IP Library Granted Patent US 12687531
Granted Patent B2
US 12687531 · App. 18/347,130 · Granted Jul 21, 2026

Hydrogen sensor with sorption element for water vapor

Inventors: Rainer Markus Schaller (Aichen, DE); Klaus Elian (Alteglofsheim, DE)
Assignee: Infineon Technologies AG
G01N33/0016G01N33/005
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Quick Facts
Patent No.
US 12687531
App. No.
18/347,130
Granted
Jul 21, 2026
Kind
B2
Abstract

What is disclosed is a hydrogen sensor ( 100 ) having a housing ( 101 ) that includes a cavity ( 102 ) and has a passage opening ( 103 ) from the cavity ( 102 ) to a gas connection of the hydrogen sensor ( 100 ) or an environment, having a first hydrogen sensor element ( 104 ), disposed in the cavity ( 102 ), for measurement of a hydrogen content in the cavity ( 102 ), having a first sorption element ( 105 ) for sorption of water and/or water vapor, especially an adsorption element ( 105 ) for adsorption of water and/or water vapor, and having a first heater ( 106 ) for bakeout of the first sorption element ( 105 ), wherein the first sorption element ( 105 ) has open pores and is disposed in the passage opening ( 103 ).

Claims (37)

1 . A hydrogen sensor, comprising:

a housing that comprises a passage opening from a gas connection of the hydrogen sensor or an environment to an outer cavity;

a hydrogen sensor element, arranged in an inner cavity, configured to measure a hydrogen content in the inner cavity;

a sorption element for sorption of at least one of water or water vapor, wherein the sorption element has open pores and is arranged within the housing between the outer cavity and the inner cavity, wherein the inner cavity has an inner cavity opening that faces away from the passage opening; and

a heater for bakeout of the sorption element, wherein the sorption element is disposed atop the heater.

2 . The hydrogen sensor as claimed in claim 1 , wherein a pore size of the sorption element is less than 1 mm.

3 . The hydrogen sensor as claimed in claim 1 , wherein the sorption element comprises zeolite.

4 . The hydrogen sensor as claimed in claim 1 , further including:

a gas-permeable membrane that covers the passage opening.

5 . The hydrogen sensor as claimed in claim 1 , wherein the hydrogen sensor comprises a temperature sensor element.

6 . The hydrogen sensor as claimed in claim 1 , further comprising:

a lead frame or a printed circuit board.

7 . The hydrogen sensor as claimed in claim 6 , wherein the heater or the sorption element is arranged on the lead frame or the printed circuit board.

8 . The hydrogen sensor as claimed in claim 6 , wherein the heater is formed in the lead frame or the printed circuit board.

9 . The hydrogen sensor as claimed in claim 1 , wherein an arrangement of the passage opening, the sorption element, and the inner cavity opening leads to a change in a direction of flow from the gas connection or the environment to the inner cavity of more than 80°.

10 . The hydrogen sensor as claimed in claim 9 , wherein an arrangement of the passage opening, the sorption element, and the inner cavity opening leads to a change in a direction of flow from the gas connection or the environment to the inner cavity of more than 160°.

11 . The hydrogen sensor as claimed in claim 1 , wherein the sorption element is an adsorption element for adsorption of at least one of the water or the water vapor.

12 . The hydrogen sensor as claimed in claim 1 , wherein a pore size of the sorption element is less than 1 μm.

13 . The hydrogen sensor as claimed in claim 1 , further comprising:

a lead frame that extends into the housing, wherein the heater is arranged on the lead frame in direct contact with the lead frame.

14 . The hydrogen sensor as claimed in claim 13 , wherein the lead frame and the passage opening are arranged at opposite sides of the housing.

15 . The hydrogen sensor as claimed in claim 13 , wherein the sorption element is arranged on the heater such that the heater is arranged between the lead frame and the sorption element.

16 . The hydrogen sensor as claimed in claim 15 , wherein the sorption element is in direct contact with the heater.

17 . The hydrogen sensor as claimed in claim 13 , wherein the passage opening, the sorption element, and the inner cavity opening are arranged such that a position of the sorption element relative to the passage opening and the inner cavity opening is configured to cause a change in a direction of flow from the passage opening to the inner cavity of more than 80°.

18 . The hydrogen sensor as claimed in claim 13 , wherein the passage opening, the sorption element, and the inner cavity opening are arranged such that a position of the sorption element relative to the passage opening and the inner cavity opening is configured to cause a change in a direction of flow from the passage opening to the inner cavity of more than 160°.

19 . The hydrogen sensor as claimed in claim 1 , further comprising:

a lead frame that extends into the housing,

wherein the sorption element is arranged on the lead frame in direct contact with the lead frame, and

wherein the heater is integral with the lead frame.

20 . The hydrogen sensor as claimed in claim 19 , wherein the lead frame and the passage opening are arranged at opposite sides of the housing, and

wherein the sorption element is arranged at the inner cavity opening.

21 . The hydrogen sensor as claimed in claim 1 , wherein the inner cavity is defined by a stacked structure arranged within the outer cavity.

22 . A hydrogen sensor, comprising:

a housing that has a passage opening from a gas connection of the hydrogen sensor or an environment to an outer cavity;

a hydrogen sensor element, arranged in an inner cavity, configured to measure a hydrogen content in the inner cavity;

a sorption element for sorption of at least one of water or water vapor, wherein the sorption element has open pores and is arranged within the housing between the outer cavity and the inner cavity, wherein the inner cavity has an inner cavity opening that faces away from the passage opening; and

a heater for bakeout of the sorption element, wherein the sorption element is disposed in direct contact with the heater.