probability distribution function followed by the measurement data being known, comprising:

acquiring the measurement data,

acquiring calculation data calculated from the model, and

calculating an index goodness-of-fit (GOF) including a ratio of a residual, which is defined by a predetermined mathematical formula including the measurement data and the calculation data, and an expected value of the residual, which is defined based on the probability distribution function and the predetermined mathematical formula,

wherein the predetermined mathematical formula includes a sum of squared residuals of a logarithm of the measurement data and a logarithm of the calculation data.

8 . A non-transitory computer-readable storage medium storing computer-readable instructions thereon for calculating an index indicating an optimization degree of a model including information of an electron density distribution with respect to measurement data, a probability distribution function followed by the measurement data being known which, when executed by a computer, causes the computer to perform a method, the method comprising:

acquiring the measurement data,

acquiring calculation data calculated from the model, and

calculating an index goodness-of-fit (GOF) including a ratio of a residual, which is defined by a predetermined mathematical formula including the measurement data and the calculation data, and an expected value of the residual, which is defined based on the probability distribution function and the predetermined mathematical formula,

wherein the predetermined mathematical formula includes a sum of squared residuals of a logarithm of the measurement data and a logarithm of the calculation data.

9 . The non-transitory computer-readable storage medium of claim 8 , further comprising:

evaluating convergence of the GOF.

10 . The non-transitory computer-readable storage medium of claim 8 , wherein the probability distribution function is a Poisson distribution, further comprising:

calculating an expected value of the residual by approximating the expected value with a Gaussian distribution.

11 . The non-transitory computer-readable storage medium of claim 9 , further comprising:

generating the model and calculate the calculation data based on the generated model;

acquiring the calculation data;

outputting the model in a case that the GOF has converged;

updating a model parameter of the model, generate the model and calculate the calculation data in a case that the GOF has not converged; and

calculating the GOF based on the calculated calculation data.